JPH0351834U - - Google Patents

Info

Publication number

JPH0351834U

JPH0351834U JP11203689U JP11203689U JPH0351834U JP H0351834 U JPH0351834 U JP H0351834U JP 11203689 U JP11203689 U JP 11203689U JP 11203689 U JP11203689 U JP 11203689U JP H0351834 U JPH0351834 U JP H0351834U

Authority

JP

Japan

Prior art keywords

vapor phase

phase growth

reaction chamber

growth apparatus

vertical vapor

Prior art date

1989-09-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000012495 reaction gas Substances 0.000 claims description 3
• 238000001947 vapour-phase growth Methods 0.000 claims 4
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4

Cited By (1)