JPH0366674U - - Google Patents
Info
- Publication number
- JPH0366674U JPH0366674U JP12908389U JP12908389U JPH0366674U JP H0366674 U JPH0366674 U JP H0366674U JP 12908389 U JP12908389 U JP 12908389U JP 12908389 U JP12908389 U JP 12908389U JP H0366674 U JPH0366674 U JP H0366674U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- coating agent
- substrate
- rotating plate
- coating apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000004528 spin coating Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12908389U JPH0366674U (cs) | 1989-11-06 | 1989-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12908389U JPH0366674U (cs) | 1989-11-06 | 1989-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0366674U true JPH0366674U (cs) | 1991-06-28 |
Family
ID=31676745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12908389U Pending JPH0366674U (cs) | 1989-11-06 | 1989-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0366674U (cs) |
-
1989
- 1989-11-06 JP JP12908389U patent/JPH0366674U/ja active Pending
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