JPH0365248U - - Google Patents

Info

Publication number
JPH0365248U
JPH0365248U JP12803589U JP12803589U JPH0365248U JP H0365248 U JPH0365248 U JP H0365248U JP 12803589 U JP12803589 U JP 12803589U JP 12803589 U JP12803589 U JP 12803589U JP H0365248 U JPH0365248 U JP H0365248U
Authority
JP
Japan
Prior art keywords
wafer
carriers
carrier
elevators
pitches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12803589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12803589U priority Critical patent/JPH0365248U/ja
Publication of JPH0365248U publication Critical patent/JPH0365248U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP12803589U 1989-10-31 1989-10-31 Pending JPH0365248U (US08063081-20111122-C00115.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12803589U JPH0365248U (US08063081-20111122-C00115.png) 1989-10-31 1989-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12803589U JPH0365248U (US08063081-20111122-C00115.png) 1989-10-31 1989-10-31

Publications (1)

Publication Number Publication Date
JPH0365248U true JPH0365248U (US08063081-20111122-C00115.png) 1991-06-25

Family

ID=31675768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12803589U Pending JPH0365248U (US08063081-20111122-C00115.png) 1989-10-31 1989-10-31

Country Status (1)

Country Link
JP (1) JPH0365248U (US08063081-20111122-C00115.png)

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