JPH0360469A - Production of ceramic substrate - Google Patents
Production of ceramic substrateInfo
- Publication number
- JPH0360469A JPH0360469A JP19162089A JP19162089A JPH0360469A JP H0360469 A JPH0360469 A JP H0360469A JP 19162089 A JP19162089 A JP 19162089A JP 19162089 A JP19162089 A JP 19162089A JP H0360469 A JPH0360469 A JP H0360469A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- ceramic
- setter
- green sheets
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 36
- 239000000758 substrate Substances 0.000 title abstract description 23
- 238000004519 manufacturing process Methods 0.000 title description 10
- 239000000843 powder Substances 0.000 claims abstract description 25
- 238000010304 firing Methods 0.000 claims description 16
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 11
- 238000002347 injection Methods 0.000 abstract 5
- 239000007924 injection Substances 0.000 abstract 5
- 238000001354 calcination Methods 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 description 12
- 239000006082 mold release agent Substances 0.000 description 9
- 239000007921 spray Substances 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920000609 methyl cellulose Polymers 0.000 description 2
- 239000001923 methylcellulose Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000454 talc Substances 0.000 description 2
- 229910052623 talc Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001868 water Inorganic materials 0.000 description 2
- LNAZSHAWQACDHT-XIYTZBAFSA-N (2r,3r,4s,5r,6s)-4,5-dimethoxy-2-(methoxymethyl)-3-[(2s,3r,4s,5r,6r)-3,4,5-trimethoxy-6-(methoxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6r)-4,5,6-trimethoxy-2-(methoxymethyl)oxan-3-yl]oxyoxane Chemical compound CO[C@@H]1[C@@H](OC)[C@H](OC)[C@@H](COC)O[C@H]1O[C@H]1[C@H](OC)[C@@H](OC)[C@H](O[C@H]2[C@@H]([C@@H](OC)[C@H](OC)O[C@@H]2COC)OC)O[C@@H]1COC LNAZSHAWQACDHT-XIYTZBAFSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、セラミック基板の製造方法に関するもので
ある。さらに詳しくは、この発明は、電気・電子部品等
としてのセラミック基板を、焼成による寸法のバラツキ
や反りの発生がなく、高品質でしかも優れた生産性で！
！！遺することのできる新しい方法に関するものである
。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method of manufacturing a ceramic substrate. More specifically, this invention allows ceramic substrates used as electrical/electronic components to be produced without dimensional variations or warping due to firing, with high quality, and with excellent productivity!
! ! It is about new ways of leaving a legacy.
（従来の技術）
従来より、耐然性に潰れた電気・電子部品用等の基板と
してセラミックが注目されており、通常、このセラミッ
ク基板は、アルミナ質、マグネシア質、珪石質、窒化質
等のセラミックの粉末を、メチルセルロース、グリセリ
ン、酢酸ビニル等のバインダーや、タルク、カルシウム
、イツトリウム等の焼結助剤および水と、ニーグー、ブ
レングーあるいはロール等によって混合・混練した後に
押出機によって連続シートの形状に押出成形し、これを
所要形状に打抜加工してグリーンシートとし、これを焼
成して製造している。(Prior art) Ceramics have been attracting attention as substrates for electrical and electronic components due to their poor durability, and these ceramic substrates are usually made of materials such as alumina, magnesia, silica, and nitride. Ceramic powder is mixed and kneaded with binders such as methylcellulose, glycerin, and vinyl acetate, sintering aids such as talc, calcium, and yttrium, and water using a niegu, brengoo, or roll, and then shaped into a continuous sheet using an extruder. It is manufactured by extrusion molding, punching it into the desired shape to make a green sheet, and firing it.
この際の焼成は、たとえばアルミナ製等の画然性のセッ
ターの上に１０〜２０枚程度の所要枚数のセラミックグ
リーンシートを積重ね、しかもこのセラミックグリーン
シートの相互の間、およびグリーンシートとセッターと
の間に離型剤を介在させて行っている。In this firing process, the required number of ceramic green sheets (about 10 to 20) are stacked on top of a setter made of alumina or the like, and between the ceramic green sheets and between the green sheets and the setter. This is done by interposing a mold release agent between them.
その際の温度としては、アルミナ質セラミックの場合に
は徐々に昇温して約１５７０°Ｃ程度にまで昇温する。In the case of alumina ceramic, the temperature at this time is gradually raised to about 1570°C.
その後降温し、焼成品としてのセラミック基板の表面と
、あらかじめ形成しておいたスルホールがある場合には
その穴内の離型剤を除去して製品セラミック基板を得て
いる。Thereafter, the temperature is lowered, and the surface of the ceramic substrate as a fired product and the mold release agent in the through holes formed in advance, if any, are removed to obtain a product ceramic substrate.
このような従来の方法においては、アルミナ粉をバイン
ダーで結合し、焼成時にバインダーが焼失、もしくは揮
発してアルミナ粉だけが残るようにしたセパレーターシ
ートを離型剤として用いるか、あるいはアルミナ粉をと
り粉的に離型剤として用いてきている。In such conventional methods, alumina powder is bound with a binder and the binder burns out or evaporates during firing, leaving only the alumina powder, and a separator sheet is used as a mold release agent, or the alumina powder is removed. It has been used in powder form as a mold release agent.
（発明が解決しようとする課題）
しかしながら、これまでのセラミック基板の焼成による
ａ遣方法においては、セパレーターシート、あるいはと
り粉的離型剤の使用にもかかわらず、焼成品の寸法のバ
ラツキや、反り、あるいはうねりという基板の変形、さ
らには基板表面の損傷が避けられなかった。また、セパ
レーターシートは生産の合理化にはある程度寄与するも
のの、上記の欠点とともに、そのコストが極めて高いも
のとなるという問題があった。(Problems to be Solved by the Invention) However, in the conventional a-dispensing method by firing ceramic substrates, despite the use of a separator sheet or a powder-like mold release agent, variations in the dimensions of the fired product, Deformation of the substrate, such as warping or waviness, and further damage to the substrate surface were unavoidable. Further, although the separator sheet contributes to the rationalization of production to some extent, there is a problem in that, in addition to the above-mentioned drawbacks, the cost is extremely high.
この発明は、このような事情に鑑みてなされたものであ
り、従来のセラミック基板製造に係わる焼成法の欠点を
解消し、高品質、低コストなセラミック基板を生産性よ
く製造することのできる新しい方法を提供することを目
的としている。This invention was made in view of the above circumstances, and is a new method that eliminates the drawbacks of the conventional firing method for manufacturing ceramic substrates and allows high-quality, low-cost ceramic substrates to be manufactured with high productivity. The purpose is to provide a method.
（課題を解決するための手段）
この発明は、上記の課題を解決するものとして、セラミ
ックグリーンシートの焼成に際し、複数枚のセラミック
グリーンシート間には０．０２〜ｏ、ｏｓｒ／１００ｃ
＋１１、セラミックグリーンシートとセッター間には０
．３６〜０．５５ 、 ／ １００−の離型剤粉末を介
在させて焼成することを特徴とするセラミック基板の製
造方法を提供する。(Means for Solving the Problems) The present invention solves the above-mentioned problems, and the present invention provides that, when firing ceramic green sheets, the distance between the plurality of ceramic green sheets is 0.02 to osr/100c.
+11, 0 between ceramic green sheet and setter
．． Provided is a method for manufacturing a ceramic substrate, characterized in that firing is performed in the presence of a mold release agent powder of 36 to 0.55/100.
この方法は、従来のセパレーター使用、あるいはとり粉
的離型剤使用のいずれの場合にも離型剤の使用量につい
て明確な基準もなく焼成が行われていたのに対し、上記
の範囲での使用がセラミック基板の品質向上に極めて有
効であり、しかも高コストなセパレーターシートの使用
も必要でないとの新しい知見に基づいている。特に、こ
の離型剤の使用については、セッター面でのグリーンシ
ートは焼成時の収縮によってその表面に損傷を生じやす
く、また寸法バラツキが大きいが、上記のこの発明の、
方法によって、これらの欠点が効果的に解消されるとい
う重要な知見が発明の基礎になっている。With this method, baking was performed without clear standards for the amount of mold release agent used in either cases of using a separator or powder-like mold release agent. This is based on new knowledge that the use of this method is extremely effective in improving the quality of ceramic substrates, and that there is no need to use expensive separator sheets. In particular, with regard to the use of this mold release agent, the green sheet on the setter surface is likely to be damaged on its surface due to shrinkage during firing, and there is large dimensional variation.
The basis of the invention is the important finding that the method effectively overcomes these drawbacks.
セラミックグリーンシート間の離型粉末を０．０２〜０
．０５ ｇ ／ １００ ｉ、セラミックグリーンとセ
ッター間の離型粉末を０．３６〜０．５５ｉｒ ／ １
００ ａａとするこの発明の方法においては、離型粉末
を自動制御しつつ機械的に散布することを可能としても
いる。散布装置のノズル噴出角度、噴出圧力等の条件を
適宜変更することによって、グリーンシート間への離型
粉末の散布と、グリーンシートとセッター間への散布と
を区分して連続的に行うことができる。The mold release powder between the ceramic green sheets is 0.02~0.
．． 05g/100i, mold release powder between ceramic green and setter 0.36~0.55ir/1
In the method of the present invention, the mold release powder can be automatically controlled and mechanically dispersed. By appropriately changing conditions such as the nozzle jetting angle and jetting pressure of the spraying device, it is possible to separate and continuously perform the sprinkling of the release powder between the green sheets and the sprinkling between the green sheets and the setter. can.
離型粉末としては、従来と同様の数μｍ以下の粒径のア
ルミナ粉等を使用することができる。その使用量が、上
記の範囲以下の場合には焼成品のセラミック基板表面の
損傷が生じやすく、寸法のバラツキや変形も生じやすい
。また、この範囲以上の場合には、反りなどの変形が生
じやすく、材料コスト増の原因となるばかりか、焼成後
の離型粉末の除去が面間になり、製造効率を低下させる
。As the mold release powder, it is possible to use alumina powder or the like having a particle size of several micrometers or less, which is the same as in the past. If the amount used is less than the above range, the ceramic substrate surface of the fired product is likely to be damaged, and dimensional variations and deformation are also likely to occur. Moreover, if it exceeds this range, deformation such as warping is likely to occur, which not only causes an increase in material cost, but also removes the mold release powder between surfaces after firing, reducing manufacturing efficiency.
噴射ノズルを有する散布装置により離型粉末を所定の範
囲で散布する場合には、たとえばグリーンシート間への
散布を１個のノズルで、６０〜７０°の噴射角度、０．
２５〜０．４ ｉｑｒ ／−の圧力、コンベア速度７５
〜８００ｃｍ／分として行うとすると、グリーンシート
とセッター間には２個のノズルで、７５〜８０’ 、１
．０〜１．４ｋｇ／ａ＆、２５〜３５ｃｍＩ／分の条件
等とすることができる。もちろん、この数値は限定的な
ものではない。When spraying the mold release powder in a predetermined range using a spraying device having a spray nozzle, for example, one nozzle is used to spray the powder between the green sheets at a spray angle of 60 to 70 degrees and a spray angle of 0.
Pressure from 25 to 0.4 iqr/-, conveyor speed 75
If the speed is ~800cm/min, there are two nozzles between the green sheet and the setter, and the speed is 75~80', 1
．． The conditions may be 0 to 1.4 kg/a&, 25 to 35 cmI/min, etc. Of course, this number is not limiting.
（作 用）
セラミックグリーンシート間に０．０２〜０６０５ｇ／
ｃ１１！、セラミックグリーンシートとセッターとの間
に０．３６〜０．５５ｇ／１００ ｃＪの離型粉末を介
在させて焼成することにより、焼成の寸法バラツキ、反
りやうねり等の変形、さらには基板表面の損傷を抑え、
高品質のセラミック基板の製造を可能とする。(Function) 0.02~0605g/between ceramic green sheets
c11! By interposing 0.36 to 0.55 g/100 cJ of mold release powder between the ceramic green sheet and the setter and firing, it is possible to prevent dimensional variations in firing, deformation such as warping and waviness, and even the substrate surface. Reduce damage,
Enables the production of high quality ceramic substrates.
しかもこの方法によって低コストで、自動化生産も可能
となる。Moreover, this method also enables automated production at low cost.
（実施例）
次にこの発明の実施例を示し、さらに詳しくこの発明の
方法について説明する。(Example) Next, examples of the present invention will be shown, and the method of the present invention will be explained in more detail.
実方組例１〜４
平均粒径２．８μｍのアルミナ９８重量部、タルク２重
量部を混合した後に、メチルセルロース５重量部、水１
５重量部を加え、混合、混練した。Practical set examples 1 to 4 After mixing 98 parts by weight of alumina with an average particle size of 2.8 μm and 2 parts by weight of talc, 5 parts by weight of methylcellulose and 1 part by weight of water were mixed.
5 parts by weight were added and mixed and kneaded.
これを押出機で厚み０，８關のシートに押出し、乾燥後
に１００ Ｘ １００ ｒｖａサイズに打抜加工し、セ
ラミックグリーンシートとした。This was extruded into a sheet with a thickness of 0.8 mm using an extruder, and after drying, it was punched into a size of 100 x 100 rva to obtain a ceramic green sheet.
このグリーンシート１０枚をアルミナ製セッターに積載
し、１００℃／Ｈｒで１５７０°Ｃまで昇温し、３時間
焼成した０次いで、降温させてエアブラストで洗浄し、
異物を除去してセラミック基板を得た。These 10 green sheets were loaded on an alumina setter, heated to 1570°C at 100°C/Hr, and fired for 3 hours.Then, the temperature was lowered and washed with air blast.
Foreign matter was removed to obtain a ceramic substrate.
この際に、焼成に先立って、グリーンシート間およびグ
リーンシートとセッター間には、表１に示した量のアル
ミナ離型粉末を散布した。At this time, prior to firing, an amount of alumina mold release powder shown in Table 1 was sprinkled between the green sheets and between the green sheets and the setter.
得られたセラミック基板について、寸法のバラツキ、焼
成セッター面の損傷、変形、さらに離型粉末の除去のた
めのエアブラスト処理回数、生産コストについて評価し
た。The obtained ceramic substrates were evaluated for dimensional variations, damage and deformation of the firing setter surface, the number of times air blasting was performed to remove mold release powder, and production costs.
その結果も表１に示した。The results are also shown in Table 1.
従来法を示した比較例との対比からも明らかなように、
この発明の実施例の場合には寸法バラツキ、損傷、そし
て変形はなく、ブラスト除去も簡単で、しかも低コスト
生産が可能となる。As is clear from the comparison with the comparative example showing the conventional method,
In the case of the embodiment of the present invention, there is no dimensional variation, damage, or deformation, blast removal is easy, and low-cost production is possible.
比較例１〜３
比較のために、セパレータシートを用いた場合と、従来
の離型剤散布法による場合についても実施（’／ＩＪ
１〜４と同様にしてセラミック基板を製造し、その性能
、コストを評価した。Comparative Examples 1 to 3 For comparison, cases were also carried out using a separator sheet and a conventional release agent spraying method ('/IJ
Ceramic substrates were manufactured in the same manner as in Examples 1 to 4, and their performance and cost were evaluated.
表１に示したように、いずれも実施例に比べると劣って
いた。As shown in Table 1, all were inferior to the Examples.
（発明の効果）
この発明により、焼成品の寸法バラツキ、表面損傷、さ
らには反りやうねりという変形のない高品質なセラミッ
ク基板を低コストで！！！造することができる。(Effects of the invention) With this invention, high-quality ceramic substrates without dimensional variations in fired products, surface damage, and deformation such as warping and waviness can be produced at low cost! ! ! can be built.
Claims (1)
のセラミックグリーンシート間には０．０２〜０．０５
ｇ／１００ｃｍ＾２、セラミックグリーンシートとセッ
ター間には０．３６〜０．５５ｇ／１００ｃｍ＾２の離
型粉末を介在させて焼成することを特徴とするセラミッ
ク基板の製造方法。(1) When firing ceramic green sheets, the gap between multiple ceramic green sheets is 0.02 to 0.05.
g/100cm^2, and firing with a release powder of 0.36 to 0.55g/100cm^2 interposed between the ceramic green sheet and the setter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19162089A JPH0764647B2 (en) | 1989-07-25 | 1989-07-25 | Method for manufacturing alumina ceramics substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19162089A JPH0764647B2 (en) | 1989-07-25 | 1989-07-25 | Method for manufacturing alumina ceramics substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0360469A true JPH0360469A (en) | 1991-03-15 |
| JPH0764647B2 JPH0764647B2 (en) | 1995-07-12 |
Family
ID=16277668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19162089A Expired - Fee Related JPH0764647B2 (en) | 1989-07-25 | 1989-07-25 | Method for manufacturing alumina ceramics substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0764647B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007196989A (en) * | 2005-12-26 | 2007-08-09 | Advics:Kk | Negative pressure type booster |
| EP3670474A1 (en) | 2018-12-20 | 2020-06-24 | Nippon Shokubai Co., Ltd. | Ceramic sheet and method for manufacturing the same |
-
1989
- 1989-07-25 JP JP19162089A patent/JPH0764647B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007196989A (en) * | 2005-12-26 | 2007-08-09 | Advics:Kk | Negative pressure type booster |
| EP3670474A1 (en) | 2018-12-20 | 2020-06-24 | Nippon Shokubai Co., Ltd. | Ceramic sheet and method for manufacturing the same |
| US11335936B2 (en) | 2018-12-20 | 2022-05-17 | Nippon Shokubai Co., Ltd. | Ceramic sheet and method for manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0764647B2 (en) | 1995-07-12 |
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