JPH0364103A - Manufacture of dielectric coaxial resonator - Google Patents
Manufacture of dielectric coaxial resonatorInfo
- Publication number
- JPH0364103A JPH0364103A JP19993889A JP19993889A JPH0364103A JP H0364103 A JPH0364103 A JP H0364103A JP 19993889 A JP19993889 A JP 19993889A JP 19993889 A JP19993889 A JP 19993889A JP H0364103 A JPH0364103 A JP H0364103A
- Authority
- JP
- Japan
- Prior art keywords
- electrode film
- dielectric block
- dielectric
- coaxial resonator
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 claims description 8
- 239000004020 conductor Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 101000740462 Escherichia coli Beta-lactamase TEM Proteins 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
Landscapes
- Control Of Motors That Do Not Use Commutators (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、主としてフィルタ装置などに使用される誘電
体同軸共振器の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a dielectric coaxial resonator mainly used in filter devices and the like.
（従来の技術）
例えばＴ Ｅ Ｍ １／４波長型の誘電体同軸共振器と
しては、第５図（ａ）に斜視図で、第５図（ｂ）に断面
図でそれぞれ示すように軸方向の貫通孔３０を有する円
筒型の誘電体ブロック３１の外周面３２と貫通孔３０の
内周面３３とのそれぞれに外導体３４と内導体３５とな
る電極膜ｈｔ形形成れ、誘電体ブロック３１の短絡端面
３６においては前記両導体３４．３５が接続されである
一方、開放端面３７には電極膜が形成されていない構造
となっているものがある。(Prior Art) For example, a T E M 1/4 wavelength type dielectric coaxial resonator has an axial direction as shown in a perspective view in Fig. 5(a) and a sectional view in Fig. 5(b). Electrode films HT-shaped to become an outer conductor 34 and an inner conductor 35 are formed on the outer circumferential surface 32 of a cylindrical dielectric block 31 having a through hole 30 and on the inner circumferential surface 33 of the through hole 30, respectively. In some cases, the conductors 34 and 35 are connected at the short-circuited end surface 36 of the structure, while the open end surface 37 has no electrode film formed thereon.
そして、このような構造の誘電体同軸共振器においては
その共振周波数が製造当初の段階から正確に設定される
ように製造することは難しく、そのため、共振周波数を
微妙に所望の共振周波数に凋整して製造する必要がある
が、そのための１つの製造方法として例えば開放端面３
７上に共振周波数調整用としての電極３８をあらかじめ
形成しておいて、その共振周波数の調整値に応じて電極
３８を削ってい（ようにしたものがある。It is difficult to manufacture a dielectric coaxial resonator with such a structure so that its resonant frequency is set accurately from the initial manufacturing stage, so the resonant frequency must be finely adjusted to the desired resonant frequency. However, one manufacturing method for this purpose is, for example, the open end surface 3.
There is one in which an electrode 38 for adjusting the resonant frequency is formed in advance on the resonant frequency 7, and the electrode 38 is shaved according to the adjusted value of the resonant frequency.
（発明が解決しようとする課題）
しかしながら、あらかじめ電極３８を開放端面３７上に
形成するとしても電極３８の形成位置とか大きさに既に
バラツキが生じていて、共振周波数の調整の前段階で既
に共振周波数にバラツキがあり、その結果、電極３８の
削り取り程度では当初からバラツキがある共振周波数を
調整できないことがある。また、電極３８の削り取りの
コントロールも難しいので共振周波数の調整に時間が長
くかかり量産性に乏しくなる。(Problem to be Solved by the Invention) However, even if the electrodes 38 are formed on the open end surface 37 in advance, there are already variations in the formation position and size of the electrodes 38, and resonance may already occur before adjusting the resonance frequency. There are variations in frequency, and as a result, it may not be possible to adjust the resonance frequency, which varies from the beginning, by simply scraping off the electrode 38. Furthermore, since it is difficult to control the scraping of the electrode 38, it takes a long time to adjust the resonance frequency, resulting in poor mass productivity.
本発明は、上記課題に鑑みてなされたものであって、共
振周波数を正確にかつ量産性よく調整できようにするこ
とを目′的としている。The present invention has been made in view of the above-mentioned problems, and it is an object of the present invention to enable the resonance frequency to be adjusted accurately and with good mass productivity.
（課題を解決するための手段）
このような目的を達成するために、本発明の誘電体同軸
共振器の製造方法においては、軸方向の貫通孔を有する
誘電体ブロックの内外面に電極膜を形成する工程と、そ
の誘電体ブロックの開放端面上においてその貫通孔を円
中心とする２つの同心円に囲まれる領域を電極膜除去領
域として、その電極膜除去領域を当該誘電体同軸共振器
の共振周波数の調整値に応じて設定する工程と、その設
定に応じてその電極膜除去領域内の電極膜を除去する工
程とを含むことを特徴としている。(Means for Solving the Problems) In order to achieve such an object, in the method for manufacturing a dielectric coaxial resonator of the present invention, electrode films are formed on the inner and outer surfaces of a dielectric block having an axial through hole. A region surrounded by two concentric circles with the through hole as the center on the open end face of the dielectric block is defined as an electrode film removal region, and the region from which the electrode film is removed is used as the resonance of the dielectric coaxial resonator. The method is characterized in that it includes a step of setting the frequency according to the adjustment value, and a step of removing the electrode film in the electrode film removal area according to the setting.
（作用）
軸方向の貫通孔を有する誘電体ブロックの内外面に電極
膜を形成することでその誘電体ブロックの開放端面にも
電極膜を形成する。そして、その誘電体ブロックの開放
端面上においてその貫通孔を円中心とする２つの同心円
に囲まれる領域を電極膜除去領域として、その電極膜除
去領域を当該誘電体同軸共振器の共振周波数の調整値に
応じて設定し、その設定に応じてその電極膜除去領域内
の電極膜を除去していくことで共振周波数の調整を行う
。(Function) By forming an electrode film on the inner and outer surfaces of a dielectric block having an axial through hole, an electrode film is also formed on the open end surface of the dielectric block. Then, on the open end surface of the dielectric block, a region surrounded by two concentric circles with the through hole as the center is defined as an electrode film removal region, and the region from which the electrode film is removed is used to adjust the resonant frequency of the dielectric coaxial resonator. The resonant frequency is adjusted by setting according to the value and removing the electrode film within the electrode film removal area according to the setting.
（実施例）
以下、本発明の実施例に係る誘電体同軸共振器（ただし
、本実施例では一例としてＴ Ｅ Ｍ−１／４波長型の
ものに適用している。）の製造方法を第１図ないし第４
図を参照して詳細に説明する。(Example) Hereinafter, a method for manufacturing a dielectric coaxial resonator according to an example of the present invention (however, in this example, a TEM-1/4 wavelength type one is applied as an example) will be described. Figures 1 to 4
This will be explained in detail with reference to the drawings.
まず、第１図（ａ）に斜視図で、第１図（ｂ）に断面図
でそれぞれ示すように軸方向の貫通孔ｌを有するセラミ
ックからなる円筒型の誘電体ブロック２を用意する。つ
いで、第２図（ａ）に斜視図で、第２図（ｂ）に断面図
でそれぞれ示すように、誘電体ブロック２の外周面３と
貫通孔ｌの内周面４とのそれぞれに銀とか銅などの金属
からなる電極膜５を焼き付けまたはメツキなどの公知の
手法で形成する。この電極膜５の形成ののち、第３図に
斜視図で示すように誘電体ブロック２の開放端面６上に
おいてその貫通孔ｌの径方向中心を円中心０とする２つ
の同心円（仮想線＆１、Ｑ２で示される）で囲まれる領
域を電極膜除去領域Ｓとして、その電極膜除去領域Ｓを
当該誘電体同軸共振器の共振周波数の調整値に応じて設
定する。そして、その電極膜除去領域Ｓの上方に電極膜
除去装置としてのレーザ装置のレーザ光発射口７を下方
に向けて位置させるとともに、その誘電体ブロック２を
上記中心０を通る中心軸線Ｑ３回りに回転させながら、
そのレーザ装置の発射口７からレーザ光を照射しつつそ
れを矢印り方向に移動させることでその電極膜除去領域
Ｓ内の電極膜３をトリミング除去する。これにより、誘
電体ブロック２における上記電極膜除去領域Ｓにある電
極膜５を除去した結果、第４図（’ ａ ）に斜視図で
、第４図（ｂ）に断面図でそれぞれ示すような誘電体同
軸共振器８が得られる。つまり、この誘電体同軸共振器
８の製造に当たっては電極膜除去領域Ｓを小さく設定し
て電極１膜を小さく除去し、それで誘電体同軸共振器８
の初期の共振周波数を得る。ついで、その共麺周波数が
所望の共振周波数でないときはそれを調整するのである
が、その調整はその電極膜除去領域Ｓを徐々に大きくす
るように電極膜をトリミング除去していくとよい。これ
により、共振周波数の調整を正確にかつ容易に行うこと
ができる。First, as shown in a perspective view in FIG. 1(a) and in a cross-sectional view in FIG. 1(b), a cylindrical dielectric block 2 made of ceramic and having an axial through hole 1 is prepared. Next, as shown in a perspective view in FIG. 2(a) and in a cross-sectional view in FIG. The electrode film 5 made of a metal such as copper is formed by a known method such as baking or plating. After the formation of the electrode film 5, two concentric circles (virtual line &1 , Q2) is defined as an electrode film removal region S, and the electrode film removal region S is set according to the adjustment value of the resonant frequency of the dielectric coaxial resonator. Then, the laser beam emitting port 7 of the laser device serving as the electrode film removing device is positioned above the electrode film removal region S with the laser beam emitting port 7 facing downward, and the dielectric block 2 is rotated around the central axis Q3 passing through the center 0. While rotating
The electrode film 3 within the electrode film removal area S is trimmed and removed by irradiating a laser beam from the emission port 7 of the laser device and moving it in the direction of the arrow. As a result of removing the electrode film 5 in the electrode film removal area S of the dielectric block 2, the result is as shown in FIG. 4('a) in a perspective view and in FIG. 4(b) in a cross-sectional view. A dielectric coaxial resonator 8 is obtained. That is, in manufacturing this dielectric coaxial resonator 8, the electrode film removal area S is set small to remove the electrode 1 film to a small size, and then the dielectric coaxial resonator 8
Obtain the initial resonant frequency of . Next, if the common noodle frequency is not the desired resonance frequency, it is adjusted, and the adjustment is preferably carried out by trimming and removing the electrode film so as to gradually enlarge the electrode film removal area S. Thereby, the resonance frequency can be adjusted accurately and easily.
なお、電極膜除去装置としては上記のようなレーザ光の
照射によるトリミング法以外にサンドブラスト法とかそ
の他のものでもよい。また、上記実施例では電極膜の除
去のために誘電体ブロックを回転させたが、誘電体ブロ
ックを回転させず除表装置の方４回転させてらよい。Note that as the electrode film removing device, other methods such as a sandblasting method may be used in addition to the above-mentioned trimming method using laser light irradiation. Further, in the above embodiment, the dielectric block was rotated to remove the electrode film, but instead of rotating the dielectric block, the removal device may be rotated four times.
（発明の効果）
以上説明したことから明らかなように本発明によれば、
誘電体ブロックの貫通孔を円中心とする２つの同心円に
囲まれである領域を電極膜除去領域とし、誘電体ブロッ
クの貫通孔を回転中心として誘電体ブロックまたは適宜
の除去装置を相対回転させながら、その除去装置でもっ
て電極膜を除去するようにしたから、その電極膜をきわ
めて正確に除去することができる。そして電極膜除去領
域の当初の大きさを小さく設定して初期の共振周波数の
バラツキを小さく抑えておいたうえで、その電極膜除去
領域の大きさを徐々に大きくしていくことだけで正確に
かつ容易にその共振周波数の調整値に合わせて電極膜を
除去することができることになり、量産性に優れた製造
方法となる。(Effects of the Invention) As is clear from the above explanation, according to the present invention,
The area surrounded by two concentric circles with the through hole of the dielectric block as the center is defined as the electrode film removal area, and while the dielectric block or an appropriate removal device is relatively rotated around the through hole of the dielectric block as the center of rotation. Since the electrode film is removed using the removing device, the electrode film can be removed very accurately. Then, by setting the initial size of the electrode film removal area small to suppress the initial variation in the resonance frequency, and then gradually increasing the size of the electrode film removal area, it is possible to accurately Moreover, the electrode film can be easily removed in accordance with the adjusted value of the resonance frequency, resulting in a manufacturing method with excellent mass productivity.
第１図ないし第４図は本発明の製造方法の説明にかかわ
る図であって、第１図（ａ）は誘電体ブロックの斜視図
、第１図（ｂ）は第１図（ａ）の１−１線に／Ｇう断面
図、第２図（’ ａ ）は電極膜が形成された誘電体ブ
ロックの斜視図、第２図（ｂ）よ第２図（ａ）の■−■
線に沿う断面図、第３図は誘電体ブロックの開放端面上
にある電極膜の除去領域の設定の説明に供する誘電体ブ
ロックの斜視図、第４図（ａ）は開放端面上にある電極
膜が除去されることで製造された本実施例に係る誘電体
同軸共振器の斜視図、第４図（ｂ）は第４図（ａ）のＩ
Ｖ−ＩＶ線に沿う断面図である。
第５図（ａ）は従来例の製造方広により製造された誘電
体同軸共振器の斜視図、第５図（ｂ）は第５図（ａ）の
Ｖ−■線に沿う断面図である。
ｌ・・・貫通孔、２・・誘電体ブロック、３・・外周面
、４・・貫通孔の内角面、５・・電極膜、６・・・開放
端面、７・・レーザ装置の発射口、Ｒ１，＋２２・・・
電極膜除去領域を規定する同心円、Ｓ・・・電極膜除去
領域。1 to 4 are views related to the explanation of the manufacturing method of the present invention, in which FIG. 1(a) is a perspective view of the dielectric block, and FIG. 1(b) is the same as that of FIG. 1(a). Figure 2 ('a) is a perspective view of the dielectric block on which the electrode film is formed, Figure 2 (b) is a cross-sectional view taken along line 1-1,
3 is a perspective view of the dielectric block for explaining the setting of the removal area of the electrode film on the open end surface of the dielectric block, and FIG. 4(a) is a cross-sectional view taken along the line, and FIG. A perspective view of the dielectric coaxial resonator according to this example manufactured by removing the film, FIG. 4(b) is the same as I in FIG. 4(a).
It is a sectional view along the V-IV line. FIG. 5(a) is a perspective view of a dielectric coaxial resonator manufactured by the conventional manufacturing method, and FIG. 5(b) is a sectional view taken along the line V-■ in FIG. 5(a). . l...Through hole, 2...Dielectric block, 3...Outer peripheral surface, 4...Inner corner surface of through hole, 5...Electrode film, 6...Open end surface, 7...Emission port of laser device , R1, +22...
Concentric circles defining the electrode film removal area, S...electrode film removal area.
Claims (1)
外面に電極膜を形成する工程と、 その誘電体ブロックの開放端面上においてその貫通孔を
円中心とする２つの同心円に囲まれる領域を電極膜除去
領域として、その電極膜除去領域を当該誘電体同軸共振
器の共振周波数の調整値に応じて設定する工程と、 その設定に応じてその電極膜除去領域内の電極膜を除去
する工程と、 を含むことを特徴とする誘電体同軸共振器の製造方法。(1) A step of forming electrode films on the inner and outer surfaces of a dielectric block having an axial through hole, and forming an area on the open end surface of the dielectric block surrounded by two concentric circles with the through hole as the center. A step of setting the electrode film removal region as an electrode film removal region according to an adjustment value of the resonant frequency of the dielectric coaxial resonator, and a step of removing the electrode film in the electrode film removal region according to the setting. A method for manufacturing a dielectric coaxial resonator, comprising the steps of:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19993889A JPH0364103A (en) | 1989-07-31 | 1989-07-31 | Manufacture of dielectric coaxial resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19993889A JPH0364103A (en) | 1989-07-31 | 1989-07-31 | Manufacture of dielectric coaxial resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0364103A true JPH0364103A (en) | 1991-03-19 |
Family
ID=16416092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19993889A Pending JPH0364103A (en) | 1989-07-31 | 1989-07-31 | Manufacture of dielectric coaxial resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0364103A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002291828A (en) * | 2001-03-29 | 2002-10-08 | Nihon Medix | Bed type massage therapeutic apparatus |
-
1989
- 1989-07-31 JP JP19993889A patent/JPH0364103A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002291828A (en) * | 2001-03-29 | 2002-10-08 | Nihon Medix | Bed type massage therapeutic apparatus |
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