JPH0363072U

JPH0363072U -

Info

Publication number: JPH0363072U
Application number: JP12111389U
Authority: JP
Priority date: 1989-10-16
Filing date: 1989-10-16
Publication date: 1991-06-20

Description

[Brief explanation of drawings]

第１図は本考案の実施例を示す正断面図、第２
図は第１図に示した−断面に沿う平面図、第
３図は第１図に示した−断面に沿う側断面図
、第４図は他の第１の実施例を示す正断面図、第
５図は他の第２の実施例を示す側断面図、第６図
は他の第３の実施例を示す側断面図、第７図は第
６図に示す−断面に沿う平断面図である
。１……固定子、１１，１１′……ヨーク、１２
，１２′，１３，１３′……永久磁石、２……可
動子、２１……コイル枠、２２……コイル、２３
……支持部、２４……挿入穴、２５，２５′……
フランジ部、２６……中空部、３，３′……静圧
空気軸受、３１，４１……噴気口部、３２，４２
……空気溜り、３３，４３……空気ガイド、３４
，４４，５１……噴出孔、４，４′……側板、５
……噴気口部。 Fig. 1 is a front sectional view showing an embodiment of the present invention, Fig. 2 is a front sectional view showing an embodiment of the present invention;
The figures are a plan view along the section shown in FIG. 1, FIG. 3 is a side sectional view along the section shown in FIG. 1, and FIG. 4 is a front sectional view showing another first embodiment. Fig. 5 is a side sectional view showing another second embodiment, Fig. 6 is a side sectional view showing another third embodiment, and Fig. 7 is a plan sectional view along the cross section shown in Fig. 6. It is. 1... Stator, 11, 11'... Yoke, 12
, 12', 13, 13'...Permanent magnet, 2...Mover, 21...Coil frame, 22...Coil, 23
...Support part, 24...Insertion hole, 25, 25'...
Flange part, 26...Hollow part, 3, 3'...Static pressure air bearing, 31, 41...Blow nozzle part, 32, 42
...Air pocket, 33,43...Air guide, 34
, 44, 51...Blowout hole, 4, 4'...Side plate, 5
... Fumarole part.

Claims

[Claims for Utility Model Registration] 1. A mover in which coils wound with concentrated winding are arranged in a flat plate shape, and a stator in which magnetic poles made of permanent magnets are arranged on both sides of the mover so as to face each other with an air gap interposed therebetween. A linear motor comprising: a movable element in which the coil is wound around a flat coil frame made of a non-magnetic material and fixed to a flat support part made of a non-magnetic material; and a movable element facing the surface of the movable element. 1. A linear motor comprising: a stator provided with a blowhole portion having a large number of blowholes; 2. Claim 1, wherein the blowhole portions provided on the stator are provided facing four sides along the moving direction of the mover.
Linear motor as described. 3. The linear motor according to claim 1 or 2, wherein the blowhole portion provided on the stator is made of a porous member. 4. The linear motor according to any one of claims 1 to 3, wherein flange portions extending perpendicularly to the surface facing the permanent magnet are provided on both side surfaces of the support portion. 5. According to any one of claims 1 to 4, wherein a hollow part consisting of a square hole is formed in the center of the coil frame, and a blowhole part facing the side surface of the hollow part is provided upright from the stator. Linear motor as described.