JPH0369852U - - Google Patents
Info
- Publication number
- JPH0369852U JPH0369852U JP13137589U JP13137589U JPH0369852U JP H0369852 U JPH0369852 U JP H0369852U JP 13137589 U JP13137589 U JP 13137589U JP 13137589 U JP13137589 U JP 13137589U JP H0369852 U JPH0369852 U JP H0369852U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- introduction tube
- oven
- plasma generation
- heating filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13137589U JPH0369852U (da) | 1989-11-10 | 1989-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13137589U JPH0369852U (da) | 1989-11-10 | 1989-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0369852U true JPH0369852U (da) | 1991-07-11 |
Family
ID=31678889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13137589U Pending JPH0369852U (da) | 1989-11-10 | 1989-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0369852U (da) |
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1989
- 1989-11-10 JP JP13137589U patent/JPH0369852U/ja active Pending