JPH0345636U - - Google Patents

Info

Publication number
JPH0345636U
JPH0345636U JP10530989U JP10530989U JPH0345636U JP H0345636 U JPH0345636 U JP H0345636U JP 10530989 U JP10530989 U JP 10530989U JP 10530989 U JP10530989 U JP 10530989U JP H0345636 U JPH0345636 U JP H0345636U
Authority
JP
Japan
Prior art keywords
support parts
cleaned
sets
supported
supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10530989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10530989U priority Critical patent/JPH0345636U/ja
Publication of JPH0345636U publication Critical patent/JPH0345636U/ja
Pending legal-status Critical Current

Links

JP10530989U 1989-09-11 1989-09-11 Pending JPH0345636U (US06818201-20041116-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10530989U JPH0345636U (US06818201-20041116-C00086.png) 1989-09-11 1989-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10530989U JPH0345636U (US06818201-20041116-C00086.png) 1989-09-11 1989-09-11

Publications (1)

Publication Number Publication Date
JPH0345636U true JPH0345636U (US06818201-20041116-C00086.png) 1991-04-26

Family

ID=31654072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10530989U Pending JPH0345636U (US06818201-20041116-C00086.png) 1989-09-11 1989-09-11

Country Status (1)

Country Link
JP (1) JPH0345636U (US06818201-20041116-C00086.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000036644A1 (fr) * 1998-12-11 2000-06-22 Toho Kasei Ltd. Dispositif de traitement de plaquettes
KR100588276B1 (ko) * 1997-11-19 2006-12-01 가부시끼가이샤가이죠 기판건조장치및방법
JP2011204893A (ja) * 2010-03-25 2011-10-13 Tokyo Electron Ltd 基板処理装置、基板処理方法、およびこの基板処理方法を実行するためのコンピュータプログラムが記録された記録媒体
US8567417B2 (en) * 2009-10-05 2013-10-29 Tokyo Electron Limited Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100588276B1 (ko) * 1997-11-19 2006-12-01 가부시끼가이샤가이죠 기판건조장치및방법
WO2000036644A1 (fr) * 1998-12-11 2000-06-22 Toho Kasei Ltd. Dispositif de traitement de plaquettes
US8567417B2 (en) * 2009-10-05 2013-10-29 Tokyo Electron Limited Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method
JP2011204893A (ja) * 2010-03-25 2011-10-13 Tokyo Electron Ltd 基板処理装置、基板処理方法、およびこの基板処理方法を実行するためのコンピュータプログラムが記録された記録媒体

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