JPH0350055U - - Google Patents
Info
- Publication number
- JPH0350055U JPH0350055U JP11172789U JP11172789U JPH0350055U JP H0350055 U JPH0350055 U JP H0350055U JP 11172789 U JP11172789 U JP 11172789U JP 11172789 U JP11172789 U JP 11172789U JP H0350055 U JPH0350055 U JP H0350055U
- Authority
- JP
- Japan
- Prior art keywords
- evaporator
- impurity
- metal
- impurity object
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012535 impurity Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 239000007787 solid Substances 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の不純物蒸発装置の一実施例、
第２図は従来装置を示す。
１１……カーボン蒸発体、１２ａ，１２ｂ……
金属電極、１３ａ，１３ｂ……熱シールドの周面
及び底面、１４ａ，１４ｂ……固定部分。
Figure 1 shows an embodiment of the impurity evaporator of the present invention.
FIG. 2 shows a conventional device. 11...Carbon evaporator, 12a, 12b...
Metal electrodes, 13a, 13b...peripheral surface and bottom surface of heat shield, 14a, 14b...fixed portion.
Claims (1)
物体に通電を行うための２ケ以上の金属端子と、
前記不純物体と上記の金属端子とを固定するため
の部品を備えて構成される直接通電形の蒸発装置
において、蒸発体のほぼ両端に、前記蒸発体の主
面に対してほぼ直角方向に引き出し部を一体に形
成し、金属電極と前記引き出し部との固定部分を
、主たる蒸発面と非同一面上に設けたことを特徴
とする不純物蒸発装置。 a solid impurity object having a certain shape; two or more metal terminals for energizing the impurity object;
In a direct energization type evaporator comprising parts for fixing the impurity object and the metal terminal, the evaporator is provided at substantially both ends of the evaporator and is drawn out in a direction substantially perpendicular to the main surface of the evaporator. 1. An impurity evaporation device characterized in that a fixed portion of the metal electrode and the lead-out portion is provided on a non-coplanar surface with a main evaporation surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11172789U JPH0634372Y2 (en) | 1989-09-25 | 1989-09-25 | Impurity evaporation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11172789U JPH0634372Y2 (en) | 1989-09-25 | 1989-09-25 | Impurity evaporation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0350055U true JPH0350055U (en) | 1991-05-15 |
| JPH0634372Y2 JPH0634372Y2 (en) | 1994-09-07 |
Family
ID=31660194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11172789U Expired - Lifetime JPH0634372Y2 (en) | 1989-09-25 | 1989-09-25 | Impurity evaporation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634372Y2 (en) |
-
1989
- 1989-09-25 JP JP11172789U patent/JPH0634372Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0634372Y2 (en) | 1994-09-07 |