JPH0367704U - - Google Patents
Info
- Publication number
- JPH0367704U JPH0367704U JP12502189U JP12502189U JPH0367704U JP H0367704 U JPH0367704 U JP H0367704U JP 12502189 U JP12502189 U JP 12502189U JP 12502189 U JP12502189 U JP 12502189U JP H0367704 U JPH0367704 U JP H0367704U
- Authority
- JP
- Japan
- Prior art keywords
- piston rod
- magnetic
- fluid pressure
- pressure cylinder
- cylinder device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 239000011295 pitch Substances 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 239000002344 surface layer Substances 0.000 claims 1
Landscapes
- Actuator (AREA)
Description
第１図は本考案の一実施例である流体圧シリン
ダ装置を一部切欠して示す断面図、第２図はその
流体圧シリンダ装置におけるピストンロツドの一
部を示す拡大断面図である。
１……本体、２，３……シリンダ室、２ａ，３
ａ……左側流体室、２ｂ，３ｂ……右側流体室、
４，５……給排ポート、６，７……ピストン、８
ａ，８ｂ……連通路、９，１０……ピストンロツ
ド、１１……軸受、１２……連結部材、１３……
磁性ロツド、１３ａ……凹溝、１４……非磁性体
層、１４ａ……表面硬化層、１５……磁気検出セ
ンサ、１５ａ，１５ｂ……磁気抵抗素子、１６…
…検出回路ユニツト。
FIG. 1 is a partially cutaway sectional view of a fluid pressure cylinder device according to an embodiment of the present invention, and FIG. 2 is an enlarged sectional view showing a portion of a piston rod in the fluid pressure cylinder device. 1...Main body, 2, 3...Cylinder chamber, 2a, 3
a...Left side fluid chamber, 2b, 3b...Right side fluid chamber,
4, 5... Supply/discharge port, 6, 7... Piston, 8
a, 8b... Communication path, 9, 10... Piston rod, 11... Bearing, 12... Connection member, 13...
Magnetic rod, 13a... Concave groove, 14... Nonmagnetic layer, 14a... Surface hardened layer, 15... Magnetic detection sensor, 15a, 15b... Magnetoresistive element, 16...
...Detection circuit unit.
Claims (1)
角ねじ状の凹溝が外周面に形成されている磁性ロ
ツドおよびこの磁性ロツドの凹溝を埋めて少なく
とも前記磁性ロツドの凹溝の延在領域における外
周面全体を被覆している非磁性体層からなるピス
トンロツドと、このピストンロツドの外周面側の
磁気特性によつて該ピストンロツドの位置を検出
する検出センサと、前記ピストンロツドの空転を
防止する空転防止手段とを備えていることを特徴
とする流体圧シリンダ装置。 ２ 前記ピストンロツドの外周面が表面硬化層に
よつて被覆されていることを特徴とする請求項１
記載の流体圧シリンダ装置。 ３ 前記検出センサの磁気抵抗素子が前記角ねじ
状の凹溝におけるねじ進み角に合致する方向に配
置されていることを特徴とする請求項１、または
２記載の流体圧シリンダ装置。[Claims for Utility Model Registration] 1. A magnetic rod having rectangular thread-shaped concave grooves extending spirally at equal pitches along the axial direction, and at least A piston rod made of a non-magnetic material layer that covers the entire outer circumferential surface of the magnetic rod in an area in which the concave groove extends, and a detection sensor that detects the position of the piston rod based on the magnetic characteristics of the outer circumferential surface of the piston rod. A fluid pressure cylinder device comprising: idling prevention means for preventing idling of the piston rod. 2. Claim 1, wherein the outer circumferential surface of the piston rod is covered with a hardened surface layer.
The fluid pressure cylinder device described. 3. The fluid pressure cylinder device according to claim 1 or 2, wherein the magnetic resistance element of the detection sensor is arranged in a direction that matches a screw advance angle in the square screw-shaped groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12502189U JPH0367704U (en) | 1989-10-25 | 1989-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12502189U JPH0367704U (en) | 1989-10-25 | 1989-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367704U true JPH0367704U (en) | 1991-07-02 |
Family
ID=31672910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12502189U Pending JPH0367704U (en) | 1989-10-25 | 1989-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367704U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006508307A (en) * | 2002-11-26 | 2006-03-09 | ウーデ・ハイ・プレッシャー・テクノロジーズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | High pressure device that closes the container in the clean room |
-
1989
- 1989-10-25 JP JP12502189U patent/JPH0367704U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006508307A (en) * | 2002-11-26 | 2006-03-09 | ウーデ・ハイ・プレッシャー・テクノロジーズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | High pressure device that closes the container in the clean room |
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