JPH036175U

JPH036175U -

Info

Publication number: JPH036175U
Application number: JP6686389U
Authority: JP
Priority date: 1989-06-08
Filing date: 1989-06-08
Publication date: 1991-01-22

Description

[Brief explanation of the drawing]

第１図はこの考案の第１の実施例の縦断面図、
第２図は同じく全閉状態の一部断面図、第３図は
同じく全開状態の一部断面図、第４図はこの考案
の第２の実施例の縦断面図、第５図はこの考案の
第３の実施例の縦断面図、第６図はこの考案の第
３の実施例の縦断面図である。１……弁体、２，２ａ……補助弁体、４……弁
座、６……駆動軸、７……止金、８，８ａ……反
撥スプリング、９……オリフイス孔、１５，１５
ａ……間〓、１６……凹入部、１７……凸出部。 FIG. 1 is a longitudinal sectional view of the first embodiment of this invention;
Fig. 2 is a partial sectional view of the fully closed state, Fig. 3 is a partial sectional view of the fully open state, Fig. 4 is a vertical sectional view of the second embodiment of this invention, and Fig. 5 is a partial sectional view of the invention. FIG. 6 is a longitudinal sectional view of the third embodiment of this invention. 1... Valve body, 2, 2a... Auxiliary valve body, 4... Valve seat, 6... Drive shaft, 7... Stop, 8, 8a... Repulsion spring, 9... Orifice hole, 15, 15
a... Interval, 16... Concave portion, 17... Convex portion.

Claims

[Claims for Utility Model Registration] 1. In an L-shaped vacuum valve in which a valve body is removably installed facing a valve seat provided in an L-shaped passage, a drive shaft that supports the valve body; An auxiliary valve body is provided in the middle portion so as to be separably opposed to the valve body, a repulsion spring is installed between the valve body and the auxiliary valve body, and an orifice hole is bored in the valve body. This is an L-type valve for vacuum use. 2. Claim 1, wherein there are two or more auxiliary valve bodies, which can be moved into and out of contact with each other, and a repulsion spring is installed between each auxiliary valve body, and an orifice hole is also bored in the intermediate auxiliary valve body. The vacuum L-type valve described. 3. The L-shaped vacuum valve according to claim 1 or 2, wherein the facing surfaces of the valve body and the auxiliary valve body or the mutually facing surfaces of the auxiliary valve bodies are conical.