JPH0370612U - - Google Patents
Info
- Publication number
- JPH0370612U JPH0370612U JP13216989U JP13216989U JPH0370612U JP H0370612 U JPH0370612 U JP H0370612U JP 13216989 U JP13216989 U JP 13216989U JP 13216989 U JP13216989 U JP 13216989U JP H0370612 U JPH0370612 U JP H0370612U
- Authority
- JP
- Japan
- Prior art keywords
- pressure reducing
- reducing chamber
- heater
- side wall
- temperature sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006837 decompression Effects 0.000 description 1
Landscapes
- Control Of Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13216989U JPH0370612U (ru) | 1989-11-14 | 1989-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13216989U JPH0370612U (ru) | 1989-11-14 | 1989-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0370612U true JPH0370612U (ru) | 1991-07-16 |
Family
ID=31679638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13216989U Pending JPH0370612U (ru) | 1989-11-14 | 1989-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0370612U (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007055370A1 (ja) * | 2005-11-14 | 2007-05-18 | Ham-Let Motoyama Japan Ltd. | 流体制御装置と圧力調節弁と制御方法 |
-
1989
- 1989-11-14 JP JP13216989U patent/JPH0370612U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007055370A1 (ja) * | 2005-11-14 | 2007-05-18 | Ham-Let Motoyama Japan Ltd. | 流体制御装置と圧力調節弁と制御方法 |