JPH0353848U - - Google Patents
Info
- Publication number
- JPH0353848U JPH0353848U JP11485689U JP11485689U JPH0353848U JP H0353848 U JPH0353848 U JP H0353848U JP 11485689 U JP11485689 U JP 11485689U JP 11485689 U JP11485689 U JP 11485689U JP H0353848 U JPH0353848 U JP H0353848U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- supported
- wafers
- unloading machine
- support rollers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 10
- 238000000926 separation method Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11485689U JPH0353848U (cs) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11485689U JPH0353848U (cs) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353848U true JPH0353848U (cs) | 1991-05-24 |
Family
ID=31663204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11485689U Pending JPH0353848U (cs) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353848U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010094278A1 (de) * | 2009-02-19 | 2010-08-26 | Jonas & Redmann Automationstechnik Gmbh | Verfahren und vorrichtung zum bilden einer paketartigen back-to-back-wafercharge |
-
1989
- 1989-09-29 JP JP11485689U patent/JPH0353848U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010094278A1 (de) * | 2009-02-19 | 2010-08-26 | Jonas & Redmann Automationstechnik Gmbh | Verfahren und vorrichtung zum bilden einer paketartigen back-to-back-wafercharge |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0353848U (cs) | ||
| JPS6042729U (ja) | 成膜装置 | |
| JPH0366929U (cs) | ||
| JPS63199263U (cs) | ||
| JPS61155700U (cs) | ||
| JPS6254101U (cs) | ||
| JPS592310U (ja) | 超音波プロ−ブ | |
| JPS6455553U (cs) | ||
| JPH028135U (cs) | ||
| JPH0372338U (cs) | ||
| JPS63170464U (cs) | ||
| JPS60145733U (ja) | 圧電振動子の支持構造 | |
| JPH0322125U (cs) | ||
| JPS59973U (ja) | 半円筒状超音波振動子 | |
| JPH03125096U (cs) | ||
| JPH0165223U (cs) | ||
| JPS60140072U (ja) | ベルト状感光体の裏面クリ−ニング装置 | |
| JPS63200859U (cs) | ||
| JPH0258860U (cs) | ||
| JPH0377529U (cs) | ||
| JPH0348387U (cs) | ||
| JPS6323894U (cs) | ||
| JPS59190365U (ja) | 塗工装置 | |
| JPS6256223U (cs) | ||
| JPS592312U (ja) | 超音波探触子 |