JPH0365256A - Specimen grinding tool - Google Patents
Specimen grinding toolInfo
- Publication number
- JPH0365256A JPH0365256A JP19932389A JP19932389A JPH0365256A JP H0365256 A JPH0365256 A JP H0365256A JP 19932389 A JP19932389 A JP 19932389A JP 19932389 A JP19932389 A JP 19932389A JP H0365256 A JPH0365256 A JP H0365256A
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- crushing
- specimen
- hardness
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 9
- 238000005240 physical vapour deposition Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 20
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052751 metal Inorganic materials 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 5
- 229910045601 alloy Inorganic materials 0.000 abstract description 4
- 239000000956 alloy Substances 0.000 abstract description 4
- 239000012535 impurity Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 239000010935 stainless steel Substances 0.000 abstract description 3
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract description 2
- 230000007797 corrosion Effects 0.000 abstract description 2
- 238000005289 physical deposition Methods 0.000 abstract 2
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 238000011109 contamination Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 7
- 239000000843 powder Substances 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910005540 GaP Inorganic materials 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 description 1
- CFJRGWXELQQLSA-UHFFFAOYSA-N azanylidyneniobium Chemical compound [Nb]#N CFJRGWXELQQLSA-UHFFFAOYSA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- -1 hafnium nitride Chemical class 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Disintegrating Or Milling (AREA)
Abstract
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は物質の粉砕に用いる試料粉砕棒具に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a sample crushing rod used for crushing substances.
［従来の技術］
物質中の不純物を分析するために、その物質を試料粉砕
棒具で粉砕する場合、粉砕面の物理的破損により、粉砕
部の材質に用いられている物質が試料粉砕中に混入する
ことが問題となる。[Prior art] When a substance is crushed with a sample crushing rod in order to analyze impurities in the substance, physical damage to the crushing surface causes the substance used for the material of the crushing part to break down during sample crushing. Contamination is a problem.
このような粉砕時の汚染をなくすために、通常粉砕部の
本体には、めのう、アルミナ、窒化ケイている。In order to eliminate such contamination during grinding, the main body of the grinding section is usually made of agate, alumina, or silicon nitride.
［発明が解決しようとする課題］
高純度物質中の微量不純物の分析のためにこれら基材を
用いた場合、試料の硬度が高いと基材からの汚染が無視
し得なくなる。例えば、試料がビッカーズ硬度１５００
ＨＶ程度であると、５分間径度の粉砕により、基材中に
含まれるけい素又はほう素が、試料粉１ｇあたり数十μ
ｇのオーダーで混入する。[Problems to be Solved by the Invention] When these base materials are used to analyze trace impurities in high-purity substances, contamination from the base material cannot be ignored if the sample has high hardness. For example, if the sample has a Vickers hardness of 1500
If it is around HV, silicon or boron contained in the base material can be reduced to several tens of microns per gram of sample powder by grinding for 5 minutes.
Mix on the order of g.
本発明は上記問題点に鑑み、物質を粉砕する場合、粉砕
時の不純物の汚染量を極力おさえることができる試料粉
砕棒具を提供するものである。In view of the above-mentioned problems, the present invention provides a sample crushing rod that can minimize the amount of impurity contamination during crushing when a substance is crushed.
［課題を解決するための手段］
上記目的を達成するため、本発明の試料粉砕棒具は、ビ
ッカーズ硬度が２００１Ｖ以上で、融点が３００℃以上
の金属又は合金を基材とする試料粉砕棒具のルツボ状粉
砕部及び粉砕棒の表面に物理蒸着法により高硬度セラミ
ックスを被覆した点に特徴がある。[Means for Solving the Problems] In order to achieve the above object, the sample crushing rod of the present invention is a sample crushing rod whose base material is a metal or alloy having a Vickers hardness of 2001 V or more and a melting point of 300° C. or more. The feature is that the surfaces of the crucible-shaped crushing part and the crushing rod are coated with high-hardness ceramics by physical vapor deposition.
以下、本発明について図面を用いて具体的に説明する。Hereinafter, the present invention will be specifically explained using the drawings.
第１図は、本発明による試料粉砕棒具の一例を示す図で
、ルツボ状粉枠部Ａ及び粉砕棒Ｂの断面図である。FIG. 1 is a diagram showing an example of a sample crushing rod according to the present invention, and is a sectional view of a crucible-shaped powder frame A and a crushing rod B.
第１図において粉砕部の基材１及び粉砕棒の基材２はス
テンレスより成り、この粉砕棒基材１及び粉砕棒基材２
は研磨され、表面を洗浄した後、物理蒸着装置で窒化チ
タン層３を被覆しである。In FIG. 1, the base material 1 of the crushing section and the base material 2 of the crushing rod are made of stainless steel.
After polishing and cleaning the surface, it is coated with a titanium nitride layer 3 using a physical vapor deposition device.
粉砕棒基材１及び粉砕棒基材２はハステロイ、高速度鋼
、ダイス鋼、超硬合金等のビッカーズ硬度２００ ＋１
Ｖ以上の金属又は合金であればよく、被覆する高硬度セ
ラミックスは、窒化チタンに限らず、窒化ジルコニウム
、窒化ハフニウム、窒化クロム、窒化ニオブ、窒化タン
タル、炭化チタンでもよい。The crushing rod base material 1 and the crushing rod base material 2 are made of Hastelloy, high speed steel, die steel, cemented carbide, etc. with a Vickers hardness of 200 +1.
Any metal or alloy with V or more may be used, and the high-hardness ceramic to be coated is not limited to titanium nitride, but may also be zirconium nitride, hafnium nitride, chromium nitride, niobium nitride, tantalum nitride, or titanium carbide.
基材１，２及び被覆する高硬度セラミックスの材質を適
宜選択することにより、目的元素の汚染を効果的に防止
することができる。By appropriately selecting the materials of the base materials 1 and 2 and the covering high-hardness ceramics, contamination of the target element can be effectively prevented.
［実施例Ｊ
ステンレスを基材とし、この表面にイオブレーティング
法により窒化チタンを数μ厘の厚さで被覆した試料粉砕
部を有する粉砕棒具を用い、高純度リン化ガリウム多結
晶を５分間粉砕し、粉砕粉中のけい素、はう素及び他の
数元素を高周波誘導汚染量を調べた。[Example J Using a crushing rod having a sample crushing part whose base material is stainless steel and whose surface is coated with titanium nitride to a thickness of several micrometers by the ioplating method, 50% of high-purity gallium phosphide polycrystals were crushed. The powder was ground for 1 minute, and the amount of radio frequency induced contamination of silicon, boron, and several other elements in the ground powder was examined.
その結果を他の材質より成る粉砕棒具と対比して第１表
に示す。The results are shown in Table 1 in comparison with crushing rods made of other materials.
第１表の結果より、本発明の粉砕棒具によれば、ビッカ
ーズ硬度、１５００８ｖ程度の高純度物質を粉砕する場
合、他の粉砕棒具で問題となるほう素、けい素の汚染、
及び亜鉛、カドミウムの汚染を試料粉１ｇあたり２μｇ
以下におさえられることがわかる。From the results in Table 1, it can be seen that according to the crushing rod of the present invention, when crushing high purity substances with a Vickers hardness of about 15008V, contamination of boron and silicon, which is a problem with other crushing rods, can be avoided.
and zinc and cadmium contamination at 2 μg per 1 g of sample powder.
You can see what can be found below.
［発明の効果］
本発明によれば、高純度材料を粉砕する場合、延材及び
高硬度セラミックスに含まれる元素以外の汚染を試料１
ｇあたり２μｇ以下におさえることができる。[Effects of the Invention] According to the present invention, when grinding high-purity materials, contamination other than elements contained in the rolled material and high-hardness ceramics is removed from sample 1.
It can be suppressed to 2 μg or less per gram.
また金属又は合金の表面を高硬度セラミックスで被覆す
ることにより、粉砕部表面の酸化腐食を防止することが
できる。Furthermore, by coating the surface of the metal or alloy with a high-hardness ceramic, oxidation corrosion on the surface of the crushed portion can be prevented.
第１図は、本発明による試料粉砕装置のルツボ粉砕能Ａ
及び粉砕某Ｂの断面図である。
１・・・ルツボ状粉砕部基材、２・・・粉砕棒基材、３
・・・窒化チタン層。Figure 1 shows the crucible crushing capacity A of the sample crushing device according to the present invention.
and a sectional view of a certain crushed B. 1... Crucible-shaped crushing part base material, 2... Grinding rod base material, 3
...Titanium nitride layer.
Claims (1)
以上の金属又は合金を基材とする試料粉砕器具のルツボ
状粉砕部及び粉砕棒の表面が物理蒸着法により高硬度セ
ラミックスで被覆されている試料粉砕器具。Vickers hardness is 200HV or more, softening point is 300℃
A sample crushing device whose crucible-shaped crushing portion and the surface of the crushing rod are coated with high-hardness ceramics by physical vapor deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19932389A JPH0365256A (en) | 1989-08-02 | 1989-08-02 | Specimen grinding tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19932389A JPH0365256A (en) | 1989-08-02 | 1989-08-02 | Specimen grinding tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0365256A true JPH0365256A (en) | 1991-03-20 |
Family
ID=16405887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19932389A Pending JPH0365256A (en) | 1989-08-02 | 1989-08-02 | Specimen grinding tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0365256A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8303799B2 (en) * | 2006-08-31 | 2012-11-06 | Fuji Jukogyo Kabushiki Kaisha | Process and apparatus for grinding with electrolytic dressing |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5815079A (en) * | 1981-07-14 | 1983-01-28 | 日本化学陶業株式会社 | Crusher member comprising zirconia sintered body |
| JPH01129958A (en) * | 1987-11-13 | 1989-05-23 | Babcock Hitachi Kk | Formation of titanium nitride film having high adhesive strength |
-
1989
- 1989-08-02 JP JP19932389A patent/JPH0365256A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5815079A (en) * | 1981-07-14 | 1983-01-28 | 日本化学陶業株式会社 | Crusher member comprising zirconia sintered body |
| JPH01129958A (en) * | 1987-11-13 | 1989-05-23 | Babcock Hitachi Kk | Formation of titanium nitride film having high adhesive strength |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8303799B2 (en) * | 2006-08-31 | 2012-11-06 | Fuji Jukogyo Kabushiki Kaisha | Process and apparatus for grinding with electrolytic dressing |
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