JPH0349237U - - Google Patents

Info

Publication number
JPH0349237U
JPH0349237U JP10998489U JP10998489U JPH0349237U JP H0349237 U JPH0349237 U JP H0349237U JP 10998489 U JP10998489 U JP 10998489U JP 10998489 U JP10998489 U JP 10998489U JP H0349237 U JPH0349237 U JP H0349237U
Authority
JP
Japan
Prior art keywords
wafer
detection means
move
wafer detection
transfer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10998489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10998489U priority Critical patent/JPH0349237U/ja
Publication of JPH0349237U publication Critical patent/JPH0349237U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP10998489U 1989-09-19 1989-09-19 Pending JPH0349237U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10998489U JPH0349237U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-09-19 1989-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10998489U JPH0349237U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-09-19 1989-09-19

Publications (1)

Publication Number Publication Date
JPH0349237U true JPH0349237U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-14

Family

ID=31658542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10998489U Pending JPH0349237U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-09-19 1989-09-19

Country Status (1)

Country Link
JP (1) JPH0349237U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

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