JPH036475A - Apparatus for measuring temperature characteristic of electronic circuit part - Google Patents

Abstract

PURPOSE:To always perform highly reliable measurement with respect to temp. characteristics by correcting the output of an electronic circuit part on the basis of the detection output of the thermocouple individually mounted to the electronic circuit part by a measuring tester. CONSTITUTION:The electric characteristics of the electronic circuit parts 6 (6a, 6b...) arranged within a thermostatic tank 2 are measured by the tester 12 outside the thermostatic tank 2. At this time, thermocouples 20 (20a, 20b...) are individually mounted to these parts 6 and a relay 28 selecting and detecting the electromotive forces of the thermocouples 20, a voltmeter 30 and a correction circuit 32 correcting the outputs of the parts 6 thereby are provided to the tester 12. Different atmospheric temps. are set to the thermostatic tank 2 and, with respect to respective cases, the outputs of the parts 6 and thermocouples 20 are selected by relays 16, 28 to be measured by voltmeters 18, 30. The circuit 32 corrects the outputs of the parts 6 on the basis of the measured values to calculate the value of output voltage in an objective value and, even when the atmospheric temp. of the thermostatic tank 2 is non-uniform, certain temp. compensation can be performed.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a temperature characteristic measuring device used when electronic circuit components such as semiconductor elements are placed in a constant temperature bath and their temperature characteristics are investigated.

<Prior Art> Generally, it is sometimes necessary to investigate the temperature characteristics of electronic circuit components such as semiconductor devices to find out whether temperature compensation can be performed reliably or not.

In such cases, a temperature characteristic measuring device shown in FIG. 2 is conventionally used. This device I. is equipped with a constant temperature bath 2,
A measurement board 4 is disposed inside the thermostatic chamber 2, and electronic circuit components 6a, 6b, etc. to be measured are mounted on the measurement board 4 and electrically connected to the measurement board 4. . The measurement board 4 is connected to a connector 8, a cable 10 is led out from the connector 8 to the outside of the thermostatic oven 2, and a tester 12 is connected to this cable 10. The tester 12 includes a connector 14 for connecting the cable 10, a relay for selecting and switching each electronic circuit component 6a, 6b, and each electronic circuit component 6a,
A voltmeter 18 and the like are provided to measure the output voltage of 6b and 6b.

Then, when the output of the electronic circuit component 6a is selected by the relay 16, the output from the electronic circuit component 6a sequentially passes through the connector 8, cable 10, connector 14, and relay I6 to the voltmeter 18. is applied and the output voltage is measured. In this way, by sequentially switching the relays 16-, the output voltages of the respective electronic circuit components 6a, 6b, . . . are measured, and the temperature characteristics are tested.

<Problem to be solved by the invention> However, in the conventional device 1 with the above configuration,
Even when the atmospheric temperature within the thermostatic chamber 2 reaches the target value and stabilizes, the temperature distribution inside the chamber 2 may be uneven.

Therefore, the actual temperature may differ from the target value depending on the position where the electronic circuit components 6a, 6b, .

<Means for Solving the Problems> The present invention has been made in view of the above circumstances, and it is possible to perform temperature compensation for each electronic circuit component even when the ambient temperature is uneven, thereby improving reliability. This makes it possible to always obtain high-quality measurement results.

Therefore, the present invention provides a temperature characteristic measuring device for electronic circuit components that includes a constant temperature bath and a tester that measures the electrical characteristics of electronic circuit components placed in the constant temperature bath outside the constant temperature bath. The following configuration is adopted.

That is, the temperature characteristic measuring device of the present invention is equipped with thermocouples that are individually attached to electronic circuit components, while the test is equipped with a thermocouple that measures the output of each electronic circuit component based on the detection output from each of these thermocouples. A correction circuit is provided for correction.

<Function> In the above configuration, the output from each electronic circuit component placed in the thermostatic oven and the detection output from the thermocouple individually attached to each electronic circuit component are simultaneously manually input to the tester. A correction circuit of the tester corrects the output of each electronic circuit component based on the detected output from each thermal lightning pair. Therefore, even if the actual temperature of the electronic circuit component differs from the target value due to non-uniform ambient temperature in the constant temperature oven, temperature compensation is reliably performed.

<Example> Fig. 1 is a configuration diagram of a temperature characteristic measuring device for electronic circuit components according to an embodiment of the present invention, and parts corresponding to the conventional example shown in Fig. 2 are not designated by the same reference numerals. .

In FIG. 1, reference numeral I indicates the entire temperature characteristic testing device, 2 is a constant temperature chamber, 4 is a measurement board placed in the constant temperature chamber 2, and 6a to 6n are electronic circuit components mounted on the measurement board 4. (For example, a semiconductor element for a pressure sensor), 8 is a connector for connecting the measurement board 4, 10 is each cable drawn out from the inside of the thermostatic chamber 2, I2 is a tester, 14 is a connector for connecting the cable 10, 16a to 16n are relays 1 for selectively connecting each electronic circuit component 6a to 6n.
Reference numeral 8 denotes a voltmeter for measuring the output voltage of each electronic circuit component 6a to 6n, and the configuration thereof is the same as that of the conventional example shown in FIG.

Furthermore, in this embodiment, each electronic circuit component 6a, 6b,
Thermocouples 20a, 20b, . . . are individually attached to the connector 22.
This connector 22 is connected to a connector 26 of the tester 12 via a cable 24. and,
The tester 12 includes a relay 30 that selectively connects the output of the connector 26, and thermocouples 20a and 2 selected by this relay 30.
A voltmeter 30 is connected to detect the electromotive force of 0b, . Furthermore, this tester! 2 has a thermocouple 20a, 2
0b.

・Each electronic circuit component 6a, 6b based on the detection output from
, . . . A correction circuit 32 is provided to correct the outputs of . This correction circuit 32 includes, for example, the electronic circuit component 6a.
, 6b,... and the thermocouples 20a120b1...
A memory that stores the outputs of each electronic circuit component 6a, 6b, . . . based on the data stored in this memory.
It is configured to include an arithmetic circuit (all not shown) that calculates the temperature-corrected result of ., and a microcomputer or the like can be applied.

In the configuration described above, when investigating the temperature characteristics of the electronic circuit components 6a to 6n placed in the thermostatic oven 2, connect each part as shown in FIG. Set to value. Then, when the ambient temperature of the thermostatic chamber 2 reaches the target value, the test is started.

When the test is started, each relay 16 of the tester 12 selects the output of one electronic circuit component, for example, 6a, and at the same time the output of the thermocouple 20a corresponding to this electronic circuit component 6a is selected.
The output of is selected by relay 28. This results in
The output from one electronic circuit component 6a and the detection output from the thermocouple 20a connected to this electronic circuit component 6a are simultaneously input to the test 12.Then, each detection output is input to the voltmeter 18. After being measured at 30, it is sent to a correction circuit 32 and stored in a memory.In this way, by sequentially switching the relays 16, 28, each electronic circuit component 6a, 6b, and its corresponding thermocouple 20a
% 20b,... is stored in the memory of the tester 12, then after resetting the ambient temperature of the thermostatic chamber 2 to a different target value, each electronic circuit is Components 6a, 6b, and corresponding thermocouples 20a, 2
Detection outputs from 0b1... are stored in the memory of tester I2. In this way, multiple pieces of data are collected under different temperature conditions.

Electronic circuit components 6a and 6b made of semiconductor elements and the like.

... usually exhibits linear temperature characteristics with respect to temperature changes. Therefore, the electronic circuit component 6a is measured by measuring the electromotive force of the thermocouples 20a, 20b, .

6b, . . . and the output voltages of the electronic circuit components 6a, 6b, . . . at that time are obtained, the output voltage at the target temperature can be determined. For this reason, the correction circuit 32 controls each thermocouple 20a, 20b,...
The value of the output voltage at the target value is calculated based on the detection output from . . . and the output voltage of each electronic circuit component 6a, 6b, . .

Therefore, even if the actual temperature of the electronic circuit components 6a, 6b, .

<Effects of the Invention> According to the present invention, temperature compensation can be performed based on temperature information from thermocouples attached to each electronic circuit component even when the ambient temperature is uneven, so temperature characteristics are always reliable. Excellent effects such as the ability to obtain highly accurate measurement results are exhibited.

[Brief explanation of drawings]

FIG. 1 is a block diagram of an apparatus for inspecting temperature characteristics of electronic circuit components according to an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional apparatus for measuring temperature characteristics of electronic circuit components. DESCRIPTION OF SYMBOLS 1... Temperature measuring device for electronic circuit components, 2... Constant temperature chamber, 6 a, 6 b, = Electronic circuit components, 12 Tester, 20a, 20b,... Thermocouple, 32... Correction circuit .

Claims (1)

[Claims] (1) An apparatus for measuring temperature characteristics of electronic circuit components, comprising a constant temperature chamber and a tester for measuring the electrical characteristics of electronic circuit components placed in the constant temperature chamber outside the constant temperature chamber, An electronic circuit component characterized in that the tester is provided with a correction circuit that corrects the output of each of the electronic circuit components based on the detection output from each of these thermocouples. Temperature characteristics measuring device.