JPH0349237U - - Google Patents
Info
- Publication number
- JPH0349237U JPH0349237U JP10998489U JP10998489U JPH0349237U JP H0349237 U JPH0349237 U JP H0349237U JP 10998489 U JP10998489 U JP 10998489U JP 10998489 U JP10998489 U JP 10998489U JP H0349237 U JPH0349237 U JP H0349237U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- detection means
- move
- wafer detection
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998489U JPH0349237U (enExample) | 1989-09-19 | 1989-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998489U JPH0349237U (enExample) | 1989-09-19 | 1989-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0349237U true JPH0349237U (enExample) | 1991-05-14 |
Family
ID=31658542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10998489U Pending JPH0349237U (enExample) | 1989-09-19 | 1989-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0349237U (enExample) |
-
1989
- 1989-09-19 JP JP10998489U patent/JPH0349237U/ja active Pending