JPH0363927U - - Google Patents
Info
- Publication number
- JPH0363927U JPH0363927U JP12507689U JP12507689U JPH0363927U JP H0363927 U JPH0363927 U JP H0363927U JP 12507689 U JP12507689 U JP 12507689U JP 12507689 U JP12507689 U JP 12507689U JP H0363927 U JPH0363927 U JP H0363927U
- Authority
- JP
- Japan
- Prior art keywords
- overlay mark
- utility
- circular shape
- model registration
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12507689U JPH0363927U (cs) | 1989-10-27 | 1989-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12507689U JPH0363927U (cs) | 1989-10-27 | 1989-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0363927U true JPH0363927U (cs) | 1991-06-21 |
Family
ID=31672962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12507689U Pending JPH0363927U (cs) | 1989-10-27 | 1989-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0363927U (cs) |
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1989
- 1989-10-27 JP JP12507689U patent/JPH0363927U/ja active Pending