JPH0350336U - - Google Patents

Info

Publication number
JPH0350336U
JPH0350336U JP11156489U JP11156489U JPH0350336U JP H0350336 U JPH0350336 U JP H0350336U JP 11156489 U JP11156489 U JP 11156489U JP 11156489 U JP11156489 U JP 11156489U JP H0350336 U JPH0350336 U JP H0350336U
Authority
JP
Japan
Prior art keywords
carrier
wafer
view
external case
wafer holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11156489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11156489U priority Critical patent/JPH0350336U/ja
Publication of JPH0350336U publication Critical patent/JPH0350336U/ja
Pending legal-status Critical Current

Links

JP11156489U 1989-09-22 1989-09-22 Pending JPH0350336U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11156489U JPH0350336U (enrdf_load_stackoverflow) 1989-09-22 1989-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11156489U JPH0350336U (enrdf_load_stackoverflow) 1989-09-22 1989-09-22

Publications (1)

Publication Number Publication Date
JPH0350336U true JPH0350336U (enrdf_load_stackoverflow) 1991-05-16

Family

ID=31660034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11156489U Pending JPH0350336U (enrdf_load_stackoverflow) 1989-09-22 1989-09-22

Country Status (1)

Country Link
JP (1) JPH0350336U (enrdf_load_stackoverflow)

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