JPH0367063U - - Google Patents
Info
- Publication number
- JPH0367063U JPH0367063U JP12818389U JP12818389U JPH0367063U JP H0367063 U JPH0367063 U JP H0367063U JP 12818389 U JP12818389 U JP 12818389U JP 12818389 U JP12818389 U JP 12818389U JP H0367063 U JPH0367063 U JP H0367063U
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- tube
- gas phase
- phase reaction
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010574 gas phase reaction Methods 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 claims 1
- 230000007423 decrease Effects 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12818389U JPH0367063U (el) | 1989-11-01 | 1989-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12818389U JPH0367063U (el) | 1989-11-01 | 1989-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367063U true JPH0367063U (el) | 1991-06-28 |
Family
ID=31675902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12818389U Pending JPH0367063U (el) | 1989-11-01 | 1989-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367063U (el) |
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1989
- 1989-11-01 JP JP12818389U patent/JPH0367063U/ja active Pending