JPH0350336U - - Google Patents
Info
- Publication number
- JPH0350336U JPH0350336U JP11156489U JP11156489U JPH0350336U JP H0350336 U JPH0350336 U JP H0350336U JP 11156489 U JP11156489 U JP 11156489U JP 11156489 U JP11156489 U JP 11156489U JP H0350336 U JPH0350336 U JP H0350336U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafer
- view
- external case
- wafer holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11156489U JPH0350336U (cs) | 1989-09-22 | 1989-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11156489U JPH0350336U (cs) | 1989-09-22 | 1989-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0350336U true JPH0350336U (cs) | 1991-05-16 |
Family
ID=31660034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11156489U Pending JPH0350336U (cs) | 1989-09-22 | 1989-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0350336U (cs) |
-
1989
- 1989-09-22 JP JP11156489U patent/JPH0350336U/ja active Pending