JPH0359069U - - Google Patents
Info
- Publication number
- JPH0359069U JPH0359069U JP11762589U JP11762589U JPH0359069U JP H0359069 U JPH0359069 U JP H0359069U JP 11762589 U JP11762589 U JP 11762589U JP 11762589 U JP11762589 U JP 11762589U JP H0359069 U JPH0359069 U JP H0359069U
- Authority
- JP
- Japan
- Prior art keywords
- spinner
- processed
- substrate
- fixing
- rotating table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11762589U JPH0359069U (cs) | 1989-10-06 | 1989-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11762589U JPH0359069U (cs) | 1989-10-06 | 1989-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0359069U true JPH0359069U (cs) | 1991-06-10 |
Family
ID=31665838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11762589U Pending JPH0359069U (cs) | 1989-10-06 | 1989-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0359069U (cs) |
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1989
- 1989-10-06 JP JP11762589U patent/JPH0359069U/ja active Pending