JPH0351900U - - Google Patents
Info
- Publication number
- JPH0351900U JPH0351900U JP11386389U JP11386389U JPH0351900U JP H0351900 U JPH0351900 U JP H0351900U JP 11386389 U JP11386389 U JP 11386389U JP 11386389 U JP11386389 U JP 11386389U JP H0351900 U JPH0351900 U JP H0351900U
- Authority
- JP
- Japan
- Prior art keywords
- rail
- sensor
- drive mechanism
- cover
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11386389U JPH0351900U (en, 2012) | 1989-09-28 | 1989-09-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11386389U JPH0351900U (en, 2012) | 1989-09-28 | 1989-09-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0351900U true JPH0351900U (en, 2012) | 1991-05-20 |
Family
ID=31662260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11386389U Pending JPH0351900U (en, 2012) | 1989-09-28 | 1989-09-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0351900U (en, 2012) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59122000A (ja) * | 1982-12-28 | 1984-07-14 | 株式会社東芝 | 半導体装置の移送装置 |
JPS6350623B2 (en, 2012) * | 1981-05-20 | 1988-10-11 | Sanyo Electric Co |
-
1989
- 1989-09-28 JP JP11386389U patent/JPH0351900U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6350623B2 (en, 2012) * | 1981-05-20 | 1988-10-11 | Sanyo Electric Co | |
JPS59122000A (ja) * | 1982-12-28 | 1984-07-14 | 株式会社東芝 | 半導体装置の移送装置 |