JPH036000U - - Google Patents
Info
- Publication number
- JPH036000U JPH036000U JP6463189U JP6463189U JPH036000U JP H036000 U JPH036000 U JP H036000U JP 6463189 U JP6463189 U JP 6463189U JP 6463189 U JP6463189 U JP 6463189U JP H036000 U JPH036000 U JP H036000U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- cover part
- diffusion pump
- prediction system
- warns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 3
- 230000002159 abnormal effect Effects 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6463189U JPH036000U (enExample) | 1989-06-01 | 1989-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6463189U JPH036000U (enExample) | 1989-06-01 | 1989-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH036000U true JPH036000U (enExample) | 1991-01-21 |
Family
ID=31595746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6463189U Pending JPH036000U (enExample) | 1989-06-01 | 1989-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH036000U (enExample) |
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1989
- 1989-06-01 JP JP6463189U patent/JPH036000U/ja active Pending