JPH0348625U - - Google Patents

Info

Publication number
JPH0348625U
JPH0348625U JP10905889U JP10905889U JPH0348625U JP H0348625 U JPH0348625 U JP H0348625U JP 10905889 U JP10905889 U JP 10905889U JP 10905889 U JP10905889 U JP 10905889U JP H0348625 U JPH0348625 U JP H0348625U
Authority
JP
Japan
Prior art keywords
filter
air conditioning
separation membrane
conditioning equipment
regulations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10905889U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10905889U priority Critical patent/JPH0348625U/ja
Publication of JPH0348625U publication Critical patent/JPH0348625U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Filtering Materials (AREA)
  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案の一実施例の概略図である。 1……クリーンルーム、2……酸素分離膜、3
……フイルター、4……空調設備、5……プレフ
イルター、6……減圧ブロア、7……排気口。
FIG. 1 is a schematic diagram of an embodiment of the present invention. 1...Clean room, 2...Oxygen separation membrane, 3
... Filter, 4 ... Air conditioning equipment, 5 ... Pre-filter, 6 ... Decompression blower, 7 ... Exhaust port.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 雰囲気中のダスト量に規制がある施設の空調設
備において、フイルターに酸素分離膜を用いたこ
とを特徴とする空調設備。
Air conditioning equipment for facilities that have regulations on the amount of dust in the atmosphere, and is characterized by using an oxygen separation membrane as a filter.
JP10905889U 1989-09-20 1989-09-20 Pending JPH0348625U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10905889U JPH0348625U (en) 1989-09-20 1989-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10905889U JPH0348625U (en) 1989-09-20 1989-09-20

Publications (1)

Publication Number Publication Date
JPH0348625U true JPH0348625U (en) 1991-05-10

Family

ID=31657661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10905889U Pending JPH0348625U (en) 1989-09-20 1989-09-20

Country Status (1)

Country Link
JP (1) JPH0348625U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008136215A1 (en) * 2007-04-26 2008-11-13 C'stec Corporation Clean unit, method of operating clean unit, and connected clean unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008136215A1 (en) * 2007-04-26 2008-11-13 C'stec Corporation Clean unit, method of operating clean unit, and connected clean unit
JP4451492B2 (en) * 2007-04-26 2010-04-14 シーズテック株式会社 Clean unit, clean unit operation method and connected clean unit
JPWO2008136215A1 (en) * 2007-04-26 2010-07-29 シーズテック株式会社 Clean unit, clean unit operation method and connected clean unit

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