JPH0369239U - - Google Patents

Info

Publication number
JPH0369239U
JPH0369239U JP13019989U JP13019989U JPH0369239U JP H0369239 U JPH0369239 U JP H0369239U JP 13019989 U JP13019989 U JP 13019989U JP 13019989 U JP13019989 U JP 13019989U JP H0369239 U JPH0369239 U JP H0369239U
Authority
JP
Japan
Prior art keywords
wafer
support stand
pusher
reading device
map reading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13019989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13019989U priority Critical patent/JPH0369239U/ja
Publication of JPH0369239U publication Critical patent/JPH0369239U/ja
Pending legal-status Critical Current

Links

JP13019989U 1989-11-08 1989-11-08 Pending JPH0369239U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13019989U JPH0369239U (enrdf_load_stackoverflow) 1989-11-08 1989-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13019989U JPH0369239U (enrdf_load_stackoverflow) 1989-11-08 1989-11-08

Publications (1)

Publication Number Publication Date
JPH0369239U true JPH0369239U (enrdf_load_stackoverflow) 1991-07-09

Family

ID=31677789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13019989U Pending JPH0369239U (enrdf_load_stackoverflow) 1989-11-08 1989-11-08

Country Status (1)

Country Link
JP (1) JPH0369239U (enrdf_load_stackoverflow)

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