JPH0349240U - - Google Patents

Info

Publication number
JPH0349240U
JPH0349240U JP11027389U JP11027389U JPH0349240U JP H0349240 U JPH0349240 U JP H0349240U JP 11027389 U JP11027389 U JP 11027389U JP 11027389 U JP11027389 U JP 11027389U JP H0349240 U JPH0349240 U JP H0349240U
Authority
JP
Japan
Prior art keywords
wafer
push
flat plate
displacement means
clamps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11027389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11027389U priority Critical patent/JPH0349240U/ja
Publication of JPH0349240U publication Critical patent/JPH0349240U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP11027389U 1989-09-22 1989-09-22 Pending JPH0349240U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11027389U JPH0349240U (enrdf_load_stackoverflow) 1989-09-22 1989-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11027389U JPH0349240U (enrdf_load_stackoverflow) 1989-09-22 1989-09-22

Publications (1)

Publication Number Publication Date
JPH0349240U true JPH0349240U (enrdf_load_stackoverflow) 1991-05-14

Family

ID=31658818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11027389U Pending JPH0349240U (enrdf_load_stackoverflow) 1989-09-22 1989-09-22

Country Status (1)

Country Link
JP (1) JPH0349240U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999028220A1 (fr) * 1997-12-03 1999-06-10 Nikon Corporation Dispositif et procede de transfert de substrats

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999028220A1 (fr) * 1997-12-03 1999-06-10 Nikon Corporation Dispositif et procede de transfert de substrats
US6577382B2 (en) 1997-12-03 2003-06-10 Nikon Corporation Substrate transport apparatus and method

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