JPH0368794U - - Google Patents

Info

Publication number
JPH0368794U
JPH0368794U JP13140889U JP13140889U JPH0368794U JP H0368794 U JPH0368794 U JP H0368794U JP 13140889 U JP13140889 U JP 13140889U JP 13140889 U JP13140889 U JP 13140889U JP H0368794 U JPH0368794 U JP H0368794U
Authority
JP
Japan
Prior art keywords
arms
pair
article
gripped
gripping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13140889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH077114Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989131408U priority Critical patent/JPH077114Y2/ja
Publication of JPH0368794U publication Critical patent/JPH0368794U/ja
Application granted granted Critical
Publication of JPH077114Y2 publication Critical patent/JPH077114Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989131408U 1989-11-09 1989-11-09 把持装置 Expired - Lifetime JPH077114Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989131408U JPH077114Y2 (ja) 1989-11-09 1989-11-09 把持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989131408U JPH077114Y2 (ja) 1989-11-09 1989-11-09 把持装置

Publications (2)

Publication Number Publication Date
JPH0368794U true JPH0368794U (US08124317-20120228-C00060.png) 1991-07-08
JPH077114Y2 JPH077114Y2 (ja) 1995-02-22

Family

ID=31678918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989131408U Expired - Lifetime JPH077114Y2 (ja) 1989-11-09 1989-11-09 把持装置

Country Status (1)

Country Link
JP (1) JPH077114Y2 (US08124317-20120228-C00060.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012060226A1 (ja) * 2010-11-02 2012-05-10 株式会社アルバック 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6367090U (US08124317-20120228-C00060.png) * 1986-10-20 1988-05-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6367090U (US08124317-20120228-C00060.png) * 1986-10-20 1988-05-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012060226A1 (ja) * 2010-11-02 2012-05-10 株式会社アルバック 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置
JP2012099675A (ja) * 2010-11-02 2012-05-24 Ulvac Japan Ltd 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置

Also Published As

Publication number Publication date
JPH077114Y2 (ja) 1995-02-22

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