JPH035439Y2 - - Google Patents

Description

[Detailed description of the invention] (Field of industrial application) This invention relates to a work robot that assembles parts, transfers parts, etc. in a dust-free room, and in particular removes dust generated from the moving parts of the robot, wiring, piping, etc. The present invention relates to a work robot for use in a dust-free room that can prevent air pollution caused by dust being scattered indoors.

(Prior technology) Workers perform tasks such as tightening screws and applying sealant during the assembly of precision instruments, and supplying printed circuit boards during the LSI manufacturing process in a dust-free room called a clean room. Recently, it has been widely used to replace robots with robots to achieve highly efficient production through unmanned operation. However, since work robots use lubricants in moving parts, especially sliding parts, There is a problem in that the solvent vaporizes and fine dust generated by robot movement scatters into the clean room, contaminating the indoor air.

In addition, in working robots using a horizontal orthogonal two-axis coordinate system, there is a problem in that not only dust is emitted from the motor itself, but also dust is scattered during movement from the wiring connected to the motor/actuator provided on the moving body.

Therefore, in the past, the air inside the clean room was discharged to the outside, and the clean air from which dust was removed was supplied to the room.

(Problem that the invention aims to solve) By the way, in the conventional ventilation system that cleans the air in a clean room, dust scattered from the sliding parts of the robot falls down before being led to the exhaust duct, and can cause damage to the assembled parts. Therefore, it was difficult to say that ventilation alone was a fundamental solution.

Focusing on these facts, the present invention was devised to solve the conventional problems by forming the sliding parts of the robot and the motor installation area, which are the sources of dust generation, in a negative pressure area. While preventing the scattering of dust and harmful moisture and discharging these directly outside the clean room, connecting wiring and connecting piping related to motors and actuators installed on moving parts are designed to prevent dust and harmful moisture from dispersing. The purpose of the present invention is to prevent indoor contamination by storing it in a discharge passage for discharging dust, thereby further promoting the effective use of work robots for dust-free rooms.

(Means for Solving the Problems) The present invention has a guide section extending in the horizontal direction, motors 2, 5, etc. fixed to one end of the guide section, and a slide base slidably engaged with the guide section. 3,
7,... as well as n guide members 1, 6,... equipped with linear motion transmission mechanisms 4, 8,... extending between the motors and the slides in multiple stages and vertically adjacent to each other. Then, the guide parts are arranged so as to intersect, and one end of the motor fixed end of the upper guide member is fixed to the slide base of the lower guide member, while the actuator 9 is mounted on the slide base of the nth guide member at the top. In a work robot disposed in a dust-free room, a first airtight chamber 10 is formed surrounding the first motor 2 of the first guide member 1 at the lowermost stage, and a first airtight chamber 10 is formed by surrounding the first motor 2 of the first guide member 6 at the upper stage. The second motor 5 and the first slide base 3 of the first guide member 1 are assembled as a pair, and the airtight chamber 11 is formed by enclosing the second motor 5 and the first slide base 3 of the first guide member 1 so as not to hinder their movement. The (n+1)th chamber is formed by surrounding the fixed base of the actuator 9 and the sliding base of the nth guide member.
While forming an airtight chamber, the exhaust device 13 is connected to the first airtight chamber 10 to lead out the exhaust pipe end to the outside of the dust-free room, and all other airtight chambers 11, 12,... are connected to each flexible exhaust pipe. 14,1
The flexible exhaust pipes 14, 14, . . . are connected to the first airtight chamber 10 by the flexible exhaust pipes 14, 14, .

Further, in the present invention, the guide members are composed of two guide members 1 and 6 that intersect perpendicularly to each other, and the second motor 5 provided at one end of the second guide member 6 is connected to the first guide member 1 and the second guide member 6. A configuration in which the member 1 is fixed to the first slide base 3 is a preferred embodiment suitable for a practical device.

(Function) The present invention is designed to operate each motor such as the first motor 2 and the second motor 5, which are sources of dust, the first slide base 3, and the second motor.
Airtight chambers such as a first airtight chamber 10, a second airtight chamber 11, a third airtight chamber 12, etc. are formed around each slide base such as the slide base 7, and each chamber 10 to 12 is connected to an exhaust device 1.
By creating a negative pressure area that communicates with 3, generated dust and the like are not released into the clean room, and the clean state of the room can be reliably maintained.

Furthermore, communication wiring that moves along with each motor that moves after the second motor 5 and the actuator 9. Since the connecting pipes are housed within the flexible exhaust pipes 14, 14, dust generated from these wirings is not discharged into the clean room.

(Example) Hereinafter, one example of the present invention will be described with reference to the accompanying drawings.

FIG. 1 schematically shows an example of the present invention, which is constructed as a rectangular coordinate robot and has a linear motion structure in two stages perpendicular to the axis.

The first stage linear motion structure includes a first guide member 1 fixed and arranged horizontally and straightly on a frame F, a pair of rails 1A and 1B extending in parallel, and one end side of both rails 1A and 1B. A first motor 2 installed in the first motor 2, a first slide base 3 slidably engaged between the rails 1A and 1B, and extending parallel to each other between the pair of rails 1A and 1B. rotatably supported by a bearing, and screwed into a nut 16 fixed to the first slide base 3,
and a threaded rod 1 whose end is connected to a first motor 2
5, and a first linear motion transmission mechanism 4 is formed by a threaded rod 15 and a nut 16.

On the other hand, the second stage linear motion structure includes a second motor 5 installed on the first slide base 3, one end of which is fixed to the first slide base 3, and the pair of rails 1
The second one installed horizontally and vertically perpendicular to A and 1B.
A guide member 6, for example, a pair of rails 6A, 6B extending in parallel, a second slide base 7 slidably engaged between the two rails 6A, 6B,
It extends in parallel between the pair of rails 6A and 6B, has both ends rotatably supported by bearings, and is screwed into a nut 18 fixed to the second slide base 7. It consists of a threaded rod 17 connected to the second motor 5, and the threaded rod 17
and the nut 18 form a second linear motion transmission mechanism 8.

9 is an actuator such as a jig mounted on the second slide base 7, and the actuator 9 is
The linear movement structure of the stage allows movement in two dimensions on rectangular coordinates.

In the work robot configured as above, the first motor 2 and the second motor 5 are connected to electric wiring W for power and signals, while the actuator 9 is connected to electric wiring W for signals and Needless to say, fluid pressure (pneumatic) piping is connected, and it is also provided integrally with each sliding part, that is, each slide base 3, 7, and connected to each corresponding rail 1A, 1B, 6A, 6B. The sliding surface of the guide bearing 19, each slide base 3,
The sliding surfaces formed between the nuts 16, 18 fixed to the screw holes 7 and the threaded rods 15, 17 screwed into them, as well as the bearings of the two motors 2, 5, are protected against wear and seizure. In order to ensure smooth sliding, a lubricant such as fluorine-based grease with low volatility is applied.

In this way, in work robots with linear motion axes that use a two-stage orthogonal system, chambers are installed at required locations to prevent the lubricant supplied to each part from scattering around during linear motion. ing.

First, a first airtight chamber 10 is installed surrounding the first motor 2 provided at one end of the same side of the rails 1A and 1B.
This chamber has an airtight structure in which only the connecting shaft between the output shaft of the first motor 2 and the threaded rod 15 passes through the peripheral wall, and the other portions are completely covered.

Next, the second motor 5, first slide base 3, guide bearing 19, and nut 16 are surrounded by a cover to form a second airtight chamber 11, and this chamber 11 as a whole is a portion that moves along the rails 1A and 1B. Therefore, it is arranged so that it intersects the threaded rod 15 and the rails 1A and 1B, and it is necessary to provide a notch at each of these intersections so as not to hinder movement. The structure is such that the gap between the notches is kept as small as possible to prevent dust from scattering outside the notches.

On the other hand, the fixed base of the actuator 9, the second slide base, the guide bearing 19, and the nut 18 are surrounded by a cover, and a third airtight chamber 12 is formed.
However, like the second airtight chamber 11, this chamber 12 is also a part that moves along the rails 6A, 6B, so the threaded rod 17, the rails 6A,
Notches are provided in the portions that intersect with 6B to make the gap as small as possible to create a structure that prevents dust from scattering to the outside.

These three airtight chambers 10, 11, and 12 are kept in a negative pressure region with respect to the clean room atmosphere during robot operation. are connected to each other.

The exhaust device 13 has its suction side end connected to a connection port 22 provided in the first airtight chamber 10, which has a fixed structure, and also extends the exhaust pipe 21 into the clean room to connect the end of the exhaust pipe 21 into the clean room. It is installed by penetrating the wall of the clean room and extending outside.

The second airtight chamber 11 and the third airtight chamber 12 are connected to the first airtight chamber 10 by flexible exhaust pipes 14, 14, respectively. 1
Needless to say, in the region where the second and third airtight chambers 11 and 12 move with respect to the airtight chamber 10, the length must be selected so as not to hinder the movement thereof.

In a work robot that has a structure that allows forced exhaust of air containing dust, the second
The power wiring and signal wiring for the motor 5 are housed in the exhaust pipe 14 and led to the first airtight chamber 10, and are led to a control panel etc. (not shown) through the first airtight chamber 10. On the other hand, the fluid pressure piping and signal wiring for the actuator 9 are stored in the exhaust pipe 14 and
It leads to the airtight chamber 10 and also leads to the control panel etc. through the first airtight chamber 10, and thus the electrical wiring W and the fluid pressure piping are completely connected except for the portion drawn out from the first airtight chamber 10. It is designed so that it is not exposed to the outside (see Figure 3).

The work robot configured as described above discharges each exhaust chamber 1 by energizing the exhaust pump 20.
Since the insides of 0, 11, and 12 can be created in a negative pressure region compared to the inside of the clean room, dust and mist-like substances scattered from the lubricant will not be released into the clean room, and the entire amount will be removed outside the clean room by the exhaust system 13. be discharged.

The problem of contaminating the inside of the clean room is thus solved.

Furthermore, it goes without saying that dust generated from the moving wiring and piping is completely contained within the exhaust pipes 14, 14, so that there is no emission into the clean room.

In addition, when a DC servo motor is used for the first motor 2 and the second motor 5, for example, dust is generated from brushes, etc., but this is also captured in the first to third airtight chambers 10, 11, 12. Naturally, the motor is forced to be exhausted, and as a result of this forced exhaust system, cooling is achieved, so that an increase in the ambient temperature of the motor can be suppressed.

The embodiment described above has a three-axis structure including the shaft of the actuator 9, but the present invention connects each guide member, forms an airtight chamber, and connects a flexible exhaust pipe in the same manner as in the above example. It goes without saying that by doing this, a work robot with four or more axes can be constructed.

(Effect of the invention) The invention forms first to (n+1) airtight chambers 10, 11, 12, etc. by covering the periphery of each motor 2, 5 and each slide base 3, 7, and connects them with an exhaust device. 13 for forced exhaust, so dust and moisture generated on sliding parts are removed.
When this occurs at the location, it is immediately discharged outside by the exhaust device 13, so that even a small amount will not be discharged into the clean room.

Further, since the wiring and piping are housed within the flexible exhaust pipes 14, 14 provided for communication between the exhaust chambers, dust generated from them is also exhausted at the same time.

Furthermore, by performing forced exhaust, the cooling effect of suppressing the rise in ambient temperature of each motor such as the first motor 2 and the second motor 5 is great.

In addition, the wiring and piping are easy to handle and are not exposed to the outside, so there is an advantage that the external appearance can be neatly arranged.

[Brief explanation of drawings]

FIG. 1 is a schematic skeletal structure diagram according to an embodiment of the present invention, FIG. 2 is a perspective view of the external appearance, and FIG.
Cross-sectional view of the first stage linear motion structure in Figure 4.
The figure is a longitudinal sectional view of the first slide base in FIG. 3. 1...first guide member, 2...first motor, 3...first
Slide base, 4...first linear motion transmission mechanism, 5
...Second motor, 6...Second guide member, 7...Second slide base, 8...Second linear motion transmission mechanism, 9...Actuator, 10...First airtight chamber, 11...
Second airtight chamber, 12...Third airtight chamber, 1
3...Exhaust device, 14...Flexible exhaust pipe.

Claims (1)

[Claims for Utility Model Registration] 1. Motors 2, 5, ... which have a guide section extending in the horizontal direction and are fixed to one end thereof, and slide bases 3, 7, ... which are slidably engaged with the guide section.
In addition, n guide members 1, 6, ... equipped with linear motion transmission mechanisms 4, 8, ... extending between the motor and the slide base are arranged in multiple stages, and
The vertically adjacent guide parts are arranged so as to intersect, and one end of the motor fixed end of the upper guide member is fixed to the slide base of the lower guide member, while the slide base of the nth guide member of the uppermost stage is fixed to the slide base of the nth guide member of the uppermost stage. In a working robot which is equipped with an actuator 9 and placed in a dust-free room, a first airtight chamber 10 is formed surrounding the first motor 2 of the first guide member 1 at the lowermost stage, and the first motor 2 at the upper stage The second motor 5 and the first motor of the two guide members 6
The first slide base 3 of the guide member 1 was assembled as a pair, and the second airtight chamber 11 was formed by enclosing the first slide base 3 so as not to hinder its movement, and the upper motor and the lower slide base were assembled in the same manner. The airtight chambers are respectively formed, and the (n+1)th airtight chamber is formed by surrounding the fixed base of the actuator 9 and the slide base of the nth guide member, while the exhaust device 13 is connected to the first airtight chamber 10 to exhaust air. The tube end is led out to the outside of the dust-free room, and the other airtight chambers 11, 12... are all connected to the flexible exhaust pipes 14, 14...
A working robot for a dust-free room, characterized in that each connecting wiring and each connecting piping are connected to the first airtight chamber 10 and housed in each of the flexible exhaust pipes 14, 14, . . . 2 The guide members are composed of two first guide members 1 and second guide members 6 that intersect perpendicularly to each other, and the second motor 5 provided at one end of the second guide member 6 is connected to the first guide member 1.
A working robot for a dust-free room according to claim 1, which is fixed to a first slide base 3 of a guide member 1.