JPH0350049U - - Google Patents

Info

Publication number

JPH0350049U

JPH0350049U JP11060489U JP11060489U JPH0350049U JP H0350049 U JPH0350049 U JP H0350049U JP 11060489 U JP11060489 U JP 11060489U JP 11060489 U JP11060489 U JP 11060489U JP H0350049 U JPH0350049 U JP H0350049U

Authority

JP

Japan

Prior art keywords

wafer

spring

ring

film forming

tray

Prior art date

1989-09-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 4
• 230000002093 peripheral effect Effects 0.000 claims 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1

Cited By (2)