JPH0359069U - - Google Patents

Info

Publication number
JPH0359069U
JPH0359069U JP11762589U JP11762589U JPH0359069U JP H0359069 U JPH0359069 U JP H0359069U JP 11762589 U JP11762589 U JP 11762589U JP 11762589 U JP11762589 U JP 11762589U JP H0359069 U JPH0359069 U JP H0359069U
Authority
JP
Japan
Prior art keywords
spinner
processed
substrate
fixing
rotating table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11762589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11762589U priority Critical patent/JPH0359069U/ja
Publication of JPH0359069U publication Critical patent/JPH0359069U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP11762589U 1989-10-06 1989-10-06 Pending JPH0359069U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11762589U JPH0359069U (enrdf_load_stackoverflow) 1989-10-06 1989-10-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11762589U JPH0359069U (enrdf_load_stackoverflow) 1989-10-06 1989-10-06

Publications (1)

Publication Number Publication Date
JPH0359069U true JPH0359069U (enrdf_load_stackoverflow) 1991-06-10

Family

ID=31665838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11762589U Pending JPH0359069U (enrdf_load_stackoverflow) 1989-10-06 1989-10-06

Country Status (1)

Country Link
JP (1) JPH0359069U (enrdf_load_stackoverflow)

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