JPH0371542U - - Google Patents
Info
- Publication number
- JPH0371542U JPH0371542U JP13426489U JP13426489U JPH0371542U JP H0371542 U JPH0371542 U JP H0371542U JP 13426489 U JP13426489 U JP 13426489U JP 13426489 U JP13426489 U JP 13426489U JP H0371542 U JPH0371542 U JP H0371542U
- Authority
- JP
- Japan
- Prior art keywords
- terminal
- supported
- electrode
- electrodes
- insulating spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13426489U JPH0541489Y2 (da) | 1989-11-17 | 1989-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13426489U JPH0541489Y2 (da) | 1989-11-17 | 1989-11-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0371542U true JPH0371542U (da) | 1991-07-19 |
| JPH0541489Y2 JPH0541489Y2 (da) | 1993-10-20 |
Family
ID=31681612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13426489U Expired - Lifetime JPH0541489Y2 (da) | 1989-11-17 | 1989-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0541489Y2 (da) |
-
1989
- 1989-11-17 JP JP13426489U patent/JPH0541489Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0541489Y2 (da) | 1993-10-20 |