JPH0370307U - - Google Patents
Info
- Publication number
- JPH0370307U JPH0370307U JP13193189U JP13193189U JPH0370307U JP H0370307 U JPH0370307 U JP H0370307U JP 13193189 U JP13193189 U JP 13193189U JP 13193189 U JP13193189 U JP 13193189U JP H0370307 U JPH0370307 U JP H0370307U
- Authority
- JP
- Japan
- Prior art keywords
- axis direction
- pressing pin
- sample
- probe
- coarse movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 14
- 230000005641 tunneling Effects 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 2
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
第１図および第２図は本考案の実施例を示し、
第１図は走査型トンネル顕微鏡の側面図、第２図
は同顕微鏡の平面断面図である。第３図は従来の
走査型トンネル顕微鏡の側面図である。
１……走査型トンネル顕微鏡、２……真空チヤ
ンバ、４……試料、６……試料ホルダ、８……探
針、１２……探針保持部、１４ｘ，１４ｙ，１４
ｚ……圧電素子（変位機構）、１６……粗動機構
（マイクロメータヘツド）、１６ａ……送り棒、
１６ｂ……操作部、２２……押圧ピン、２４……
リニアスライド機構、２８……クランプ機構。
1 and 2 show an embodiment of the present invention,
FIG. 1 is a side view of a scanning tunneling microscope, and FIG. 2 is a plan cross-sectional view of the same microscope. FIG. 3 is a side view of a conventional scanning tunneling microscope. DESCRIPTION OF SYMBOLS 1... Scanning tunneling microscope, 2... Vacuum chamber, 4... Sample, 6... Sample holder, 8... Probe, 12... Probe holding part, 14x, 14y, 14
z...Piezoelectric element (displacement mechanism), 16...Coarse movement mechanism (micrometer head), 16a...Feeding rod,
16b...Operation unit, 22...Press pin, 24...
Linear slide mechanism, 28...clamp mechanism.
Claims (1)
料ホルダと、前記試料との間でトンネル電流を流
すための探針とが対向配置され、この探針は探針
保持部に保持され、この探針保持部には前記探針
を試料ホルダ側に向かうＺ軸方向とこれに直交す
るＸ軸、Ｙ軸の３軸方向にそれぞれ個別に変位さ
せる変位手段が設けられている走査型トンネル顕
微鏡において、 前記真空チヤンバの外部には、前記Ｚ軸方向に
沿つて送り棒を出退させる粗動機構が設けられる
一方、前記試料ホルダと探針保持部のいずれか一
方と前記粗動機構の送り棒との間には押圧ピンが
介在され、かつ、この押圧ピンは前記Ｚ軸方向に
沿つて摺動自在に設けられる一方、この押圧ピン
の摺動方向と直交する位置には該押圧ピンをクラ
ンプするクランプ機構が配置されていることを特
徴とする走査型トンネル顕微鏡。 (2) 前記クランプ機構は、少なくとも２つの圧
電素子を押圧ピンを挟んで対向配置して構成され
たものである請求項１記載の走査型トンネル顕微
鏡。[Claims for Utility Model Registration] (1) A sample holder to which a sample is attached and a probe for passing a tunneling current between the sample and the sample are disposed facing each other in the vacuum chamber. The probe holder is held by a probe holder, and the probe holder includes displacement means for individually displacing the probe in three axial directions: a Z-axis direction toward the sample holder, and an X-axis and a Y-axis perpendicular to the Z-axis direction. In the provided scanning tunneling microscope, a coarse movement mechanism for moving the feed rod in and out along the Z-axis direction is provided outside the vacuum chamber, while a coarse movement mechanism for moving the feed rod in and out along the Z-axis direction is provided. A pressing pin is interposed between one side and the feed rod of the coarse movement mechanism, and this pressing pin is provided so as to be slidable along the Z-axis direction, while the pressing pin is provided so as to be slidable along the Z-axis direction. A scanning tunneling microscope characterized in that a clamping mechanism for clamping the pressing pin is disposed at a position where the pressing pin is clamped. (2) The scanning tunneling microscope according to claim 1, wherein the clamp mechanism is constructed by arranging at least two piezoelectric elements facing each other with a pressing pin in between.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13193189U JPH0370307U (en) | 1989-11-13 | 1989-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13193189U JPH0370307U (en) | 1989-11-13 | 1989-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0370307U true JPH0370307U (en) | 1991-07-15 |
Family
ID=31679410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13193189U Pending JPH0370307U (en) | 1989-11-13 | 1989-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0370307U (en) |
-
1989
- 1989-11-13 JP JP13193189U patent/JPH0370307U/ja active Pending
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