JPH0354828B2 - - Google Patents

Info

Publication number
JPH0354828B2
JPH0354828B2 JP58104284A JP10428483A JPH0354828B2 JP H0354828 B2 JPH0354828 B2 JP H0354828B2 JP 58104284 A JP58104284 A JP 58104284A JP 10428483 A JP10428483 A JP 10428483A JP H0354828 B2 JPH0354828 B2 JP H0354828B2
Authority
JP
Japan
Prior art keywords
ion source
ion
ions
electron
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58104284A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59230245A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58104284A priority Critical patent/JPS59230245A/ja
Publication of JPS59230245A publication Critical patent/JPS59230245A/ja
Publication of JPH0354828B2 publication Critical patent/JPH0354828B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/022Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges
    • G01L21/30Vacuum gauges by making use of ionisation effects
    • G01L21/32Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP58104284A 1983-06-13 1983-06-13 交流検出方式質量分析計 Granted JPS59230245A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58104284A JPS59230245A (ja) 1983-06-13 1983-06-13 交流検出方式質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58104284A JPS59230245A (ja) 1983-06-13 1983-06-13 交流検出方式質量分析計

Publications (2)

Publication Number Publication Date
JPS59230245A JPS59230245A (ja) 1984-12-24
JPH0354828B2 true JPH0354828B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-21

Family

ID=14376624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58104284A Granted JPS59230245A (ja) 1983-06-13 1983-06-13 交流検出方式質量分析計

Country Status (1)

Country Link
JP (1) JPS59230245A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105021494B (zh) * 2015-07-20 2017-12-19 中国科学院光电研究院 一种材料分压放气率测试系统及方法

Also Published As

Publication number Publication date
JPS59230245A (ja) 1984-12-24

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