JPH0361180U

JPH0361180U -

Info

Publication number: JPH0361180U
Application number: JP12149089U
Authority: JP
Priority date: 1989-10-17
Filing date: 1989-10-17
Publication date: 1991-06-14

Description

[Brief explanation of the drawing]

第１図はこの考案の第１実施例の全体的な構成
を示す図、第２図は同実施例におけるポンプ室お
よびその周辺部の構成を拡大して示す図、第３図
は同実施例におけるリード線接続部分の構成を拡
大して示す図、第４図は同実施例におけるバイモ
ルフ振動子を上方から見た図、第５図は同実施例
の制御回路の構成を示す図、第６図は第５図の変
形例の構成を示す図、第７図はこの考案の第２実
施例におけるポンプ室およびその周辺部の構成を
拡大して示す図、第８図は同実施例におけるリー
ド線接続部分の構成を拡大して示す図、第９図は
同実施例におけるバイモルフ振動子を上方から見
た図、第１０図はこの考案の第３実施例における
ポンプ室およびその周辺部の構成を拡大して示す
図、第１１図は同実施例におけるリード線接続部
分の構成を拡大して示す図、第１２図は同実施例
におけるバイモルフ振動子を上方から見た図であ
る。１…バイモルフポンプ本体、４…ポンプ室、７
…バイモルフ振動子、７ａ…シム、７ｂ，７ｂ…
圧電セラミツク、７ｃ…電極、８…リード線（配
線部材）、１０…貫通孔。 Figure 1 is a diagram showing the overall configuration of the first embodiment of this invention, Figure 2 is an enlarged view of the configuration of the pump chamber and its surroundings in the same embodiment, and Figure 3 is the same embodiment. FIG. 4 is an enlarged view of the structure of the lead wire connection part in the same embodiment, FIG. 4 is a view from above of the bimorph resonator in the same embodiment, FIG. The figure shows the configuration of a modified example of FIG. 5, FIG. 7 is an enlarged view of the configuration of the pump chamber and its surroundings in a second embodiment of this invention, and FIG. 8 shows the lead in the same embodiment. An enlarged view showing the structure of the line connection part, FIG. 9 is a view from above of the bimorph resonator in the same embodiment, and FIG. 10 is the structure of the pump chamber and its surrounding area in the third embodiment of this invention. FIG. 11 is an enlarged view of the configuration of the lead wire connection portion in the same embodiment, and FIG. 12 is a view of the bimorph vibrator in the same embodiment as seen from above. 1... Bimorph pump body, 4... Pump chamber, 7
...Bimorph resonator, 7a...Shim, 7b, 7b...
Piezoelectric ceramic, 7c... Electrode, 8... Lead wire (wiring member), 10... Through hole.

Claims

[Scope of utility model registration request]

A pair of piezoelectric ceramics are bonded together with a shim in between, electrodes are provided on the outer surface of each piezoelectric ceramic, and a bimorph vibrator is provided with the shim serving as a common electrode, and at least one surface of the pump chamber is formed by this bimorph vibrator. In the bimorph pump, a through hole is formed in the bimorph vibrator, and a plurality of wiring members are provided which are connected to the electrodes and shims of each of the piezoelectric ceramics and apply a driving voltage to each piezoelectric ceramic, and among these wiring members, the A bimorph pump characterized in that a wiring member connected to the electrode of the piezoelectric ceramic on the side facing the pump chamber is led out through the through hole.