JPH0344504A - Method and apparatus for measuring three-dimensional shape of surface - Google Patents

Method and apparatus for measuring three-dimensional shape of surface

Info

Publication number
JPH0344504A
JPH0344504A JP17796589A JP17796589A JPH0344504A JP H0344504 A JPH0344504 A JP H0344504A JP 17796589 A JP17796589 A JP 17796589A JP 17796589 A JP17796589 A JP 17796589A JP H0344504 A JPH0344504 A JP H0344504A
Authority
JP
Japan
Prior art keywords
measured
glass
light
scattering light
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17796589A
Other languages
Japanese (ja)
Other versions
JP2737271B2 (en
Inventor
Masahiro Hokari
Takeshi Uemura
Tetsuo Miyake
Shigeyuki Seto
Kazuaki Shimizu
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP17796589A priority Critical patent/JP2737271B2/en
Publication of JPH0344504A publication Critical patent/JPH0344504A/en
Application granted granted Critical
Publication of JP2737271B2 publication Critical patent/JP2737271B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To enable measurement of a three-dimensional shape of a surface of an object to be measured with a limited number of photodetectors by irradiating a surface of an object to be measured in substance with light from a spot- shaped scattering light source to receive reflected light beam thereof with a photodetector capable of specifying a direction of incidence of light.
CONSTITUTION: Glass 1 as object to be measured is set on a sample base 8 and a scattering light source 2 is generated on a screen 3 with a laser scanner 4. A position of a reflection image of the scattering light source here generated on the glass 1 as object to be measured is measured with a camera 5 with the position thereof known previously. Here, since the position of each scattering light source 2 and a rough distance L to one point on the glass 1 to be measured from a screen 2 are known previously, a normal can be determined on the surface of the glass 1 where the reflection image of the scattering light source is generated and it is possible to measure a three-dimensional shape of the entire surface of the object to be measured in a non-contact manner by continuation thereof. The object to be measured is not limited to glass if the surface thereof has a light reflecting property.
COPYRIGHT: (C)1991,JPO&Japio
JP17796589A 1989-07-12 1989-07-12 Surface three-dimensional shape measuring method and device Expired - Fee Related JP2737271B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17796589A JP2737271B2 (en) 1989-07-12 1989-07-12 Surface three-dimensional shape measuring method and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17796589A JP2737271B2 (en) 1989-07-12 1989-07-12 Surface three-dimensional shape measuring method and device

Publications (2)

Publication Number Publication Date
JPH0344504A true JPH0344504A (en) 1991-02-26
JP2737271B2 JP2737271B2 (en) 1998-04-08

Family

ID=16040174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17796589A Expired - Fee Related JP2737271B2 (en) 1989-07-12 1989-07-12 Surface three-dimensional shape measuring method and device

Country Status (1)

Country Link
JP (1) JP2737271B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5568258A (en) * 1992-08-25 1996-10-22 Asahi Glass Company Ltd. Method and device for measuring distortion of a transmitting beam or a surface shape of a three-dimensional object
US6980291B2 (en) 2002-08-01 2005-12-27 Asahi Glass Company, Limited Method of and apparatus for inspecting a curved shape
JP2013040971A (en) * 2009-02-24 2013-02-28 Corning Inc Method for measuring shape of specular reflection surface

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5568258A (en) * 1992-08-25 1996-10-22 Asahi Glass Company Ltd. Method and device for measuring distortion of a transmitting beam or a surface shape of a three-dimensional object
US6980291B2 (en) 2002-08-01 2005-12-27 Asahi Glass Company, Limited Method of and apparatus for inspecting a curved shape
JP2013040971A (en) * 2009-02-24 2013-02-28 Corning Inc Method for measuring shape of specular reflection surface
JP2016040559A (en) * 2009-02-24 2016-03-24 コーニング インコーポレイテッド Measurement of shape of specular reflection surface

Also Published As

Publication number Publication date
JP2737271B2 (en) 1998-04-08

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