JPH0370266U - - Google Patents
Info
- Publication number
- JPH0370266U JPH0370266U JP13067789U JP13067789U JPH0370266U JP H0370266 U JPH0370266 U JP H0370266U JP 13067789 U JP13067789 U JP 13067789U JP 13067789 U JP13067789 U JP 13067789U JP H0370266 U JPH0370266 U JP H0370266U
- Authority
- JP
- Japan
- Prior art keywords
- prevention plate
- platen
- deposition prevention
- hole
- annular ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13067789U JPH0370266U (enExample) | 1989-11-09 | 1989-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13067789U JPH0370266U (enExample) | 1989-11-09 | 1989-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0370266U true JPH0370266U (enExample) | 1991-07-15 |
Family
ID=31678234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13067789U Pending JPH0370266U (enExample) | 1989-11-09 | 1989-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0370266U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012184489A (ja) * | 2011-03-08 | 2012-09-27 | Sumitomo Electric Ind Ltd | 真空蒸着装置 |
-
1989
- 1989-11-09 JP JP13067789U patent/JPH0370266U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012184489A (ja) * | 2011-03-08 | 2012-09-27 | Sumitomo Electric Ind Ltd | 真空蒸着装置 |