JPH0349240U - - Google Patents
Info
- Publication number
- JPH0349240U JPH0349240U JP11027389U JP11027389U JPH0349240U JP H0349240 U JPH0349240 U JP H0349240U JP 11027389 U JP11027389 U JP 11027389U JP 11027389 U JP11027389 U JP 11027389U JP H0349240 U JPH0349240 U JP H0349240U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- push
- flat plate
- displacement means
- clamps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 210000000078 claw Anatomy 0.000 claims description 2
- 239000000696 magnetic material Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11027389U JPH0349240U (OSRAM) | 1989-09-22 | 1989-09-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11027389U JPH0349240U (OSRAM) | 1989-09-22 | 1989-09-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0349240U true JPH0349240U (OSRAM) | 1991-05-14 |
Family
ID=31658818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11027389U Pending JPH0349240U (OSRAM) | 1989-09-22 | 1989-09-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0349240U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999028220A1 (fr) * | 1997-12-03 | 1999-06-10 | Nikon Corporation | Dispositif et procede de transfert de substrats |
-
1989
- 1989-09-22 JP JP11027389U patent/JPH0349240U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999028220A1 (fr) * | 1997-12-03 | 1999-06-10 | Nikon Corporation | Dispositif et procede de transfert de substrats |
| US6577382B2 (en) | 1997-12-03 | 2003-06-10 | Nikon Corporation | Substrate transport apparatus and method |