JPH034962B2 - - Google Patents
Info
- Publication number
- JPH034962B2 JPH034962B2 JP6371282A JP6371282A JPH034962B2 JP H034962 B2 JPH034962 B2 JP H034962B2 JP 6371282 A JP6371282 A JP 6371282A JP 6371282 A JP6371282 A JP 6371282A JP H034962 B2 JPH034962 B2 JP H034962B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- head
- manufacturing
- magnetic head
- ferrite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 239000000696 magnetic material Substances 0.000 claims description 12
- 229910000859 α-Fe Inorganic materials 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 7
- 230000004907 flux Effects 0.000 description 5
- 229910021364 Al-Si alloy Inorganic materials 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/21—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features the pole pieces being of ferrous sheet metal or other magnetic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】
本発明は、高保磁力テープ用ビデオヘツドを始
めとする磁気記録媒体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing magnetic recording media, including video heads for high coercive force tapes.
近年、ビデオテープレコーダも高記録密度化の
方向にあり、そのため磁気テープも高保磁力化の
方向に進んでいる。 In recent years, video tape recorders are also moving toward higher recording densities, and therefore magnetic tapes are also moving toward higher coercivity.
ところでビデオテープレコーダの磁気ヘツド
は、使用周波数帯が高いことや、テープ・ヘツド
間の相対速度が速いためヘツド摩耗が特に問題と
なり、現在ではフエライト材が主に用いられてい
る。 By the way, since the magnetic head of a video tape recorder uses a high frequency band and the relative speed between the tape and the head is high, wear of the head becomes a particular problem, and ferrite material is currently mainly used.
しかし、フエライト材は磁束密度が低いため、
高い保磁力のテープには十分対応出来ない。その
ため高い保磁力のテープには、高い磁束密度を有
しかつ耐摩耗性の良い金属磁性材料、たとえば、
Fe―Al―Si合金や、アモルフアス合金でヘツド
を作ることが考えられている。 However, since ferrite material has a low magnetic flux density,
It cannot adequately handle tapes with high coercive force. Therefore, tapes with high coercive force are made of metallic magnetic materials that have high magnetic flux density and good wear resistance, such as
It is being considered to make the head from Fe-Al-Si alloy or amorphous alloy.
このような金属材料の場合、電気抵抗が低いた
めビデオテープレコーダで使用するような高い周
波数では損失が大きく問題が多い。また磁気ヘツ
ドの製造においても、アモルフアス合金の場合厚
さ20〜50μmの薄板になつていることが多いため
ヘツドの作成法がかなりむつかしく、またFe―
Al―Si合金の場合においてもガラスとFe―Al―
Si合金の膨張係数の違いによるクラツク発生な
ど、種々の問題がある。 In the case of such metal materials, since the electrical resistance is low, there are many problems with large losses at high frequencies such as those used in video tape recorders. In addition, in the manufacture of magnetic heads, amorphous alloys are often made into thin plates with a thickness of 20 to 50 μm, making the manufacturing method of the head quite difficult.
Even in the case of Al—Si alloys, glass and Fe—Al—
There are various problems such as the occurrence of cracks due to differences in the coefficient of expansion of the Si alloy.
本発明は上記のような問題をなくし、高保磁力
テープにも十分対応出来る磁気ヘツドを容易に得
られるようにしようとするものである。 The present invention aims to eliminate the above-mentioned problems and to make it possible to easily obtain a magnetic head that can sufficiently handle high coercive force tapes.
なおここで本発明の説明に先立ち、第1図a,
bを用いて代表的な磁気ヘツドの構成を説明す
る。図に示すように、フエライト、またはFe―
Al―Si合金で作られたヘツドコア1をギヤツプ
材2たとえばSiO2などをして突合せている。な
お側面およびヘツドアペツクス部にはガラス3が
充填されている。またコア1には巻線窓4が設け
られている。 Before explaining the present invention, FIGS.
The configuration of a typical magnetic head will be explained using Fig.b. As shown in the figure, ferrite or Fe—
A head core 1 made of an Al--Si alloy is butted against a gap material 2 made of, for example, SiO 2 . Note that the side surfaces and head apex portion are filled with glass 3. Further, the core 1 is provided with a winding window 4.
さて次に本発明の説明を行う。 Next, the present invention will be explained.
第2図a〜dは本発明の一実施例を示す。なお
図aは磁気ヘツドのテープ摺動面から見た図であ
り、図b,c,dは磁気ヘツドが製造される過程
を製造工程の順に示したものである。 Figures 2a-d show one embodiment of the invention. Note that Figure a is a view of the magnetic head seen from the tape sliding surface, and Figures b, c, and d show the manufacturing process of the magnetic head in the order of manufacturing steps.
本発明の製造方法により、まず、図bに示すよ
うな1対のコア1,1突合せ体のテープ摺動面側
をリン酸などの溶液でケミカルエツチングを行な
う。この溶液によればフエライトよりなるコア1
部のみがエツチングされ、ガラス3部およびギヤ
ツプ材2をなすSiO2は完全に残り図cのような
状態となる。この際のエツチング量はコア1のア
ペツクス部から±5μm程度が望ましい。このよ
うにギヤツプ材2が残つた、ヘツド摺動面側に、
飽和磁束密度の高い、アモルフアス磁性材料や
Fe―Al―Si材などをスパツターなどの手法によ
り堆積させる。この状態が図dに示される。前述
のケミカルエツチングによつて取り去られたコア
部が金属磁性体5により置き変えられギヤツプの
状態も図bと同様となる。 According to the manufacturing method of the present invention, first, the tape sliding surface side of a pair of abutted cores 1 and 1 as shown in FIG. b is chemically etched with a solution such as phosphoric acid. According to this solution, the core 1 made of ferrite
Only the glass portion 3 and the SiO 2 forming the gap material 2 remain completely, resulting in a state as shown in Figure c. The amount of etching at this time is preferably approximately ±5 μm from the apex portion of the core 1. In this way, on the head sliding surface side where the gap material 2 remains,
Amorphous magnetic materials with high saturation magnetic flux density and
Deposit Fe-Al-Si material, etc. using methods such as sputtering. This situation is shown in Figure d. The core portion removed by the chemical etching described above is replaced by the metal magnetic material 5, and the state of the gap becomes similar to that shown in FIG. b.
このようにしてギヤツプ深さ相当部分が高磁束
密度を有する金属材料で構成されるため、記録電
流によるギヤツプ部の飽和が起こらず、高い保磁
力を有するテープを十分磁化させることができる
ものである。 In this way, since the portion corresponding to the gap depth is made of a metal material with a high magnetic flux density, saturation of the gap portion by the recording current does not occur, and the tape having a high coercive force can be sufficiently magnetized. .
第3図a〜c、第4図a〜d、第5図a〜dは
本発明の他の実施例を示す。第3図a〜cの場合
は、図aに示すように片側面のみガラス3でモー
ルドされた片モールド体を作成し、ガラスモール
ドされていない片側面から、フエライトコア1の
トラツク部が完全になくなるまでエツチングを行
ない、エツチングされた部分に金属磁性体を堆積
させて磁気ヘツドを構成するものである。 3a to 3c, 4a to d, and 5a to 5d show other embodiments of the present invention. In the case of Figures 3a to 3c, a single mold body is made in which only one side is molded with glass 3 as shown in Figure a, and the track portion of the ferrite core 1 is completely removed from the one side that is not molded with glass. Etching is performed until the etched portion is removed, and a magnetic metal material is deposited on the etched portion to form a magnetic head.
第4図a〜dの場合は、非磁性体よりなる基板
11で磁気ヘツドの両側面部を構成するもので、
図aに示すものについて図bに示すようにギヤツ
プ材2を残して基板の一部をエツチングし、その
部分に金属磁性体5を堆積させる。その後基板1
1と同材質のブロック6を金属磁性体5と接合
し、金属磁性体5部(ヘツドのトラツク部)がヘ
ツドの中央部にくるような構成とする。 In the case of FIGS. 4a to 4d, the substrate 11 made of a non-magnetic material constitutes both side surfaces of the magnetic head.
Regarding the substrate shown in FIG. a, a part of the substrate is etched leaving the gap material 2 as shown in FIG. b, and a metal magnetic material 5 is deposited on that part. Then board 1
A block 6 made of the same material as 1 is joined to the metal magnetic body 5, so that the metal magnetic body 5 (track part of the head) is located at the center of the head.
第5図a〜dはフエライト基板を用いた一例を
示し、この場合図aに示すようなギヤツプ部の片
側面にガラス3でモールドされたギヤツプ部片モ
ールド体を構成し、ガラスモールドされていない
側からフエライト基板1部をエツチングして図b
に示すようにギヤツプ材2のみを残し、その面
に、スパツタなどの手法により、図cに示すよう
に金属磁性体5を堆積する。その後図dに示すよ
うに、V字状溝を有するフエライト材21を金属
磁性体5の上に接合する。このような構成にする
ことにより、磁気ヘツドの磁気抵抗が下がりヘツ
ドの効率が向上する。本発明の説明の冒頭にはケ
ミカルエツチングによりエツチングを説明した
が、エツチングする部材やギヤツプ材によつて
は、エツチングされる部材のみが選択的にエツチ
ングされるような、ドライエツチングの方法を用
いても良い。 Figures 5 a to 5 d show an example using a ferrite substrate. In this case, a gap part molded body is formed by molding glass 3 on one side of the gap part as shown in Figure a, and the gap part is not molded with glass. Figure b by etching a part of the ferrite substrate from the side.
As shown in FIG. 3C, only the gap material 2 is left, and a metal magnetic material 5 is deposited on that surface by a method such as sputtering, as shown in FIG. Thereafter, as shown in FIG. d, a ferrite material 21 having a V-shaped groove is bonded onto the metal magnetic body 5. With this configuration, the magnetic resistance of the magnetic head is reduced and the efficiency of the head is improved. At the beginning of the explanation of the present invention, etching was explained using chemical etching, but depending on the part to be etched or the gap material, a dry etching method may be used in which only the part to be etched is selectively etched. Also good.
以上に述べたように、本発明によるとトラツク
部はスパツタなどの手法により堆積された磁束密
度の高い金属磁性体で構成することができるため
高い保磁力のテープを十分磁化出来るヘツドが容
易に得られる。 As described above, according to the present invention, the track portion can be made of a metallic magnetic material with high magnetic flux density deposited by a method such as sputtering, so it is easy to obtain a head that can sufficiently magnetize a tape with a high coercive force. It will be done.
第1図a,bは磁気ヘツドの上面図および正面
図、第2図a〜dは本発明の一実施例を示す図
で、このうち同図aは磁気ヘツドの上面図、同図
b〜dは上記磁気ヘツドの製造過程を製造工程の
順に示す図である。第3図a〜c、第4図a〜
d、および第5図a〜dはそれぞれ本発明の他の
実施例を示す図で、各図とも磁気ヘツドの製造過
程を製造工程の順に示す図である。
1……コア、2……ギヤツプ材、3……ガラ
ス、4……巻線窓、5……金属磁性体、11……
基板、21……フエライト材。
1A and 1B are top and front views of the magnetic head, and FIGS. 2A to 2D are views showing an embodiment of the present invention, of which FIG. 1A is a top view of the magnetic head, and FIGS. d is a diagram showing the manufacturing process of the magnetic head in the order of manufacturing steps. Figure 3 a~c, Figure 4 a~
d and FIGS. 5a to 5d are views showing other embodiments of the present invention, and each figure shows the manufacturing process of the magnetic head in the order of manufacturing steps. 1... Core, 2... Gap material, 3... Glass, 4... Winding window, 5... Metal magnetic material, 11...
Substrate, 21...ferrite material.
Claims (1)
上記ギヤツプ部材がその一部を上記基材の一部に
埋設した状態で露出するように上記基材の他の一
部をエツチングにより除去し、この後上記基材の
他の一部を除去したあとに磁性体を堆積してトラ
ツク部を形成することを特徴とする磁気ヘツドの
製造方法。 2 ヘツド基体にフエライトを用い、かつヘツド
基体のテープ摺動面側またはヘツド基体の側面側
よりエツチングを行うことを特徴とする特許請求
の範囲第1項記載の磁気ヘツドの製造方法。 3 ヘツド基体に非磁性体を用いることを特徴と
する特許請求の範囲第1項記載の磁気ヘツドの製
造方法。 4 堆積された磁性体の上にヘツド基体と同材質
のブロツクを接合することを特徴とする特許請求
の範囲第1項記載の磁気ヘツドの製造方法。 5 堆積された磁性体の上にV字状の溝を有する
ブロツクを接合することを特徴とする特許請求の
範囲第1項記載の磁気ヘツドの製造方法。 6 ブロツクにフエライトを用いることを特徴と
する特許請求の範囲第5項記載の磁気ヘツドの製
造方法。[Claims] 1. Using a head base material in which a gap member is embedded,
The other part of the base material was removed by etching so that the gap member was partially buried in a part of the base material and exposed, and then the other part of the base material was removed. A method of manufacturing a magnetic head, characterized in that a track portion is formed by depositing a magnetic material afterwards. 2. A method of manufacturing a magnetic head according to claim 1, characterized in that ferrite is used for the head base and etching is performed from the tape sliding surface side of the head base or from the side surface of the head base. 3. A method of manufacturing a magnetic head according to claim 1, characterized in that a non-magnetic material is used for the head base. 4. A method for manufacturing a magnetic head according to claim 1, characterized in that a block made of the same material as the head substrate is bonded onto the deposited magnetic material. 5. A method of manufacturing a magnetic head according to claim 1, characterized in that a block having a V-shaped groove is bonded onto the deposited magnetic material. 6. The method of manufacturing a magnetic head according to claim 5, wherein ferrite is used for the block.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6371282A JPS58179931A (en) | 1982-04-15 | 1982-04-15 | Production of magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6371282A JPS58179931A (en) | 1982-04-15 | 1982-04-15 | Production of magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58179931A JPS58179931A (en) | 1983-10-21 |
JPH034962B2 true JPH034962B2 (en) | 1991-01-24 |
Family
ID=13237261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6371282A Granted JPS58179931A (en) | 1982-04-15 | 1982-04-15 | Production of magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58179931A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0264904A (en) * | 1987-12-22 | 1990-03-05 | Nec Kansai Ltd | Manufacture of magnetic head |
-
1982
- 1982-04-15 JP JP6371282A patent/JPS58179931A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58179931A (en) | 1983-10-21 |
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