JPH0350049U - - Google Patents

Info

Publication number
JPH0350049U
JPH0350049U JP11060489U JP11060489U JPH0350049U JP H0350049 U JPH0350049 U JP H0350049U JP 11060489 U JP11060489 U JP 11060489U JP 11060489 U JP11060489 U JP 11060489U JP H0350049 U JPH0350049 U JP H0350049U
Authority
JP
Japan
Prior art keywords
wafer
spring
ring
film forming
tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11060489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11060489U priority Critical patent/JPH0350049U/ja
Publication of JPH0350049U publication Critical patent/JPH0350049U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP11060489U 1989-09-21 1989-09-21 Pending JPH0350049U (US06229276-20010508-P00081.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11060489U JPH0350049U (US06229276-20010508-P00081.png) 1989-09-21 1989-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11060489U JPH0350049U (US06229276-20010508-P00081.png) 1989-09-21 1989-09-21

Publications (1)

Publication Number Publication Date
JPH0350049U true JPH0350049U (US06229276-20010508-P00081.png) 1991-05-15

Family

ID=31659129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11060489U Pending JPH0350049U (US06229276-20010508-P00081.png) 1989-09-21 1989-09-21

Country Status (1)

Country Link
JP (1) JPH0350049U (US06229276-20010508-P00081.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001218799A (ja) * 2000-02-10 2001-08-14 Azuma:Kk 車椅子形成機能併備の介護用ベッド

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001218799A (ja) * 2000-02-10 2001-08-14 Azuma:Kk 車椅子形成機能併備の介護用ベッド
JP4521087B2 (ja) * 2000-02-10 2010-08-11 株式会社アヅマ 介護用ベッド

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