JPH0349423B2 - - Google Patents
Info
- Publication number
- JPH0349423B2 JPH0349423B2 JP548984A JP548984A JPH0349423B2 JP H0349423 B2 JPH0349423 B2 JP H0349423B2 JP 548984 A JP548984 A JP 548984A JP 548984 A JP548984 A JP 548984A JP H0349423 B2 JPH0349423 B2 JP H0349423B2
- Authority
- JP
- Japan
- Prior art keywords
- white
- photosensitive
- film
- copolymer
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 35
- 229920002120 photoresistant polymer Polymers 0.000 claims description 24
- 238000002834 transmittance Methods 0.000 claims description 11
- 229920005989 resin Polymers 0.000 description 24
- 239000011347 resin Substances 0.000 description 24
- 229920001577 copolymer Polymers 0.000 description 14
- 229920000642 polymer Polymers 0.000 description 14
- 239000007864 aqueous solution Substances 0.000 description 13
- -1 silver halide Chemical class 0.000 description 12
- 239000000203 mixture Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 9
- 229920002554 vinyl polymer Polymers 0.000 description 9
- 229910052724 xenon Inorganic materials 0.000 description 9
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000006378 damage Effects 0.000 description 5
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 5
- 150000002148 esters Chemical class 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 229920003986 novolac Polymers 0.000 description 5
- 239000012463 white pigment Substances 0.000 description 5
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 108010010803 Gelatin Proteins 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 4
- 229920006322 acrylamide copolymer Polymers 0.000 description 4
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 4
- 229920000159 gelatin Polymers 0.000 description 4
- 239000008273 gelatin Substances 0.000 description 4
- 235000019322 gelatine Nutrition 0.000 description 4
- 235000011852 gelatine desserts Nutrition 0.000 description 4
- 239000005011 phenolic resin Substances 0.000 description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 description 4
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 4
- WBYWAXJHAXSJNI-VOTSOKGWSA-M trans-cinnamate Chemical compound [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 4
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 3
- PYSRRFNXTXNWCD-UHFFFAOYSA-N 3-(2-phenylethenyl)furan-2,5-dione Chemical compound O=C1OC(=O)C(C=CC=2C=CC=CC=2)=C1 PYSRRFNXTXNWCD-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 3
- KWEXHDOBZQSNGR-UHFFFAOYSA-N CC(C)=O.CC(C)=O.NC(=O)C=C.NC(=O)C=C Chemical compound CC(C)=O.CC(C)=O.NC(=O)C=C.NC(=O)C=C KWEXHDOBZQSNGR-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229920000147 Styrene maleic anhydride Polymers 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 3
- 150000001241 acetals Chemical class 0.000 description 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 3
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 3
- IVRMZWNICZWHMI-UHFFFAOYSA-N azide group Chemical group [N-]=[N+]=[N-] IVRMZWNICZWHMI-UHFFFAOYSA-N 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 239000008399 tap water Substances 0.000 description 3
- 235000020679 tap water Nutrition 0.000 description 3
- LEJBBGNFPAFPKQ-UHFFFAOYSA-N 2-(2-prop-2-enoyloxyethoxy)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOC(=O)C=C LEJBBGNFPAFPKQ-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 2
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 2
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 2
- 229930040373 Paraformaldehyde Natural products 0.000 description 2
- 241000238370 Sepia Species 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 235000010724 Wisteria floribunda Nutrition 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
- 229940114081 cinnamate Drugs 0.000 description 2
- 229930016911 cinnamic acid Natural products 0.000 description 2
- 235000013985 cinnamic acid Nutrition 0.000 description 2
- 208000028659 discharge Diseases 0.000 description 2
- 239000012153 distilled water Substances 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 239000003999 initiator Substances 0.000 description 2
- 229920003145 methacrylic acid copolymer Polymers 0.000 description 2
- YDKNBNOOCSNPNS-UHFFFAOYSA-N methyl 1,3-benzoxazole-2-carboxylate Chemical compound C1=CC=C2OC(C(=O)OC)=NC2=C1 YDKNBNOOCSNPNS-UHFFFAOYSA-N 0.000 description 2
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- OMNKZBIFPJNNIO-UHFFFAOYSA-N n-(2-methyl-4-oxopentan-2-yl)prop-2-enamide Chemical compound CC(=O)CC(C)(C)NC(=O)C=C OMNKZBIFPJNNIO-UHFFFAOYSA-N 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 229920002866 paraformaldehyde Polymers 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000005060 rubber Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 238000012719 thermal polymerization Methods 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- FEIQOMCWGDNMHM-KBXRYBNXSA-N (2e,4e)-5-phenylpenta-2,4-dienoic acid Chemical compound OC(=O)\C=C\C=C\C1=CC=CC=C1 FEIQOMCWGDNMHM-KBXRYBNXSA-N 0.000 description 1
- 229920003067 (meth)acrylic acid ester copolymer Polymers 0.000 description 1
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- QWQFVUQPHUKAMY-UHFFFAOYSA-N 1,2-diphenyl-2-propoxyethanone Chemical compound C=1C=CC=CC=1C(OCCC)C(=O)C1=CC=CC=C1 QWQFVUQPHUKAMY-UHFFFAOYSA-N 0.000 description 1
- FSAONUPVUVBQHL-UHFFFAOYSA-N 1,3-bis(4-azidophenyl)prop-2-en-1-one Chemical compound C1=CC(N=[N+]=[N-])=CC=C1C=CC(=O)C1=CC=C(N=[N+]=[N-])C=C1 FSAONUPVUVBQHL-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- HWEONUWVYWIJPF-OWOJBTEDSA-N 1-azido-4-[(e)-2-(4-azidophenyl)ethenyl]benzene Chemical compound C1=CC(N=[N+]=[N-])=CC=C1\C=C\C1=CC=C(N=[N+]=[N-])C=C1 HWEONUWVYWIJPF-OWOJBTEDSA-N 0.000 description 1
- MVPFPGOWZLIWRV-UHFFFAOYSA-N 1-azido-4-[[3-[(4-azidophenyl)methylidene]cyclohexylidene]methyl]benzene Chemical compound C1=CC(N=[N+]=[N-])=CC=C1C=C(CCC1)CC1=CC1=CC=C(N=[N+]=[N-])C=C1 MVPFPGOWZLIWRV-UHFFFAOYSA-N 0.000 description 1
- RNIPJYFZGXJSDD-UHFFFAOYSA-N 2,4,5-triphenyl-1h-imidazole Chemical class C1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 RNIPJYFZGXJSDD-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- HZMXJTJBSWOCQB-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethyl prop-2-enoate Chemical compound COCCOCCOC(=O)C=C HZMXJTJBSWOCQB-UHFFFAOYSA-N 0.000 description 1
- DPBJAVGHACCNRL-UHFFFAOYSA-N 2-(dimethylamino)ethyl prop-2-enoate Chemical compound CN(C)CCOC(=O)C=C DPBJAVGHACCNRL-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- HFCUBKYHMMPGBY-UHFFFAOYSA-N 2-methoxyethyl prop-2-enoate Chemical compound COCCOC(=O)C=C HFCUBKYHMMPGBY-UHFFFAOYSA-N 0.000 description 1
- MUZDXNQOSGWMJJ-UHFFFAOYSA-N 2-methylprop-2-enoic acid;prop-2-enoic acid Chemical compound OC(=O)C=C.CC(=C)C(O)=O MUZDXNQOSGWMJJ-UHFFFAOYSA-N 0.000 description 1
- MYISVPVWAQRUTL-UHFFFAOYSA-N 2-methylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3SC2=C1 MYISVPVWAQRUTL-UHFFFAOYSA-N 0.000 description 1
- RZVINYQDSSQUKO-UHFFFAOYSA-N 2-phenoxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC1=CC=CC=C1 RZVINYQDSSQUKO-UHFFFAOYSA-N 0.000 description 1
- RDFQSFOGKVZWKF-UHFFFAOYSA-N 3-hydroxy-2,2-dimethylpropanoic acid Chemical compound OCC(C)(C)C(O)=O RDFQSFOGKVZWKF-UHFFFAOYSA-N 0.000 description 1
- QZPSOSOOLFHYRR-UHFFFAOYSA-N 3-hydroxypropyl prop-2-enoate Chemical compound OCCCOC(=O)C=C QZPSOSOOLFHYRR-UHFFFAOYSA-N 0.000 description 1
- LBSXSAXOLABXMF-UHFFFAOYSA-N 4-Vinylaniline Chemical compound NC1=CC=C(C=C)C=C1 LBSXSAXOLABXMF-UHFFFAOYSA-N 0.000 description 1
- YETHRZVHWIFKCV-UHFFFAOYSA-N 5-azido-2-[2-[4-azido-2-(phenylsulfamoyl)phenyl]ethenyl]benzenesulfonic acid Chemical compound N(=[N+]=[N-])C=1C=C(C(=CC=1)C=CC=1C(=CC(=CC=1)N=[N+]=[N-])S(=O)(=O)O)S(=O)(=O)NC1=CC=CC=C1 YETHRZVHWIFKCV-UHFFFAOYSA-N 0.000 description 1
- JTHZUSWLNCPZLX-UHFFFAOYSA-N 6-fluoro-3-methyl-2h-indazole Chemical compound FC1=CC=C2C(C)=NNC2=C1 JTHZUSWLNCPZLX-UHFFFAOYSA-N 0.000 description 1
- OCIFJWVZZUDMRL-UHFFFAOYSA-N 6-hydroxyhexyl prop-2-enoate Chemical compound OCCCCCCOC(=O)C=C OCIFJWVZZUDMRL-UHFFFAOYSA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- RNRANSTYMSCREL-UHFFFAOYSA-N C1(=CC=CC=C1)O.N(=[N+]=[N-])C1=C(C=O)C=CC=C1 Chemical compound C1(=CC=CC=C1)O.N(=[N+]=[N-])C1=C(C=O)C=CC=C1 RNRANSTYMSCREL-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- 229920008347 Cellulose acetate propionate Polymers 0.000 description 1
- DQFBYFPFKXHELB-UHFFFAOYSA-N Chalcone Natural products C=1C=CC=CC=1C(=O)C=CC1=CC=CC=C1 DQFBYFPFKXHELB-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- 101000891399 Homo sapiens T-complex protein 11 homolog Proteins 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229910020282 Pb(OH) Inorganic materials 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- 102100040391 T-complex protein 11 homolog Human genes 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
- 229920001986 Vinylidene chloride-vinyl chloride copolymer Polymers 0.000 description 1
- 229910000004 White lead Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- ALVGSDOIXRPZFH-UHFFFAOYSA-N [(1-diazonioimino-3,4-dioxonaphthalen-2-ylidene)hydrazinylidene]azanide Chemical compound C1=CC=C2C(=N[N+]#N)C(=NN=[N-])C(=O)C(=O)C2=C1 ALVGSDOIXRPZFH-UHFFFAOYSA-N 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 1
- KJVBXWVJBJIKCU-UHFFFAOYSA-N [hydroxy(2-hydroxyethoxy)phosphoryl] prop-2-enoate Chemical compound OCCOP(O)(=O)OC(=O)C=C KJVBXWVJBJIKCU-UHFFFAOYSA-N 0.000 description 1
- 238000012644 addition polymerization Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001540 azides Chemical class 0.000 description 1
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- CHFBCXOSLARLKB-UHFFFAOYSA-N bis(4-azidophenyl)methanone Chemical compound C1=CC(N=[N+]=[N-])=CC=C1C(=O)C1=CC=C(N=[N+]=[N-])C=C1 CHFBCXOSLARLKB-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 229920006217 cellulose acetate butyrate Polymers 0.000 description 1
- 239000012461 cellulose resin Substances 0.000 description 1
- 235000005513 chalcones Nutrition 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- FEIQOMCWGDNMHM-UHFFFAOYSA-N cinnamylideneacetic acid Natural products OC(=O)C=CC=CC1=CC=CC=C1 FEIQOMCWGDNMHM-UHFFFAOYSA-N 0.000 description 1
- 235000019646 color tone Nutrition 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- WZXNKIQZEIEZEA-UHFFFAOYSA-N ethyl 2-(2-ethoxyethoxy)prop-2-enoate Chemical compound CCOCCOC(=C)C(=O)OCC WZXNKIQZEIEZEA-UHFFFAOYSA-N 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- PBOSTUDLECTMNL-UHFFFAOYSA-N lauryl acrylate Chemical compound CCCCCCCCCCCCOC(=O)C=C PBOSTUDLECTMNL-UHFFFAOYSA-N 0.000 description 1
- RYZCLUQMCYZBJQ-UHFFFAOYSA-H lead(2+);dicarbonate;dihydroxide Chemical compound [OH-].[OH-].[Pb+2].[Pb+2].[Pb+2].[O-]C([O-])=O.[O-]C([O-])=O RYZCLUQMCYZBJQ-UHFFFAOYSA-H 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229940100630 metacresol Drugs 0.000 description 1
- 229940117841 methacrylic acid copolymer Drugs 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- RGZOYSOLQGJHAX-UHFFFAOYSA-N n-azido-n-phenylaniline Chemical compound C=1C=CC=CC=1N(N=[N+]=[N-])C1=CC=CC=C1 RGZOYSOLQGJHAX-UHFFFAOYSA-N 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 239000010680 novolac-type phenolic resin Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 1
- 229920001495 poly(sodium acrylate) polymer Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229940113115 polyethylene glycol 200 Drugs 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- IWHVCHNCTHGORM-UHDJGPCESA-M potassium;(e)-3-phenylprop-2-enoate Chemical compound [K+].[O-]C(=O)\C=C\C1=CC=CC=C1 IWHVCHNCTHGORM-UHDJGPCESA-M 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000001454 recorded image Methods 0.000 description 1
- 239000011134 resol-type phenolic resin Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- NNMHYFLPFNGQFZ-UHFFFAOYSA-M sodium polyacrylate Chemical compound [Na+].[O-]C(=O)C=C NNMHYFLPFNGQFZ-UHFFFAOYSA-M 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 230000002522 swelling effect Effects 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- MUTNCGKQJGXKEM-UHFFFAOYSA-N tamibarotene Chemical compound C=1C=C2C(C)(C)CCC(C)(C)C2=CC=1NC(=O)C1=CC=C(C(O)=O)C=C1 MUTNCGKQJGXKEM-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 238000001931 thermography Methods 0.000 description 1
- 239000001016 thiazine dye Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- DQFBYFPFKXHELB-VAWYXSNFSA-N trans-chalcone Chemical compound C=1C=CC=CC=1C(=O)\C=C\C1=CC=CC=C1 DQFBYFPFKXHELB-VAWYXSNFSA-N 0.000 description 1
- ILJSQTXMGCGYMG-UHFFFAOYSA-N triacetic acid Chemical compound CC(=O)CC(=O)CC(O)=O ILJSQTXMGCGYMG-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/88—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof prepared by photographic processes for production of originals simulating relief
Description
ãçºæã®è©³çŽ°ãªèª¬æã
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ç»å圢æææã«ä¿ããæ³¢é·å600nïœã1200nïœã«
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ããDETAILED DESCRIPTION OF THE INVENTION The present invention relates to a mask image forming material comprising a white mask layer on a transparent support and a photoresist layer thereon, and a light source having high intensity radiation in a wavelength range of 600 nm to 1200 nm. The present invention relates to a mask image forming material which has light resistance particularly to high-intensity xenon flash lamp light such as a xenon lamp, a halogen lamp, a tungsten lamp, etc., and is useful for forming a transparent original in a thermal image forming method.
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ãæ¹æ³ãç¥ãããŠããã As an image forming method, as described in Example 6 of Japanese Patent Publication No. 54-10870, a heat-sensitive polymer and a material dispersed in the heat-sensitive polymer absorb light and convert it into heat. A method is known in which a heat-sensitive recording layer made of material particles such as carbon black is provided on a support, a transparent original is placed on top of the other, and a recorded image is formed by exposure and development from the original side with high-intensity xenon flash light.
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ããã€ãŠã¯ãªããªãã This thermal image forming method enables operations such as handling, exposure, and development of image-forming materials without causing any exposure fog under daylight. It has superior ease of operation compared to other photosensitive materials. However, in this method, as described in Example 6 of the above-mentioned Japanese Patent Publication No. 54-10870, the conditions of irradiation energy of 1.8 J/cm 2 and exposure time of 1/1000 seconds consisting of visible light and near-infrared light are required for exposure in this method. It is necessary to use a light source with extremely high intensity compared to the conventional photosensitive materials mentioned above. Furthermore, when the heat-sensitive recording layer and the transparent original are overlapped and exposed from the original side, the original is exposed to this high-intensity light source, so the original used in this exposure method must be repeatedly blocked from visible light and near-infrared rays. It must have sufficient lightfastness to allow for light exposure and must not be damaged by exposure to light.
ãšããã§ãåŸæ¥ã®ãã¹ã¯ç»å圢æææãšããŠ
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ã¯ãªãã€ãã By the way, conventional mask image forming materials include, for example, silver salt photosensitive materials such as silver halide lithographic film, and non-silver salt photosensitive materials such as diazo photosensitive materials with color tones such as black and sepia. The mask material is usually a photosensitive material sensitive to about 400 to 570 nm. Therefore, as mentioned above, when exposed to high-intensity xenon flash light with an output wavelength in the vicinity of 800 to 1000 nm, for example, the dye in the image absorbs the light and generates heat, which damages the binder and destroys the image. There was a problem that it was damaged or lost, and it was not usable.
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ç»å圢æææãæäŸããããšã«ããã SUMMARY OF THE INVENTION It is an object of the present invention to provide a transparent original for thermal imaging methods which does not damage the image even when exposed to extremely powerful light sources such as the high-intensity xenon flash lamp light described above. An object of the present invention is to provide a mask imaging material.
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ããšã®ç¥èŠãåŸãæ¬çºæãå®æããã«è³ã€ãã As a result of intensive studies to achieve the above-mentioned objective, the present inventors have developed a transparent support with a total light transmittance of 80% or more for visible light and near-infrared light, which is white and transmits total light in the wavelength range of 600 to 1200 nm. Rate is
70% or less and a photoresist layer on the mask layer, the masked imaging material has no damage to very high intensity light sources, such as the high intensity xenon flash lamp light mentioned above. The present invention was completed based on the knowledge that a transparent original for a thermal image forming method that does not undergo heat transfer can be provided.
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ãã That is, the thermal photographic mask image forming material of the present invention is formed by sequentially laminating a white mask layer and a photoresist layer on a substantially transparent support, and the total light transmittance of the white mask layer including the support is is the wavelength range
It is 70% or less at 600 to 1200 nm.
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èŠã§ããã Here, the substantially transparent support refers to a wavelength range of 600 to 1200 nm used for exposure of thermographic materials.
Since it is necessary to have transparency in the visible light range for operations such as alignment, it is necessary to have a total light transmittance of at least 80% in the visible and near-infrared ranges.
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èŠã ããã§ããã Further, the reason why the mask layer is a white mask layer containing a white pigment is that the white pigment has durability against actinic light and has a high reflectance. As mentioned above, conventional mask materials in black or sepia colors are undesirable because they absorb actinic rays, generate heat, and are easily damaged. The total light transmittance of the mask layer including the support is in the wavelength range 600~
The reason why we set it to 70% or less at 1200 nm is that this wavelength range is normally used for exposure of thermographic materials, and in order to obtain performance as a transparent original, the difference from the total light transmittance of the support alone is required. is at least 10%
This is because it is necessary.
以äžã«æ¬çºæã詳现ã«èª¬æããã The present invention will be explained in detail below.
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æ¯æäœã«æŸé»åŠçãæœãããŠããŠãããã The support in the image forming material of the present invention is a transparent support with excellent dimensional stability and a total light transmittance of 80% or more for visible light and near-infrared light, and examples of the support include polyester film, Plastic films such as triacetate film, polycarbonate film, polyimide film, polysulfone film, polystyrene film, and polypropylene film, resin plates such as acrylic resin plates, polycarbonate resin plates, and polyester resin plates, glass plates, etc. can be used. The support is made of aluminum, copper, bismuth, chromium,
Brass, indium oxide, etc. are deposited,
It may be colored with dyes, pigments, etc. Also,
In order to improve the adhesion between the mask layer of the present invention and the support, a subbing layer may be provided on the support as necessary,
The support may be subjected to electrical discharge treatment.
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ã§ããã According to the present invention, a mask layer that is white and has a total light transmittance of 70% or less in a wavelength range of 600 to 1200 nm is provided on the above-mentioned support. Preferably, the mask layer is composed of a white pigment and a film-forming polymer. White pigments include zinc oxide {ZnO}, titanium oxide {TiO 2 }, basic lead carbonate {2PbCO 3ã»Pb(OH) 2 }, lithopone {ZnS and BaSO 4
The content is 5 to 500% by weight based on the film-forming polymer so that the total light transmittance of the mask layer in the wavelength range of 600 to 1200 nm is 70% or less. %Preferably
It is 30-300% by weight.
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ãŸããã¯ïŒã8ÎŒã§ããã Film-forming polymers include water, alkaline aqueous solutions, acidic aqueous solutions, neutral salt aqueous solutions, or hydrocarbon-based, halogenated hydrocarbon-based, alcohol-based, ether-based, acetal-based, ketone-based, and ester-based polymers. , polyhydric alcohols and their derivatives, fatty acids and phenols, nitrogen compounds, and other liquid organic compounds, such as hexane, toluene, xylene, carbon tetrachloride, trichloroethane, methanol, ethanol, isopropanol, tetrahydrofuran, methyl ethyl ketone, ethyl acetate, A polymeric compound that can be dissolved in methylcellosolve, ether, etc. alone or in a mixture, such as gelatin, methylcellulose, ethylcellulose, hydroxyethylcellulose, carboxymethylcellulose, polyvinyl alcohol, sodium polyacrylate,
Water-soluble resins such as polyethylene oxide. Cellulose resins such as cellulose acetate butyrate, cellulose acetate propionate, and cellulose acetate. Polyvinyl acetate, polyvinyl formal, polyvinyl butyral, vinyl chloride-vinyl acetate copolymer, vinyl chloride-vinyl acetate-vinyl alcohol copolymer,
vinyl chloride-vinyl acetate-maleic acid copolymer,
Vinylidene chloride-vinyl chloride copolymer, vinylidene chloride-acrylonitrile copolymer, ethylene-vinyl acetate copolymer, acrylic acid methacrylate copolymer, styrene-maleic anhydride copolymer partial ester, acrylamide-diacetone Acrylamide copolymer, dimethylaminoethyl methacrylate-methyl methacrylate copolymer,
Vinyl resins such as methyl methacrylate-2-hydroxyethyl methacrylate copolymer, methyl vinyl ether-maleic anhydride copolymer, and vinylpyridone-vinyl acetate copolymer. Phenol resins such as resol type phenolic resins and novolac type phenolic resins. Nylon resin. Examples include saturated polyester resin, and the thickness of the film formed on the support by the high molecular compound containing a white pigment dispersed therein is preferably 0.5 to 20 ÎŒm, more preferably 2 to 8 ÎŒm.
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ã¬ãžã¹ãã䜿çšããããšãã§ããã A photoresist layer is provided on top of the white mask layer of white pigment and film-forming polymer.
The photoresist layer in the present invention is made of a photosensitive film-forming substance, and becomes soluble in developing solutions such as water, alkaline aqueous solution, acidic aqueous solution, neutral salt aqueous solution, and organic solvent when exposed to ultraviolet light, visible light, etc. Ice, alkaline aqueous solution, acidic aqueous solution, organic solvent, etc. that change the swelling property and allow only either the exposed or non-exposed portion to remain on the white mask layer, and the remaining portion dissolves the white mask layer. Various conventionally known photoresists described below can be used as long as they have the property of being insoluble in the etching solution.
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ãããããã(1) Photoresist that combines 1,2-naphthoquinone diazide and alkali-soluble resin For example, "New Photosensitive Resin" by Takahiro Tsunoda, Showa
2, described on pages 78-79 published by the Printing Society Publishing Department in 1956.
3,4-trioxybenzophenone-3,4-
Bis[naphthoquinone-1,2-diazide-5-
Mixture of sulfonic acid] ester and metacresol formaldehyde resin (novolak type), 2-[naphthoquinone-1,2-diazide]
Mixture of 5-sulfonyloxy]-7-oxynaphthalene and sierac or styrene-maleic anhydride copolymer, naphthoquinone-1,2
- A mixture of diazide-5-sulfanilide and 4-aminostyrene (pentapolymer), a mixture of naphthoquinone-1,2-diazide-5-sulfonic acid novolac ester and phenol-formaldehyde resin (novolac type), etc. In addition, there are other commercial products available in the United States.
Azoplate-Shipley's AZ series, USA
Kodak's KAP (type 3), Fuji Pharmaceutical's
Examples include FPPR and Tokyo Ohka Kogyo Co., Ltd.'s Fotosol.
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èãšãçµåããããªãã¬ãžã¹ãããããããã(2) Photoresist that combines diazo resin and water-soluble resin or alkali-soluble resin Photoresist that combines diazo resin and water-soluble resin or alkali-soluble resin includes:
Water-soluble diazo resins such as P-diazodiphenylamine paraformaldehyde condensate and gelatin, polyvinyl alcohol, polyvinylpyrrolidone, hydroxyethyl cellulose, methyl vinyl ether-maleic anhydride copolymer, acrylamide-diacetone acrylamide copolymer, etc. 2-hydroxyethyl methacrylate-acrylonitrile-methyl methacrylate-to a photoresist that is a combination of resins or an organic solvent-soluble version of the above diazo resin.
Examples include photoresists in combination with alkali-soluble resins such as methacrylic acid copolymers.
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ããã(3) Photoresists with azide groups as photosensitive groups Photosensitive resins with azide groups as photosensitive groups are made by mixing an azide compound with natural rubber, synthetic rubber, cyclized rubber that cyclizes a part of the rubber molecule, etc. There are rubber-azide photosensitive resins consisting of P-phenylene bisazide, P-azidobenzophenone, 4,4'-diazidobenzophenone, and 4,4'-diazidophenylmethane, 4,4'-diazidostilbene,
4,4'-Diazidochalcone, 2,6-di-
(4'-azidobenzal)cyclohexane, 2,
Examples of the above azide compounds include 6-di-(4'-azidobenzal)-4-methylcyclohexane. Commercially available rubber-azide photosensitive liquids include KTFR from KODAK in the US, EPPR and OMR from Tokyo Ohka Kogyo Co., Ltd., and Fuji Pharmaceutical Co., Ltd.
Examples include FSR, Okamoto Chemical Industry Co., Ltd.'s Teishu Resist S, and Yamatoya Shokai's KY Resist.
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ã³ããªããªã³çž®åéåäœãªã©ããããããã In addition, photosensitive resins incorporating an azide group into the molecule include polyazidovinyl benzoate, polyazidovinyl phthalate, polyazidostyrene, and polyvinylazidobenzal, which are described on pages 104 to 105 of the above-mentioned "New Photosensitive Resins". Examples include acetal, polyvinylazidonaphthyl acetal, azidobenzaldehyde-phenol resin, and azidodiphenylamine polymarin condensation polymer.
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ãããããã Furthermore, a photoresist obtained by mixing an azide photosensitive agent and a polymer described in the above-mentioned "New Photosensitive Resin" pages 107 to 108, such as 4,4'-diazidostilbene-2,2'-disulfonic acid anilide , 4-azido-1-phenylamidebenzene-2-sulfonic acid anilide, or 4-
Examples include photoresist layers made of a mixture of 4'-diazide chalcone and a novolak type phenolic resin.
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ããªããŒããããããã(4) Photoresists with a cinnamoyl group or cinnamylidene group as a photosensitive group Examples of photoresists with a cinnamoyl group as a photosensitive group include polyvinyl cinnamate, and commercially available polyvinyl cinnamate photosensitive solutions are
KPR of KODAK, TPR of Tokyo Ohka Kogyo,
One example is Sanpo Chemical's SPR. Further, polyvinyl cinnamylidene acetate and its derivatives, which are obtained by esterifying PVA with cinnamylidene acetic acid instead of cinnamic acid, are mentioned, for example, polyvinyl cinnamylidene acetate and its derivatives are described in the above-mentioned "New Photosensitive Resins", pages 56-57. denacetate,
Examples include polyvinylzenzoate-cinnamylidene acetate, polyvinylcarbethoxymethyl carbamate-cinnamylidene acetate, polyvinyl acetate-cinnamylidene acetate, and the like. Other examples include acrylic cinnamoyl type polymers, such as those made by reacting polychloroethyl acrylic acid with potassium cinnamate, and those made by adding cinnamic acid to a glycidyl methacrylate copolymer.
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Examples include photoresists in which 10 to 80% by weight and 10% by weight or less of other additives such as sensitizers and thermal polymerization inhibitors are dissolved.
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Polyfunctional acrylates, such as 1,6-hexanediol acrylate, polyethylene glycol
200 diacrylate, diethylene glycol diacrylate, neopentyl glycol diacrylate, triethylene glycol diacrylate,
Hydroxypivalate ester neopentyl glycol diacrylate, bis(acryloxyethoxy)bisphenol A, bis(acryloxypolyethoxy)bisphenol A, trimethylolpropane triacrylate, pentaerythritol triacrylate, dipentaerythritol hexaacrylate, etc. Desirably, in addition, phenoxyethyl acrylate, stearyl acrylate, lauryl acrylate, methoxyethyl acrylate, N,N dimethylaminoethyl acrylate, 2-hydroxyethyl acrylate, 2-
Monofunctional acrylates such as hydroxypropyl acrylate, 2-methoxyethoxyethyl acrylate, 2-ethoxyethoxyethyl acrylate, 2-hydroxyethyl acryloyl phosphate, and tetrahydrofurfuryl acrylate can also be used in combination with the above-mentioned polyfunctional acrylates.
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Benzoin ethyl ether, benzoin isopropyl ether, benzoin n-propyl ether, benzoin isobutyl ether, benzoin n-butyl ether, 2-chlorothioxanthone, 2-methylthioxanthone, azobisisobutylnitrile, benzoin peroxide, 2,
4,5-triphenylimidazole dimer and the like can be used.
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ãã Film-forming polymers that can be dissolved or swelled in a developer include polyvinyl alcohol, polyacrylic acid, acrylamide-diacetone acrylamide copolymer, etc. when the developer consists of water alone, and when the developer consists of an alkaline aqueous solution. In this case, acrylic acid-methacrylic acid ester copolymer, partially esterified styrene-maleic anhydride copolymer, novolak type phenolic resin, nylon resin, etc. can be used. Moreover, when the developing solution consists of an acidic aqueous solution, dimethylaminoethyl methacrylate-methyl methacrylate copolymer or the like can be used. Michler's ketone, thiazine dye, etc. can be used as a sensitizer, and hydroquinone, etc. can be used as a thermal polymerization inhibitor. More desirably, a polymer or oligomer having a photopolymerizable unsaturated group in the main chain, chain end, or side chain may be used in the above-mentioned composition in a compatible manner, if necessary.
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ãã Hereinafter, the present invention will be specifically explained with reference to Examples.
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åãçŽ2.0ÎŒã®ããªãã¬ãžã¹ãå±€ã圢æããããExample 1 Titanium oxide (FR-22 manufactured by Furukawa Mining Co., Ltd.) 10 g Methyl methacrylate-2-hydroxyethyl methacrylate copolymer (methyl methacrylate 30 mol%, 2-hydroxyethyl methacrylate 40 mol%, methacrylate Copolymer containing 27 mol% nitrile and 3 mol% methacrylic acid) 5g Methyl cellosolve 60g Silicone surfactant (XB-2725, manufactured by Dow Corning) 0.1g Add 80g of glass beads to the above composition and paint A coating solution was obtained by dispersing for 6 hours using a sheaker. Apply this coating liquid to a thickness of 100ÎŒ in a wavelength range of 600~
The coating was applied using a wire bar onto a corona discharge treated polyethylene terephthalate film with a total light transmittance of 85% or more and less than 90% at 1200 nm, and dried with warm air at 90°C for 2 minutes to determine the dry coating film thickness. A white mask layer with a thickness of about 3.0Ό was formed. The total light transmittance of this white mask layer was measured from the base film side: 48% at 600nm, 54% at 800nm, 60% at 1000nm, and 60% at 1200nm.
It was 66%. Next, on this white mask layer, a photosensitive solution with the following composition was applied using a wire bar, and dried with hot air at 90°C for 1 minute and 30 seconds to form a photoresist layer with a dry coating thickness of about 2.0Ό. formed.
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ãã€ãç»åãåŸãããã 1-2-naphthoquinone diazide photosensitive liquid (Photosol manufactured by Tokyo Ohka Co., Ltd.) 10g Methyl ethyl ketone 20g A negative original was placed on the mask image forming material of the present invention having a photoresist layer on the white mask layer formed above, and an ultra-high pressure mercury lamp was used. Exposure amount 200 m with light source (Jet Light 2kW manufactured by Oak Seisakusho Co., Ltd.)
Exposure was performed from the original side at J/cm 2 and an exposure time of 20 seconds.
Next, this exposed mask image forming material of the present invention was immersed in a 1% NaOH aqueous solution at 20°C for 90 seconds, and then
When developed by rubbing with absorbent cotton in tap water, the exposed areas were removed and a clear negative image with a slightly yellowish white color was obtained.
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3.9J/cm 2 , exposure time 1/1000 seconds from the support side
After repeated exposure 100 times, no damage was observed in this negative white mask image.
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ãã On the other hand, when a black negative image obtained by developing a silver halide lithium film using gelatin as a binder was exposed in the same way, the black silver image area absorbed xenon flash lamp light and heat was generated after one exposure. This caused thermal damage to the gelatin binder, making it impossible to use the negative image again.
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æçšã§ãã€ãã When the above-mentioned negative white mask image repeatedly exposed 100 times was used as a negative transmission original of a heat-sensitive recording material described in Example 1 of Japanese Patent Application No. 58-205683, it was found that the heat-sensitive recording material had no background fog density. The white mask image of the present invention was useful as a transparent original.
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液ãšããã Thermal recording material described in Example 1 of Japanese Patent Application No. 58-205683 Carbon black (average particle size 22 mÎŒ) 4 g 10% ammoniacal aqueous solution of 2-hydroxyethyl methacrylate/methyl methacrylate/methacrylic acid copolymer 20 g Distilled water 36 g Surfactant: 0.1 g The above composition was dispersed using glass beads to prepare a coating liquid.
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A photoresist layer having a dry film thickness of about 1.0 ÎŒm was formed.
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ãç»åãåŸãããã Acrylamide/diacetone acrylamide copolymer (copolymer consisting of 60 mol% acrylamide and 40 mol% diacetone acrylamide)
1g Distilled water 19g P-diazodiphenylamine/paraformaldehyde condensate 0.05g Silicone diameter surfactant (manufactured by Dow Corning)
XB-2725) 0.01g A positive original was placed on the mask image forming material of the present invention having a photoresist layer on the white mask layer formed as described above, and the exposure amount was 100 mJ/cm 2 and the exposure time was 10 seconds from the original side. exposed. Next, this exposed mask image forming material of the present invention was washed with running tap water at 20°C for 10 seconds, and then soaked in a 4% aqueous solution of sodium alkylnaphthalene sulfonate (Perex NB Paste, manufactured by Kao Soap Co., Ltd.) for 30 minutes. After 60 seconds of immersion at â, the unexposed areas were removed and a clear white negative image was obtained by rubbing and developing with absorbent cotton in tap water.
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æ§ããã€ãã Similar to the negative white image obtained in Example 1, this negative white image had light resistance to high-intensity xenon flash light.
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ã®çœè²ç»åã¯ééåçš¿ãšããŠæçšã§ãã€ãã Further, when this negative white image was used for a negative transmission original of the heat-sensitive recording material described in Example 1, the heat-sensitive recording material formed a clear black positive image with no background fog density, and the white color of the present invention The images were useful as transparencies.
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ãã§ããã By making the mask layer white, the mask image forming material of the present invention does not damage or erase the image even if it is repeatedly exposed to an extremely powerful light source, and improves the light resistance, which has not been good in the past, thereby making it suitable for thermal photography. The material could be used as a mask material.
Claims (1)
å±€ãããªãã¬ãžã¹ãå±€ãé 次ç©å±€ããŠãªããåèš
æ¯æäœãå«ãåèšçœè²ãã¹ã¯å±€ã®å šå ç·ééçã
æ³¢é·å600ã1200nïœã«ãããŠ70ïŒ ä»¥äžã§ããã
ãšãç¹åŸŽãšããæç±åçææçšãã¹ã¯ç»å圢ææ
æã1 A white mask layer and a photoresist layer are sequentially laminated on a substantially transparent support, and the total light transmittance of the white mask layer including the support is 70% or less in the wavelength range of 600 to 1200 nm. A mask image forming material for a thermal photographic material, characterized in that:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59005489A JPS60149045A (en) | 1984-01-13 | 1984-01-13 | Mask image forming material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59005489A JPS60149045A (en) | 1984-01-13 | 1984-01-13 | Mask image forming material |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60149045A JPS60149045A (en) | 1985-08-06 |
JPH0349423B2 true JPH0349423B2 (en) | 1991-07-29 |
Family
ID=11612655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59005489A Granted JPS60149045A (en) | 1984-01-13 | 1984-01-13 | Mask image forming material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60149045A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2912140B2 (en) * | 1993-10-01 | 1999-06-28 | æ ªåŒäŒç€Ÿãããš | Photosensitive material for plate making |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS576850A (en) * | 1980-06-13 | 1982-01-13 | Ueno Kagaku Kogyo Kk | Liquid corrector for photomechanical process |
-
1984
- 1984-01-13 JP JP59005489A patent/JPS60149045A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS576850A (en) * | 1980-06-13 | 1982-01-13 | Ueno Kagaku Kogyo Kk | Liquid corrector for photomechanical process |
Also Published As
Publication number | Publication date |
---|---|
JPS60149045A (en) | 1985-08-06 |
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