JPH035090U - - Google Patents
Info
- Publication number
- JPH035090U JPH035090U JP5910389U JP5910389U JPH035090U JP H035090 U JPH035090 U JP H035090U JP 5910389 U JP5910389 U JP 5910389U JP 5910389 U JP5910389 U JP 5910389U JP H035090 U JPH035090 U JP H035090U
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen gas
- heat exchanger
- region
- vacuum pump
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5910389U JPH035090U (hr) | 1989-05-24 | 1989-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5910389U JPH035090U (hr) | 1989-05-24 | 1989-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH035090U true JPH035090U (hr) | 1991-01-18 |
Family
ID=31585310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5910389U Pending JPH035090U (hr) | 1989-05-24 | 1989-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH035090U (hr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013204854A (ja) * | 2012-03-27 | 2013-10-07 | Mitsubishi Heavy Ind Ltd | ガス封入装置およびガス封入方法 |
-
1989
- 1989-05-24 JP JP5910389U patent/JPH035090U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013204854A (ja) * | 2012-03-27 | 2013-10-07 | Mitsubishi Heavy Ind Ltd | ガス封入装置およびガス封入方法 |