JPH0369020A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPH0369020A JPH0369020A JP20348289A JP20348289A JPH0369020A JP H0369020 A JPH0369020 A JP H0369020A JP 20348289 A JP20348289 A JP 20348289A JP 20348289 A JP20348289 A JP 20348289A JP H0369020 A JPH0369020 A JP H0369020A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- medium
- burnishing
- performance
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 230000001681 protective effect Effects 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 238000005498 polishing Methods 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 230000005294 ferromagnetic effect Effects 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052799 carbon Inorganic materials 0.000 abstract description 4
- 238000007667 floating Methods 0.000 abstract description 3
- 230000001050 lubricating effect Effects 0.000 abstract description 3
- 229910000531 Co alloy Inorganic materials 0.000 abstract description 2
- 238000005520 cutting process Methods 0.000 abstract description 2
- 229910000838 Al alloy Inorganic materials 0.000 abstract 1
- 229910018104 Ni-P Inorganic materials 0.000 abstract 1
- 229910018536 Ni—P Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 18
- 238000005461 lubrication Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 238000005339 levitation Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 3
- 235000002505 Centaurea nigra Nutrition 0.000 description 2
- 241001073742 Mylopharodon conocephalus Species 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910000882 Ca alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、固定磁気ディスク装置に搭載して好適に用
いられる浮上性能、潤滑性能の改善された磁気記録媒体
の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a magnetic recording medium with improved flying performance and lubrication performance, which is suitably used in a fixed magnetic disk device.
近年、固定磁気ディスク装置に搭載される磁気記録媒体
（以下、単に媒体とも称する）はスパッタ法で製造され
る薄膜媒体が主流となってきている。この製造方法では
、スパッタ成膜終了後媒体表面の微小突起を除去するた
めにバニツシ工程が行われる。例えば、Ａ１合金基板に
Ｎ１−Ｐ層が形成されてなる非磁性ディスク状基板の上
にスパッタ法によりＣｒ下地層、 Ｃｏ合金磁性層、Ｃ
保護膜を順次成膜した後に、Ｃ保護膜表面にバニッシを
行う。In recent years, thin film media manufactured by sputtering have become mainstream as magnetic recording media (hereinafter also simply referred to as media) mounted on fixed magnetic disk drives. In this manufacturing method, a burnishing process is performed to remove minute protrusions on the surface of the medium after sputtering film formation. For example, a Cr underlayer, a Co alloy magnetic layer, a C
After sequentially forming the protective films, the surface of the C protective film is burnished.
バニッシはディスク状の媒体をその中心軸のまわりに回
転させながら媒体表面、すなわち保護膜表面に硬質ヘッ
ドあるいは研磨テープを接触させ表面の突起を削りとる
加工方法である。従って、スパッタ法で製造された媒体
は媒体表面の突起が少なく、固定磁気ディスク装置に搭
載されて使用されるとき、情報の記録・再生に鴫して磁
気ヘッドが少ない浮上量で安定して媒体表面上を浮上走
行できるがバニッシを行うことでさらに浮上性能の優れ
たものとなる。Burnishing is a processing method in which a hard head or abrasive tape is brought into contact with the surface of the medium, that is, the surface of the protective film, while rotating a disk-shaped medium around its central axis to scrape away protrusions on the surface. Therefore, media manufactured using the sputtering method have fewer protrusions on the media surface, and when used in a fixed magnetic disk drive, the magnetic head is stable when recording and reproducing information with a small flying height. It can levitate on the surface, but by performing a vanishing operation, its levitation performance becomes even better.
バニッシ工程では媒体表面を硬質ヘッドなどで切削する
からパリが発生する。従来は、媒体を同一方向に回転さ
せてバニッシを行っていたためにパリが多く残存してい
た。一方、固定磁気ディスク装置は一般にＣ３Ｓ方式が
採られており、装置の駆動の開始時、停止時に媒体表面
と磁気ヘッドとは接触摺動する。このとき、媒体表面に
上記のようなパリが存在すると両者の潤滑性が悪くなり
、また、磁気ヘッドの媒体表面に対する円滑な離陸。In the burnishing process, the surface of the medium is cut with a hard head or the like, so that burrs occur. Conventionally, burnishing was performed by rotating the medium in the same direction, resulting in a large amount of burnishing remaining. On the other hand, fixed magnetic disk drives generally employ the C3S system, in which the medium surface and the magnetic head slide into contact with each other when the drive of the drive starts and stops. At this time, if the above-mentioned particles exist on the surface of the medium, the lubricity between the two deteriorates, and the magnetic head cannot take off smoothly from the surface of the medium.
着陸が乱され、浮上性能が悪くなるという問題が発生し
ていた。There were problems with the landing being disrupted and the levitation performance being poor.
この発明が解決しようとする課題は、上述の問題点を解
消して、スパッタ法による媒体の製造方法において、バ
ニッシ工程でのパリの発生が少なく、潤滑性能、浮上性
能の改善された媒体の製造方法を提供することにある。The problem to be solved by this invention is to solve the above-mentioned problems, and to produce a medium with less generation of flakes in the burnishing process and with improved lubrication performance and flying performance in a method for manufacturing media by sputtering. The purpose is to provide a method.
〔課題を解決するための手段〕
上記の課題は、この発明によれば、非磁性ディスク状基
板上にスパッタ法により強磁性合金からなる磁性層を形
成し、その上に保護膜を形威し、この保護膜表面にバニ
ッシを行う工程を含む媒体の製造方法において、保護膜
まで形成されたディスク状基板に研磨体を接触させ、該
ディスク状基板をその中心軸を軸として回転させ前記保
護膜表面に円周方向のバニッシを行い、その後前記バニ
ッシとは逆方向のバニッシを行う製造方法とすることに
よって解決される。[Means for Solving the Problems] According to the present invention, the above problems are solved by forming a magnetic layer made of a ferromagnetic alloy on a non-magnetic disk-shaped substrate by sputtering, and forming a protective film on the magnetic layer. , a method for manufacturing a medium including the step of burnishing the surface of the protective film, in which a polishing body is brought into contact with a disc-shaped substrate on which the protective film has been formed, and the disc-shaped substrate is rotated about its central axis to burnish the protective film. This problem is solved by a manufacturing method in which the surface is burnished in the circumferential direction and then burnished in the opposite direction to the burnishing.
保護膜表面に円周方向の両方向からバニッシを行うこと
により、保護膜表面は従来のように円周方向の一方向に
だけ切削されるのではなく、逆方向からも切削されるこ
とになり、パリの少ない切削を行うことが可能となり、
潤滑性能、浮上性能の改善された媒体を得ることができ
る。By performing burnishing on the protective film surface from both circumferential directions, the protective film surface is not only cut in one circumferential direction as in the past, but also from the opposite direction. It becomes possible to perform cutting with less burrs,
A medium with improved lubrication performance and floating performance can be obtained.
このような両方向からのバニッシを行うためには、”″
バニッシ工程において、途中で媒体の回転を反転させて
バニッシを行えばよい。あるいは−回バニッシを行った
後、媒体を裏返しして再度バニッシを行えばよい。In order to perform this kind of vanishing from both directions, ""
In the burnishing process, burnishing may be performed by reversing the rotation of the medium midway through. Alternatively, after performing burnishing - times, the medium may be turned over and burnishing may be performed again.
ディスク状のＡ１合金基板上にＮ１−Ｐの下地層を形威
し、その上にスパッタ法によりＣｒ層、 Ｃａ合金磁性
層、炭素保護膜を順次成膜積層した。このようにして炭
素保護膜まで形成したディスク状基板をその中心軸のま
わりに回転させながら炭素保護膜表面を研磨テープを用
いて次の条件でバニッシした。研磨テープはその幅方向
で保護膜表面と線接触させ、また、回転している基板の
半径方向全長にわたって移動させて保護膜全表面をバニ
ツシする。An N1-P underlayer was formed on a disk-shaped A1 alloy substrate, and a Cr layer, a Ca alloy magnetic layer, and a carbon protective film were successively deposited thereon by sputtering. While rotating the disk-shaped substrate on which the carbon protective film had been formed in this way around its central axis, the surface of the carbon protective film was burnished using a polishing tape under the following conditions. The polishing tape is brought into line contact with the surface of the protective film in its width direction, and is moved over the entire length of the rotating substrate in the radial direction to burnish the entire surface of the protective film.
バニッン条件
基板回転数 ５０Ｏｒｐｍ
ディスク状基板を一方向に回転させてバニッシを行い、
次に逆方向に回転させてバニッシを行い、続いて再び最
初の回転方向に回転させてバニッシを行い、実施例の媒
体を作製した。また、ディスク状基板を一方向にのみ回
転させて同様に３回バニッシを行い、比較例の媒体を作
製した。これら実施例および比較例の媒体について浮上
性能と潤滑性能を評価した。Burnishing conditions Substrate rotation speed: 50 Orpm Burnishing is performed by rotating the disk-shaped substrate in one direction.
Next, it was rotated in the opposite direction to perform burnishing, and then rotated again in the initial direction of rotation to perform burnishing, thereby producing the medium of the example. In addition, a medium of a comparative example was produced by rotating the disk-shaped substrate in only one direction and performing burnishing three times in the same manner. The flying performance and lubrication performance of the media of these Examples and Comparative Examples were evaluated.
浮上性能は、停止している媒体表面に磁気ヘッドを接触
させておき、媒体の回転を開始して速度を徐々に増加さ
せたときの磁気ヘッドの接触点の周速と磁気ヘッドのア
ームに付設されたＡＥ全センサ力（ｍＶ） との関係
を調べ、磁気ヘッドの浮上した時点の周速により評価し
た。第１図および第２図はそれぞれ実施例および比較例
についての上述の周速とＡＥ全センサ力との関係を調べ
た結果を示す線図で、周速が速くなるにつれてＡＥ全セ
ンサ力はいったん増大していき、その後減少して磁気ヘ
ッドが浮上した時点以後は一定の出力となる。この浮上
ポイントの周速が小さい程浮上性能は良いことになる。Flying performance is determined by the circumferential speed of the magnetic head's contact point and the magnetic head's arm when the magnetic head is in contact with the surface of a stopped medium and the medium starts rotating and the speed is gradually increased. The relationship between the AE and the total sensor force (mV) was investigated, and evaluation was made based on the circumferential speed at the time the magnetic head floated. Figures 1 and 2 are graphs showing the results of investigating the relationship between the above-mentioned circumferential speed and AE total sensor force for Examples and Comparative Examples, respectively.As the circumferential speed increases, the AE total sensor force increases. The output increases, then decreases, and remains constant after the time when the magnetic head flies. The smaller the circumferential speed of this levitation point, the better the levitation performance.
潤滑性能は、媒体を垂直荷重（１０８ｆ程度）をかけら
れた磁気ヘッドが浮上しない程度の所定の低速で回転さ
せ、磁気ヘッドを媒体表面に慴動させながら摩擦係数の
変動の様子を調べる一種の摩擦・磨耗テストであるスラ
イディングコンタクトテス）（ＳＣＴ） により評価
した。第３図および第４図は、それぞれ実施例および比
較例についてのＳＣＴにおける摺動時間と摺動摩擦係数
との関係を調べた結果を示す線図である。摺動摩擦係数
が小さく変動が少ない程潤滑性能が優れていることにな
る。Lubrication performance is measured by rotating the medium at a predetermined low speed that does not allow the magnetic head to float under a vertical load (approximately 108 f), and examining changes in the coefficient of friction while sliding the magnetic head on the surface of the medium. Evaluation was made using the Sliding Contact Test (SCT), which is a friction/wear test. FIG. 3 and FIG. 4 are diagrams showing the results of investigating the relationship between the sliding time and the sliding friction coefficient in SCT for Examples and Comparative Examples, respectively. The smaller the sliding friction coefficient and the less variation, the better the lubrication performance.
これらの測定結果より浮上性能、潤滑性能の評価結果を
第１表に示す。浮上性能は磁気ヘッドの浮上ポイントの
周速で示し、潤滑性能はＳ ＣＴ６０分後の摺動摩擦係
数で示しである。Table 1 shows the evaluation results of floating performance and lubrication performance based on these measurement results. The flying performance is shown by the circumferential speed of the flying point of the magnetic head, and the lubrication performance is shown by the sliding friction coefficient after 60 minutes of SCT.
第 ｌ 表
〔発明の効果〕
この発明によれば、スパッタ法による媒体の製造方法に
おける保護膜表面のバニッシ工程において、保護膜表面
に円周方向の両方向からバニッシを行うこととする。こ
のような製造方法とすることにより保護膜表面は微小突
起も少なくしかもパリも少ない表面となり、潤滑性能、
浮上性能の改善された媒体が得られることになる。Table 1 [Effects of the Invention] According to the present invention, in the process of burnishing the surface of the protective film in the method for producing a medium by sputtering, the surface of the protective film is burnished from both directions in the circumferential direction. By using this manufacturing method, the surface of the protective film has fewer microprotrusions and less particles, which improves lubrication performance and
A medium with improved flying performance can be obtained.
第１図はこの発明の一実施例の媒体の浮上性能を示す線
図、第２図は従来例の媒体の浮上性能を示す線図、第３
図はこの発明の一実施例の媒体の潤滑性能を示す線図、
第４図は従来例の媒体の潤滑性能を示す線図である。
第１表より、浮上性能、潤滑性能ともに実施例の方が優
れていることは明らかである。FIG. 1 is a diagram showing the flying performance of a medium according to an embodiment of the present invention, FIG. 2 is a diagram showing the flying performance of a conventional medium, and FIG.
The figure is a diagram showing the lubricating performance of a medium according to an embodiment of the present invention.
FIG. 4 is a diagram showing the lubricating performance of a conventional medium. From Table 1, it is clear that the examples are superior in both flying performance and lubrication performance.
Claims (1)
合金からなる薄膜磁性層を形成し、その上に保護膜を形
成し、この保護膜表面にバニッシを行う工程を含む磁気
記録媒体の製造方法において、保護膜まで形成されたデ
ィスク状基板に研磨体を接触させ、該ディスク状基板を
その中心軸を軸として回転させ前記保護膜表面に円周方
向のバニッシを行い、その後前記バニッシとは逆方向の
バニッシを行うことを特徴とする磁気記録媒体の製造方
法。1) A method for producing a magnetic recording medium, which includes the steps of forming a thin magnetic layer made of a ferromagnetic alloy on a non-magnetic disk-shaped substrate by sputtering, forming a protective film thereon, and burnishing the surface of the protective film. In this step, a polishing body is brought into contact with a disc-shaped substrate on which a protective film has been formed, and the disc-shaped substrate is rotated about its central axis to burnish the surface of the protective film in the circumferential direction, and then burnish the surface of the protective film in the opposite direction. A method for manufacturing a magnetic recording medium, characterized by performing directional burnishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20348289A JPH0369020A (en) | 1989-08-05 | 1989-08-05 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20348289A JPH0369020A (en) | 1989-08-05 | 1989-08-05 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0369020A true JPH0369020A (en) | 1991-03-25 |
Family
ID=16474883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20348289A Pending JPH0369020A (en) | 1989-08-05 | 1989-08-05 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0369020A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6478753A (en) * | 1987-09-16 | 1989-03-24 | Fujitsu Ltd | Tape burnish method for magnetic disc media |
-
1989
- 1989-08-05 JP JP20348289A patent/JPH0369020A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6478753A (en) * | 1987-09-16 | 1989-03-24 | Fujitsu Ltd | Tape burnish method for magnetic disc media |
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