JPH0357956U - - Google Patents
Info
- Publication number
- JPH0357956U JPH0357956U JP11860789U JP11860789U JPH0357956U JP H0357956 U JPH0357956 U JP H0357956U JP 11860789 U JP11860789 U JP 11860789U JP 11860789 U JP11860789 U JP 11860789U JP H0357956 U JPH0357956 U JP H0357956U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- processing
- sample
- ion
- processing chambers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 description 1
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Structure Of Printed Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11860789U JPH0357956U (online.php) | 1989-10-09 | 1989-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11860789U JPH0357956U (online.php) | 1989-10-09 | 1989-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0357956U true JPH0357956U (online.php) | 1991-06-05 |
Family
ID=31666761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11860789U Pending JPH0357956U (online.php) | 1989-10-09 | 1989-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0357956U (online.php) |
-
1989
- 1989-10-09 JP JP11860789U patent/JPH0357956U/ja active Pending
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