JPH0364938U - - Google Patents

Info

Publication number
JPH0364938U
JPH0364938U JP12536089U JP12536089U JPH0364938U JP H0364938 U JPH0364938 U JP H0364938U JP 12536089 U JP12536089 U JP 12536089U JP 12536089 U JP12536089 U JP 12536089U JP H0364938 U JPH0364938 U JP H0364938U
Authority
JP
Japan
Prior art keywords
wafer
storage container
suction
suction part
support part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12536089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12536089U priority Critical patent/JPH0364938U/ja
Publication of JPH0364938U publication Critical patent/JPH0364938U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP12536089U 1989-10-26 1989-10-26 Pending JPH0364938U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12536089U JPH0364938U (US07923587-20110412-C00022.png) 1989-10-26 1989-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12536089U JPH0364938U (US07923587-20110412-C00022.png) 1989-10-26 1989-10-26

Publications (1)

Publication Number Publication Date
JPH0364938U true JPH0364938U (US07923587-20110412-C00022.png) 1991-06-25

Family

ID=31673234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12536089U Pending JPH0364938U (US07923587-20110412-C00022.png) 1989-10-26 1989-10-26

Country Status (1)

Country Link
JP (1) JPH0364938U (US07923587-20110412-C00022.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169144A (ja) * 1984-09-12 1986-04-09 Nec Corp ウエハプロ−バ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169144A (ja) * 1984-09-12 1986-04-09 Nec Corp ウエハプロ−バ

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