JPH03583Y2 - - Google Patents
Info
- Publication number
- JPH03583Y2 JPH03583Y2 JP1984069699U JP6969984U JPH03583Y2 JP H03583 Y2 JPH03583 Y2 JP H03583Y2 JP 1984069699 U JP1984069699 U JP 1984069699U JP 6969984 U JP6969984 U JP 6969984U JP H03583 Y2 JPH03583 Y2 JP H03583Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic fluid
- cylindrical
- container
- double
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 47
- 239000011553 magnetic fluid Substances 0.000 claims description 45
- 239000000696 magnetic material Substances 0.000 claims description 8
- 238000002955 isolation Methods 0.000 description 10
- 238000013016 damping Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Description
【考案の詳細な説明】
本考案は、磁性流体が確実に磁性流体ダンパ内
に注入充填されることを可能とした磁性流体ダン
パに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic fluid damper that allows magnetic fluid to be reliably injected and filled into the magnetic fluid damper.
従来、光学実験装置・精密天秤等の精密機器は
防振台上に設置され、外部及び該機器自体の振動
を吸収している。該防振台は一般に高剛性の定盤
に、空気ばね・ゴム台・鋼スプリング等を取り付
けた構造となつている。 Conventionally, precision instruments such as optical experiment equipment and precision balances are installed on vibration isolation tables to absorb external vibrations and vibrations of the instruments themselves. The vibration isolation table generally has a structure in which an air spring, a rubber stand, a steel spring, etc. are attached to a highly rigid surface plate.
しかし、このような防振台では、数10Hz以上
の振動吸収には効果があるが、それ以下例えば
3Hz以下の振動を吸収減衰させることができな
い。 However, such a vibration isolation table is effective in absorbing vibrations of several tens of Hz or more, but below that, for example,
It cannot absorb and attenuate vibrations below 3Hz.
このため、従来は第１図に示す如く、空気ばね
の防振装置１に並列的に磁性流体ダンパ２を組み
合わせて防振を行なうことが提案されている。 For this reason, it has conventionally been proposed to perform vibration isolation by combining a magnetic fluid damper 2 in parallel with an air spring vibration isolation device 1, as shown in FIG.
磁性流体ダンパ２は、第２図に示す如く、防振
台の構成要素の１つである高剛性定盤３に接続さ
れる各円柱状磁気回路５，６，７で構成される。
５は定盤４と軟磁性円板７を接続するためのシヤ
フト、６は軟磁性体円板７を介して対向する磁極
面が同極であるように積層された永久磁石を示し
ている。これら磁気回路５，６，７は、円筒形の
非磁性体の容器８に収納し、容器８と磁気回路
５，６，７との間隙には磁性流体９を充填した構
造をとつている。磁性流体９は、フエライト等の
強磁性体粒子を水、ケロシン、各種炭化水素等の
各種溶媒に均一に分散させたものを使用してい
る。 As shown in FIG. 2, the magnetic fluid damper 2 is composed of cylindrical magnetic circuits 5, 6, and 7 connected to a highly rigid surface plate 3, which is one of the components of the vibration isolation table.
Reference numeral 5 indicates a shaft for connecting the surface plate 4 and the soft magnetic disc 7, and 6 indicates a permanent magnet stacked so that the magnetic pole faces facing each other with the soft magnetic disc 7 interposed therebetween have the same polarity. These magnetic circuits 5, 6, 7 are housed in a cylindrical non-magnetic container 8, and the gap between the container 8 and the magnetic circuits 5, 6, 7 is filled with magnetic fluid 9. The magnetic fluid 9 is made by uniformly dispersing ferromagnetic particles such as ferrite in various solvents such as water, kerosene, and various hydrocarbons.
このような構造による磁性流体ダンパは、円板
状軟磁性体７より、径方向へ発散する磁界が非磁
性体容器８と円柱状磁気回路６，７の間に充填さ
れた磁性流体９に作用して、該流体の粘度を制御
せしめ、防振台の外部及び内部の振動による磁性
流体９の運動（流速）を制御してダンピング定数
を調整し、10Hz以下の機械振動をも吸収減衰さ
せるようにしたものである。 In the magnetic fluid damper having such a structure, a magnetic field that diverges in the radial direction from the disc-shaped soft magnetic material 7 acts on the magnetic fluid 9 filled between the non-magnetic container 8 and the cylindrical magnetic circuits 6 and 7. The viscosity of the fluid is controlled, and the damping constant is adjusted by controlling the motion (flow velocity) of the magnetic fluid 9 due to external and internal vibrations of the vibration isolating table, so as to absorb and attenuate even mechanical vibrations of 10 Hz or less. This is what I did.
このようなダンパは、ダンパを構成する際、ま
ず非磁性体容器８に磁性流体９を規定量充填し、
しかる後に円柱状磁気回路５，６，７が容器８に
挿入される。 When constructing such a damper, first a prescribed amount of magnetic fluid 9 is filled into a non-magnetic container 8,
Thereafter, the cylindrical magnetic circuits 5, 6, 7 are inserted into the container 8.
しかし、該磁気回路を挿入する際、第２図に示
す如く、該磁気回路の磁界により、容器８の底に
あつた磁性流体９が軟磁性体７の磁界強度の強い
箇所に集中してくるので、軟磁性体７間に磁性流
体９によつて密封された空気の層Ａが発生するこ
とがしばしば起こる。この空気層Ａは容器８と磁
気回路６，７間隙の粘性抵抗を著しく減少させる
ことになり、磁性流体ダンパの性能を劣化させる
ので好ましい現象ではない。 However, when inserting the magnetic circuit, as shown in FIG. 2, the magnetic field of the magnetic circuit causes the magnetic fluid 9 at the bottom of the container 8 to concentrate on areas of the soft magnetic body 7 where the magnetic field strength is strong. Therefore, an air layer A sealed by the magnetic fluid 9 often occurs between the soft magnetic bodies 7. This air layer A is not a desirable phenomenon because it significantly reduces the viscous resistance between the container 8 and the magnetic circuits 6 and 7, deteriorating the performance of the magnetic fluid damper.
本考案は、このような好ましくない現象を防止
するため、磁気回路とシヤフトとを切り離した構
造とし、組立時にダンピング効果を劣化させる空
気層が磁性流体中に密封混入するのを防止するよ
うにした磁性流体ダンパを提案することを主たる
目的とする。 In order to prevent such undesirable phenomena, the present invention has a structure in which the magnetic circuit and the shaft are separated, and the air layer that degrades the damping effect is prevented from being mixed into the magnetic fluid during assembly. The main purpose is to propose a magnetic fluid damper.
以下本考案の一実施例について図面を参照しな
がら詳細に説明する。 An embodiment of the present invention will be described in detail below with reference to the drawings.
第３図は本考案の一実施例を示す断面図であ
り、第２図例に示す部分と同じものには同一の符
号を伏して説明する。 FIG. 3 is a cross-sectional view showing one embodiment of the present invention, and the same parts as those shown in the example of FIG. 2 will be described with the same reference numerals.
本考案例の構造は、磁性流体９が収容された非
磁性体（アルミニウム等）よりなる二重円筒容器
８内に、円柱状の形態をした除振台に接続されて
いる永久磁石よりなる磁気回路６，７と、二重円
筒容器８と同芯的に磁性流体９中に配置された非
磁性体よりなる円筒体５ａを有するシヤフト５と
から構成されている。したがつて、円柱状永久磁
石の磁気回路６，７から発生する磁界によつて、
非磁性体よりなる二重円筒容器８内に充填されて
いる磁性流体９の粘度を変化せしめ、除振台に接
続され、かつ二重円筒容器８と同芯的に磁性流体
９中に配置された非磁性体よりなる円筒体５ａの
上下振動に対する粘性抵抗を調整変化せしめ、磁
性流体のダンパ効果を得ている。尚、円筒体５ａ
の上部の孔５ｂは、非磁性体容器８と円筒体５ａ
の相対的な上下振動により、円筒体５ａと二重円
筒８、磁性流体９及び磁気回路６，７に内包され
る空間１１内の空気が圧縮・膨張されることによ
り磁性流体９の二重円筒容器８の外部への飛散を
防止するために空間１１と外部空間との連結用と
して設けられたのである。この場合、孔５ａを穿
設する代わりに、第４図に示す如く、円柱状磁石
の磁気回路６，７に軸方向の貫通孔１２を穿設し
て環状とし、容器８の内側頂部に孔１３を穿設し
て外部空間と空間１１とを連結しても良い。 The structure of the present invention is such that a magnetic fluid 9 is housed in a double cylindrical container 8 made of a non-magnetic material (aluminum, etc.), and a permanent magnet is connected to a cylindrical vibration isolation table. It is composed of circuits 6 and 7, and a shaft 5 having a cylindrical body 5a made of a non-magnetic material and placed concentrically in a magnetic fluid 9 with a double cylindrical container 8. Therefore, due to the magnetic field generated from the magnetic circuits 6 and 7 of the cylindrical permanent magnets,
The viscosity of the magnetic fluid 9 filled in a double cylindrical container 8 made of a non-magnetic material is changed, and the magnetic fluid 9 is connected to a vibration isolation table and arranged concentrically with the double cylindrical container 8 in the magnetic fluid 9. The damper effect of the magnetic fluid is obtained by adjusting and changing the viscous resistance to vertical vibration of the cylindrical body 5a made of a non-magnetic material. In addition, the cylindrical body 5a
The upper hole 5b of the non-magnetic container 8 and the cylindrical body 5a
Due to the relative vertical vibration of the cylinder body 5a, the double cylinder 8, the magnetic fluid 9, and the magnetic circuits 6 and 7, the air in the space 11 is compressed and expanded, so that the double cylinder of the magnetic fluid 9 is compressed and expanded. It is provided to connect the space 11 and the external space in order to prevent the container 8 from scattering to the outside. In this case, instead of drilling the hole 5a, as shown in FIG. 13 may be bored to connect the external space and the space 11.
本考案磁性流体ダンパは、各構成要素を組み立
てる際、二重円筒容器８に規定量の磁性流体９を
充填し、シヤフト５を挿入し、その後で磁気回路
６，７を下方より二重円筒８内に挿入することが
できるので、第２図に示した如く、磁性流体が磁
気回路により引き上げられ、磁気回路が所定位置
に設置されるまでに磁性流体中に空気層が混入さ
れる不具合がおきない。したがつて、磁性流体ダ
ンパとしての性能の信頼性が著しく向上する。 When assembling each component of the magnetic fluid damper of the present invention, a double cylindrical container 8 is filled with a specified amount of magnetic fluid 9, a shaft 5 is inserted, and then the magnetic circuits 6 and 7 are inserted into the double cylinder 8 from below. As shown in Fig. 2, the magnetic fluid is pulled up by the magnetic circuit, and by the time the magnetic circuit is installed in a predetermined position, there is a problem that an air layer is mixed into the magnetic fluid. do not have. Therefore, the reliability of the performance as a magnetic fluid damper is significantly improved.
尚、磁気回路を円筒状容器の外側に配置する場
合は、磁気回路で発生する磁界は磁性流体に直接
作用せず磁気回路の効率が低下するが、非磁性容
器を二重円筒状とし、磁気回路の周面と上記非磁
性円筒体の周面とを対応するように構成すること
により、磁気回路の効率が良好となる。 If the magnetic circuit is placed outside the cylindrical container, the magnetic field generated by the magnetic circuit will not act directly on the magnetic fluid, reducing the efficiency of the magnetic circuit. By configuring the circumferential surface of the circuit and the circumferential surface of the non-magnetic cylindrical body to correspond, the efficiency of the magnetic circuit is improved.
以上述べたごとく本考案によれば、磁性流体が
収容された非磁性体よりなる二重円筒容器と、該
二重円筒容器の内側円筒部の内に挿入された円柱
状の磁気回路と、上記二重円筒容器と同芯的に該
磁性流体中に配置された非磁性円筒体とより構成
され、上記磁気回路の周面と上記非磁性円筒体の
周面とを対応するように構成したので、
可動ダンパとなる非磁性円筒体を二重円筒容器
に挿入後磁気回路を所定位置に挿入することがで
きるため、磁性流体ダンパ組立時に、磁性流体中
に空気層が混入するのを防止でき、磁性流体が確
実に磁性流体ダンパ内に注入充填することが可能
となり、高信頼性の磁性流体ダンパの提供が可能
となる効果を有する。 As described above, according to the present invention, there is provided a double cylindrical container made of a non-magnetic material containing a magnetic fluid, a cylindrical magnetic circuit inserted into the inner cylindrical portion of the double cylindrical container, and a cylindrical magnetic circuit as described above. It is composed of a double cylindrical container and a non-magnetic cylinder placed concentrically in the magnetic fluid, and the circumferential surface of the magnetic circuit is configured to correspond to the circumferential surface of the non-magnetic cylinder. , Since the magnetic circuit can be inserted into a predetermined position after inserting the non-magnetic cylindrical body that becomes the movable damper into the double cylindrical container, it is possible to prevent air layers from being mixed into the magnetic fluid when assembling the magnetic fluid damper. The magnetic fluid can be reliably injected and filled into the magnetic fluid damper, which has the effect of making it possible to provide a highly reliable magnetic fluid damper.
第１図は防振台の原理的構造を示す図、第２図
は従来の磁性流体ダンパの構造及び作用の説明に
供する図、第３図は本考案の一実施例を示す断面
図、第４図は本考案の他の例を示す図である。
１……ばね定数を有するゴム製の空気ばね、２
……ダンピング係数を有する磁性流体ダンパ、３
……高剛性の質量（防振されるべき精密器械をも
含む）の防振台、４……ベース、５……高剛性の
防振台に接続されているシヤフト、６……永久磁
石の対向する面が同極になるよう積層されている
円板状永久磁石、７……永久磁石の間隙及び円柱
状磁気回路の側面に密着固定される円板状軟磁性
体、８……非磁性体容器、９……磁性流体。
Fig. 1 is a diagram showing the principle structure of a vibration isolating table, Fig. 2 is a diagram used to explain the structure and operation of a conventional magnetic fluid damper, and Fig. 3 is a sectional view showing an embodiment of the present invention. FIG. 4 is a diagram showing another example of the present invention. 1...Rubber air spring having a spring constant, 2
...magnetic fluid damper with damping coefficient, 3
...Vibration isolation table with a highly rigid mass (including precision instruments to be vibration isolated), 4...Base, 5...Shaft connected to the highly rigid vibration isolation table, 6...Permanent magnet Disc-shaped permanent magnets stacked so that opposing surfaces have the same polarity, 7...Disc-shaped soft magnetic material closely fixed to the gap between the permanent magnets and the side surface of the cylindrical magnetic circuit, 8...Nonmagnetic Body container, 9...magnetic fluid.
Claims (1)
円筒容器と、該二重円筒容器の内側円筒部の内
に挿入された円柱状の磁気回路と、上記二重円
筒容器と同芯的に該磁性流体中に配置された非
磁性円筒体とより構成され、 上記磁気回路の周面と上記非磁性円筒体の周
面とを対応するようにしたことを特徴とする磁
性流体ダンパ。 ２ 上記非磁性円筒体はその頂部に孔が穿設され
た実用新案登録請求の範囲第１項記載の磁性流
体ダンパ。 ３ 上記磁気回路及び上記二重円筒容器の内側円
筒部は夫々孔が穿設された実用新案登録請求の
範囲第１項記載の磁性流体ダンパ。[Claims for Utility Model Registration] 1. A double cylindrical container made of a non-magnetic material containing a magnetic fluid, a cylindrical magnetic circuit inserted into the inner cylindrical portion of the double cylindrical container, and the above-mentioned two. It is comprised of a heavy cylindrical container and a non-magnetic cylindrical body placed concentrically in the magnetic fluid, and is characterized in that the circumferential surface of the magnetic circuit and the circumferential surface of the non-magnetic cylindrical body correspond to each other. magnetic fluid damper. 2. The magnetic fluid damper according to claim 1, wherein the non-magnetic cylindrical body has a hole bored at its top. 3. The magnetic fluid damper according to claim 1, wherein the magnetic circuit and the inner cylindrical portion of the double cylindrical container are each provided with a hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6969984U JPS60180840U (en) | 1984-05-12 | 1984-05-12 | magnetic fluid damper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6969984U JPS60180840U (en) | 1984-05-12 | 1984-05-12 | magnetic fluid damper |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60180840U JPS60180840U (en) | 1985-11-30 |
| JPH03583Y2 true JPH03583Y2 (en) | 1991-01-10 |
Family
ID=30605621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6969984U Granted JPS60180840U (en) | 1984-05-12 | 1984-05-12 | magnetic fluid damper |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60180840U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2005735A (en) * | 2009-12-23 | 2011-06-27 | Asml Netherlands Bv | Imprint lithographic apparatus and imprint lithographic method. |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5438475A (en) * | 1977-08-30 | 1979-03-23 | Nippon Telegr & Teleph Corp <Ntt> | Damper |
-
1984
- 1984-05-12 JP JP6969984U patent/JPS60180840U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5438475A (en) * | 1977-08-30 | 1979-03-23 | Nippon Telegr & Teleph Corp <Ntt> | Damper |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60180840U (en) | 1985-11-30 |
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