JPH0365931U - - Google Patents
Info
- Publication number
- JPH0365931U JPH0365931U JP12706589U JP12706589U JPH0365931U JP H0365931 U JPH0365931 U JP H0365931U JP 12706589 U JP12706589 U JP 12706589U JP 12706589 U JP12706589 U JP 12706589U JP H0365931 U JPH0365931 U JP H0365931U
- Authority
- JP
- Japan
- Prior art keywords
- mask plate
- substrate
- support
- mounting
- positioning hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 239000002390 adhesive tape Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
第１〜６図は本考案の実施例を示し、第１図は
斜視図、第２図は支持マスク板の正面図、第３図
は載置マスク板の正面図、第４図は位置決め孔部
の拡大断面図、第５図は粘着テープ部の拡大断面
図、第６図はＢＰ面とＳＬＣ面とを蒸着した基板
の正面図、第７〜９図は従来例を示し、第７図は
光学フイルタの正面図、第８図は一部の拡大断面
斜視図、第９図はＢＰ面とＳＬＣ面とを蒸着した
基板の正面図である。
１……基板、２……支持マスク板、３……開口
部、４ａ，４ｂ……ガイド突部、５ａ，５ｂ……
位置決め孔、６……載置マスク板、７……開口部
、８ａ，８ｂ……ガイド突部、９ａ，９ｂ……位
置決め孔、１１ａ，１１ｂ……位置決めピン、１
２……粘着テープ。
1 to 6 show an embodiment of the present invention, FIG. 1 is a perspective view, FIG. 2 is a front view of the supporting mask plate, FIG. 3 is a front view of the mounting mask plate, and FIG. 4 is a positioning hole. 5 is an enlarged sectional view of the adhesive tape section, FIG. 6 is a front view of the substrate on which the BP surface and SLC surface are deposited, FIGS. 7 to 9 show conventional examples, and FIG. 7 is an enlarged sectional view of the adhesive tape section. 8 is a front view of the optical filter, FIG. 8 is a partially enlarged sectional perspective view, and FIG. 9 is a front view of a substrate on which a BP surface and an SLC surface are deposited. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Support mask plate, 3... Opening, 4a, 4b... Guide protrusion, 5a, 5b...
Positioning hole, 6... Placing mask plate, 7... Opening, 8a, 8b... Guide protrusion, 9a, 9b... Positioning hole, 11a, 11b... Positioning pin, 1
2...Adhesive tape.
Claims (1)
も大きい支持マスク板と、基板と他面に重ねる基
板よりも小さい載置マスク板のそれぞれに、蒸着
用の開口部、位置決め孔が設けられ、更に支持マ
スク板と載置マスク板の各端部に突出させてガイ
ド突部が、それらの周縁が一致して重なるように
複数ずつ設けられてなり、前記基板に支持マスク
板と載置マスク板を重ね、かつ各ガイド突部を一
致させて各位置決め孔に位置決めピンを挿通して
、支持マスク板、基板、載置マスク板の各端部に
わたつて粘着テープを接着して、支持マスク板、
基板、載置マスク板を一体状にする光学フイルタ
製造の蒸着用マスク。 A support mask plate that is larger than the substrate and placed on one side of the optical filter substrate, and a mounting mask plate that is smaller than the substrate and placed on the other side are each provided with an opening for vapor deposition and a positioning hole, and are further provided with support. A plurality of guide protrusions are provided at each end of the mask plate and the mounting mask plate so that their peripheral edges coincide and overlap, and the supporting mask plate and the mounting mask plate are stacked on the substrate. , and aligning each guide protrusion, inserting a positioning pin into each positioning hole, and adhering adhesive tape across each end of the support mask plate, the substrate, and the mounting mask plate, to form a support mask plate,
A vapor deposition mask for manufacturing optical filters that integrates a substrate and a mounting mask plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12706589U JPH0740961Y2 (en) | 1989-10-30 | 1989-10-30 | Deposition mask for optical filter manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12706589U JPH0740961Y2 (en) | 1989-10-30 | 1989-10-30 | Deposition mask for optical filter manufacturing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0365931U true JPH0365931U (en) | 1991-06-26 |
| JPH0740961Y2 JPH0740961Y2 (en) | 1995-09-20 |
Family
ID=31674849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12706589U Expired - Fee Related JPH0740961Y2 (en) | 1989-10-30 | 1989-10-30 | Deposition mask for optical filter manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740961Y2 (en) |
-
1989
- 1989-10-30 JP JP12706589U patent/JPH0740961Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0740961Y2 (en) | 1995-09-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |