JPH0363928U - - Google Patents

Info

Publication number

JPH0363928U

JPH0363928U JP12635789U JP12635789U JPH0363928U JP H0363928 U JPH0363928 U JP H0363928U JP 12635789 U JP12635789 U JP 12635789U JP 12635789 U JP12635789 U JP 12635789U JP H0363928 U JPH0363928 U JP H0363928U

Authority

JP

Japan

Prior art keywords

hole

sealed space

mask

exposure

wall

Prior art date

1989-10-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001179 sorption measurement Methods 0.000 claims description 2
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 6
• 229910052757 nitrogen Inorganic materials 0.000 claims 3
• 238000007664 blowing Methods 0.000 claims 1
• 239000007921 spray Substances 0.000 claims 1

Cited By (1)