JPH0348224U - - Google Patents
Info
- Publication number
- JPH0348224U JPH0348224U JP10990589U JP10990589U JPH0348224U JP H0348224 U JPH0348224 U JP H0348224U JP 10990589 U JP10990589 U JP 10990589U JP 10990589 U JP10990589 U JP 10990589U JP H0348224 U JPH0348224 U JP H0348224U
- Authority
- JP
- Japan
- Prior art keywords
- section
- semiconductor substrate
- vacuum
- vacuum line
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10990589U JPH0348224U (da) | 1989-09-19 | 1989-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10990589U JPH0348224U (da) | 1989-09-19 | 1989-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0348224U true JPH0348224U (da) | 1991-05-08 |
Family
ID=31658464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10990589U Pending JPH0348224U (da) | 1989-09-19 | 1989-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0348224U (da) |
-
1989
- 1989-09-19 JP JP10990589U patent/JPH0348224U/ja active Pending