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Priority to JP4643387UpriorityCriticalpatent/JPH0344526Y2/ja
Publication of JPS63154228UpublicationCriticalpatent/JPS63154228U/ja
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Publication of JPH0344526Y2publicationCriticalpatent/JPH0344526Y2/ja
Verfahren zur Abstandsmessung zwischen einem Werkzeugendteil einer Manipulatoreinheit und einer mit dem Werkzeugendteil zu bearbeitenden Objektoberfläche oder eines zu manipulierenden Objektes
